公开(公告)号：US11101328B2

公开(公告)日：2021-08-24

申请号：US15076488

申请日：2016-03-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Suk-Won Jung ,  Myung-Soo Huh ,  Choel-Min Jang

IPC: H01J37/32 ,  C23C16/50 ,  H05H1/24 ,  C23C16/509 ,  C23C16/54 ,  H01L27/32 ,  C23C16/44 ,  C23C16/452 ,  C23C16/455 ,  H01L51/56

Abstract: Provided is a vapor deposition apparatus including: a plasma generator configured to change at least a portion of a first raw material gas into a radical form; a corresponding surface corresponding to the plasma generator; a reaction space between the plasma generator and the corresponding surface; and an insulating member separated from, and surrounding the plasma generator.

公开(公告)号：US10446753B2

公开(公告)日：2019-10-15

申请号：US15205815

申请日：2016-07-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: C23C16/44 ,  H01L51/00 ,  H01B13/30 ,  C23C14/24 ,  C23C14/56 ,  C23C16/455 ,  C23C16/50 ,  H01L51/52 ,  H01L51/56 ,  H01L27/32

Abstract: A vapor deposition apparatus in which a deposition process is performed by moving a substrate, the vapor deposition apparatus including a supply unit that injects at least one raw material gas towards the substrate, and a blocking gas flow generation unit that is disposed corresponding to the supply unit and generates a gas-flow that blocks a flow of the raw material gas.

公开(公告)号：US09481929B2

公开(公告)日：2016-11-01

申请号：US14177180

申请日：2014-02-10

Applicant: Samsung Display Co., Ltd.

Inventor： Choel-Min Jang ,  Sung-Hun Key ,  In-Kyo Kim ,  Suk-Won Jung ,  Myung-Soo Huh

IPC: H01L21/36 ,  C23C16/455

CPC classification number: C23C16/45551

Abstract: A vapor deposition apparatus for depositing thin films on a substrate includes a supply unit including a plurality of linear supply members configured to supply at least one gas; and a nozzle unit including a plurality of nozzle members connected to the plurality of supply members and configured to supply the at least one gas toward the substrate, wherein two adjacent nozzle members of the plurality of nozzle members are connected to at least one common supply member of the plurality of supply members.

Abstract translation: 一种用于在衬底上沉积薄膜的气相沉积设备包括：供给单元，包括多个线性供应构件，其被构造成供应至少一种气体; 以及喷嘴单元，其包括连接到所述多个供应构件并被配置为朝向所述基板供应所述至少一种气体的多个喷嘴构件，其中所述多个喷嘴构件中的两个相邻的喷嘴构件连接到至少一个共同的供应构件 的多个供应构件。

公开(公告)号：US09299954B2

公开(公告)日：2016-03-29

申请号：US14331846

申请日：2014-07-15

Applicant: Samsung Display Co., Ltd.

Inventor： Myung-Soo Huh ,  Jae-Hyun Kim ,  Jin-Kwang Kim ,  Cheol-Lae Roh ,  Suk-Won Jung ,  Cheol-Min Jang

IPC: H01J9/26 ,  H01J9/32 ,  H01L51/52

CPC classification number: H01L51/5256 ,  H01L51/5253

Abstract: An organic light-emitting apparatus including: a substrate; an organic light-emitting device disposed on the substrate and including a first electrode, a second electrode, and an intermediate layer disposed between the first electrode and the second electrode; and an encapsulation layer provided to cover the organic light-emitting device. The encapsulation layer includes a first inorganic layer including a first fracture point, and a first fracture control layer provided on the first inorganic layer to seal the first fracture point.

公开(公告)号：US09184413B2

公开(公告)日：2015-11-10

申请号：US13670095

申请日：2012-11-06

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Joong Joo ,  Myung-Soo Huh ,  Suk-Won Jung

IPC: H05B33/04 ,  H05B33/10 ,  H01L51/52

CPC classification number: H01L51/5256 ,  H05B33/04 ,  H05B33/10

Abstract: A flat panel display device provides a sealing structure for comprising and sealing a display unit disposed in a first region on a substrate. The display unit includes the first region and a second region, and a barrier is disposed in the first region on the substrate, on an outer side of the display unit, and adjacent to the second region. The sealing structure contacts the barrier, and includes at least one first layer of an inorganic material and at least one second layer of an organic material. A method of manufacturing the flat panel display device is also disclosed.

Abstract translation: 平板显示装置提供密封结构，用于包括并密封设置在基板上的第一区域中的显示单元。 所述显示单元包括所述第一区域和第二区域，并且所述屏障设置在所述基板的所述第一区域中，所述显示单元的外侧上并且与所述第二区域相邻。 密封结构与屏障接触，并且包括至少一个无机材料的第一层和至少一个有机材料的第二层。 还公开了一种制造平板显示装置的方法。

公开(公告)号：US20140302626A1

公开(公告)日：2014-10-09

申请号：US13964020

申请日：2013-08-09

Applicant: Samsung Display Co., Ltd.

Inventor： Cheol-Rae Jo ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jeong-Ho Yi

IPC: H01L51/56

CPC classification number: H01L51/0011 ,  H01L2251/566

Abstract: Provided are a method of manufacturing a display that may reduce deposition nonuniformity while concurrently manufacturing a plurality of displays, and a deposition apparatus that may be used in the method, wherein the method includes: preparing a mother substrate having a plurality of regions in a matrix pattern, the mother substrate being for forming a plurality of display units corresponding to the plurality of regions; inserting the mother substrate into a deposition chamber, wherein a deposition source is in the deposition chamber; depositing a material on the mother substrate by using a mask including a plurality of parallel stripe-shaped masking sheets extending in a first direction; and cutting the mother substrate along a periphery of each of the plurality of display units to obtain the plurality of displays.

Abstract translation: 提供一种制造可以减少沉积不均匀性同时制造多个显示器的显示器的方法，以及可用于该方法的沉积设备，其中该方法包括：制备具有矩阵中多个区域的母基板 所述母体衬底用于形成对应于所述多个区域的多个显示单元; 将母基板插入沉积室，其中沉积源在沉积室中; 通过使用包括沿第一方向延伸的多个平行的条状掩模片的掩模将材料沉积在母体衬底上; 以及沿着所述多个显示单元中的每一个的周边切割所述母体基板以获得所述多个显示器。

公开(公告)号：US20130328480A1

公开(公告)日：2013-12-12

申请号：US13670095

申请日：2012-11-06

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung-Joong Joo ,  Myung-Soo Huh ,  Suk-Won Jung

IPC: H05B33/04 ,  H05B33/10

CPC classification number: H01L51/5256 ,  H05B33/04 ,  H05B33/10

Abstract: A flat panel display device provides a sealing structure for comprising and sealing a display unit disposed in a first region on a substrate. The display unit includes the first region and a second region, and a barrier is disposed in the first region on the substrate, on an outer side of the display unit, and adjacent to the second region. The sealing structure contacts the barrier, and includes at least one first layer of an inorganic material and at least one second layer of an organic material. A method of manufacturing the flat panel display device is also disclosed.

Abstract translation: 平板显示装置提供密封结构，用于包括并密封设置在基板上的第一区域中的显示单元。 所述显示单元包括所述第一区域和第二区域，并且所述屏障设置在所述基板的所述第一区域中，所述显示单元的外侧上并且与所述第二区域相邻。 密封结构与屏障接触，并且包括至少一个无机材料的第一层和至少一个有机材料的第二层。 还公开了一种制造平板显示装置的方法。

公开(公告)号：US20190169747A1

公开(公告)日：2019-06-06

申请号：US16271189

申请日：2019-02-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: C23C16/455

Abstract: A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.

公开(公告)号：US09673265B2

公开(公告)日：2017-06-06

申请号：US14020849

申请日：2013-09-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myung-Soo Huh ,  Suk-Won Jung ,  Jeong-Ho Yi ,  Sang-Hyuk Hong ,  Yong-Suk Lee

IPC: H01L21/68 ,  H01L27/32 ,  C23C16/04 ,  C23C16/458 ,  H01L21/687

CPC classification number: C23C16/042 ,  C23C16/4405 ,  C23C16/4585 ,  C23C16/50 ,  C23C16/52 ,  H01L21/681 ,  H01L21/682 ,  H01L21/68735 ,  H01L21/68742 ,  H01L27/3244 ,  H01L51/0012 ,  H01L51/56

Abstract: A deposition apparatus for performing a deposition process by using a mask with respect to a substrate, the deposition apparatus includes a chamber, a support unit in the chamber, the support unit including first holes and being configured to support the substrate, a supply unit configured to supply at least one deposition raw material toward the substrate, and movable alignment units through the first holes of the support unit, the alignment units being configured to support the mask and to align the mask with respect to the substrate.

公开(公告)号：US20160348241A1

公开(公告)日：2016-12-01

申请号：US15231647

申请日：2016-08-08

Applicant: Samsung Display Co., Ltd.

Inventor： Cheol-Min Jang ,  Myung-Soo Huh ,  Suk-Won Jung ,  Jae-Hyun Kim ,  Sung-Chul Kim ,  Jin-Kwang Kim ,  Chang-Woo Shim ,  Sung-Hun Key ,  In-Kyo Kim

IPC: C23C16/455 ,  H01L51/00 ,  C23C16/44 ,  H01L51/56

CPC classification number: C23C16/45544 ,  C23C16/403 ,  C23C16/4412 ,  C23C16/45519 ,  C23C16/45563 ,  H01L27/3244 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/50 ,  H01L51/56

Abstract: A vapor deposition apparatus for depositing a thin film on a substrate, by which a deposition process is efficiently performed and deposition film characteristics are easily improved, and a vapor deposition apparatus including: a stage onto which a substrate is disposed; and a supply unit disposed to face the substrate and having a main body member and a nozzle member disposed on one surface of the main body member facing the substrate, to sequentially supply a plurality of gases towards the substrate, and a method of manufacturing an organic light-emitting display apparatus using the same.

Abstract translation: 一种用于在基板上沉积薄膜的气相沉积设备，通过该气相沉积设备有效地进行沉积工艺并容易地改善沉积膜特性;以及气相沉积设备，包括：设置有基板的平台; 以及供给单元，其配置成面对基板，具有主体部件和喷嘴部件，所述主体部件和喷嘴部件配置在与所述基板相对的所述主体部件的一个表面上，以顺序向所述基板供给多个气体;以及制造有机物的方法 发光显示装置。