公开(公告)号：US20190211445A1

公开(公告)日：2019-07-11

申请号：US16160757

申请日：2018-10-15

Applicant: Samsung Display Co., Ltd.

Inventor： Seokjin Ko ,  Myungsoo Huh ,  Sukwon Jung ,  Dongkyun Ko ,  Inkyo Kim

IPC: C23C16/44 ,  C23C16/46

CPC classification number: C23C16/4405 ,  C23C16/46

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.

公开(公告)号：US11186908B2

公开(公告)日：2021-11-30

申请号：US16160757

申请日：2018-10-15

Applicant: Samsung Display Co., Ltd.

Inventor： Seokjin Ko ,  Myungsoo Huh ,  Sukwon Jung ,  Dongkyun Ko ,  Inkyo Kim

IPC: C23C16/44 ,  C23C16/46 ,  H01L21/00 ,  H01J37/32 ,  C23C16/455

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.