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    DISPLAY DEVICE AND APPARATUS AND METHOD FOR MANUFACTURING THE SAME
    13.
    发明申请
    DISPLAY DEVICE AND APPARATUS AND METHOD FOR MANUFACTURING THE SAME 有权
    显示装置及其制造方法及其制造方法

    公开(公告)号：US20160133873A1

    公开(公告)日：2016-05-12

    申请号：US14811729

    申请日：2015-07-28

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Myungsoo Huh ,  Sunghun Key ,  Sungchul Kim ,  Cheollae Roh ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi

    IPC: H01L51/52 ,  H01J37/32 ,  H01L51/56

    CPC classification number: H01L51/5256 ,  C23C16/042 ,  C23C16/345 ,  C23C16/45565 ,  C23C16/505 ,  H01J37/32091 ,  H01J37/3244

    Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.

    Abstract translation: 公开了一种显示装置及其制造方法。 显示装置包括：基板; 形成在所述基板上的显示单元; 以及形成在所述显示单元上的无机层，其中所述无机层的水蒸气透过率（WVTR）为5×10 -5 g / m 2·天以下。 用于制造显示装置的装置包括：腔室; 用于将混合气体喷射到所述室中的淋浴头; 用于从所述混合气体形成等离子体的等离子体产生单元; 面向淋浴喷头的感受器，其上安置有基底; 以及电连接到所述等离子体产生单元的电源单元，其中从所述电源单元提供给所述等离子体产生单元的电流的频率在约27MHz至约42MHz之间。

    Bonding apparatus and method of bonding a display device using the same
    15.
    发明授权
    Bonding apparatus and method of bonding a display device using the same 有权

    公开(公告)号：US11289686B2

    公开(公告)日：2022-03-29

    申请号：US16409065

    申请日：2019-05-10

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Sukwon Jung ,  Seokhyun Nam ,  Jongdeok Park

    IPC: H01L51/56 ,  B29C65/52 ,  H01L51/52 ,  B29C65/00 ,  B29L31/34

    Abstract: A bonding apparatus includes adhesive sheet that includes a central adhesive portion adhered to a central portion of a first substrate and a bendable adhesive portion that surrounds the central adhesive portion in a plan view and that is adhered to an edge portion of the first substrate that extends from the central portion, a molding member that includes a top surface that overlaps the central portion and a side surface bent from the top surface and that has a curved shape and that supports the adhesive sheet through the top surface, a magnet member disposed on a first display surface of a second substrate that covers the central portion of the first substrate, and pressing balls disposed in the molding member. The pressing balls press fife central adhesive portion and the bendable adhesive portion by forming attractive force with magnet member.

    Apparatus and method of manufacturing display apparatus
    16.
    发明授权
    Apparatus and method of manufacturing display apparatus 有权

    公开(公告)号：US11186908B2

    公开(公告)日：2021-11-30

    申请号：US16160757

    申请日：2018-10-15

    Applicant: Samsung Display Co., Ltd.

    Inventor： Seokjin Ko ,  Myungsoo Huh ,  Sukwon Jung ,  Dongkyun Ko ,  Inkyo Kim

    IPC: C23C16/44 ,  C23C16/46 ,  H01L21/00 ,  H01J37/32 ,  C23C16/455

    Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.

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