公开(公告)号：US10563301B2

公开(公告)日：2020-02-18

申请号：US14968746

申请日：2015-12-14

Applicant: Samsung Display Co., Ltd.

Inventor： Jaemin Hong

IPC: C23C16/04 ,  H01L51/00 ,  C23C14/04 ,  H01L27/32

Abstract: A deposition mask set includes a first mask, a second mask, and a third mask. Each of the first, second, and third masks includes a first edge substantially parallel to a first direction, a second edge substantially parallel to a second direction, and a plurality of openings. Each of the openings includes a first opening side that is substantially parallel to a third direction and a second opening side that is substantially parallel to a fourth direction, and each of the openings corresponds to one of a first, second, or third color area at one of pixel areas. The third and fourth directions are not parallel to the first and second directions, and the first, second, and third color areas are adjacent to each other in the third direction.

公开(公告)号：US11751465B2

公开(公告)日：2023-09-05

申请号：US17131254

申请日：2020-12-22

Applicant: Samsung Display Co., Ltd.

Inventor： Youngkwang Lee ,  Sangyun Lee ,  Jaemin Hong

IPC: H01L51/56 ,  H10K71/00 ,  C23C14/04 ,  C23C16/04 ,  H10K71/16

CPC classification number: H10K71/00 ,  C23C14/042 ,  C23C16/042 ,  H10K71/166

Abstract: Provided are a mask frame assembly in which deformation of a frame may be reduced, and a method of manufacturing an organic light-emitting display apparatus using the mask frame assembly. The mask frame assembly includes a frame of a rectangular shape, the frame including an opening and a lower surface including first grooves extending in a first direction, a plurality of first auxiliary sticks extending in the first direction across the opening, wherein a first end and a second end of each of the first auxiliary sticks are bonded to an upper surface of the frame, a mask on the plurality of first auxiliary sticks, and a plurality of second auxiliary sticks arranged in the first grooves, wherein one end and an opposite end of each of the plurality of second auxiliary sticks are bonded to a bottom surface in each of the first grooves.

公开(公告)号：US11597995B2

公开(公告)日：2023-03-07

申请号：US16953123

申请日：2020-11-19

Applicant: Samsung Display Co., Ltd.

Inventor： Jeunghoon Kim ,  Seungmin Jin ,  Jaemin Hong

IPC: C23C14/04 ,  H01L51/00 ,  H01L51/56 ,  H01L51/52

Abstract: Provided are a method of manufacturing a mask that has a high precision configured to minimize a shadow effect, and a method of manufacturing a display device. The method of manufacturing a mask includes: tensioning a mask sheet; bonding the mask sheet that is tensioned to a mask frame; and forming an opening in the mask sheet by irradiating laser light on the mask sheet such that an inner wall of the opening has a slope with respect to a surface of the mask sheet.

公开(公告)号：US11560621B2

公开(公告)日：2023-01-24

申请号：US16788185

申请日：2020-02-11

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaemin Hong

IPC: C23C16/04 ,  H01L51/00 ,  C23C14/04 ,  H01L51/56 ,  H01L27/32

Abstract: A deposition mask set includes a first mask, a second mask, and a third mask. Each of the first mask, second, and third masks includes a first edge substantially parallel to a first direction, a second edge substantially parallel to a second direction, and a plurality of first openings. Each of the openings includes a first opening side that is substantially parallel to a third direction and a second opening side that is substantially parallel to a fourth direction, and each of the openings corresponds to one of a first, second, or third color area at one of pixel areas. The third and fourth directions are not parallel to the first and second directions, and the first, second, and third color areas are adjacent to each other in the third direction.

公开(公告)号：US10532377B2

公开(公告)日：2020-01-14

申请号：US14882902

申请日：2015-10-14

Applicant: Samsung Display Co., Ltd.

Inventor： Jaemin Hong ,  Hyunseung Kang ,  Hanul Kwen ,  Jeunghoon Kim ,  Hanyoung Kim ,  Younghoon Roh ,  Jihye Seo ,  Wooyoung Jung ,  Pilseon Ji

IPC: B05D1/32 ,  B05C21/00 ,  C23C14/04 ,  B05B12/20

Abstract: A mask assembly for thin film deposition includes: a mask frame including an opening, the mask frame disposed surrounding the opening; and a mask unit including: first masks mounted on the mask frame, the first masks extending in a first direction; a second mask disposed on the first masks, the second mask including: one open hole; and at least one foreign substance discharge hole; and a third mask disposed on the second mask, the third mask extending in a second direction and including deposition holes, wherein the second direction crosses the first direction, and wherein a substrate is disposed on the third mask.

公开(公告)号：US10385441B2

公开(公告)日：2019-08-20

申请号：US14994906

申请日：2016-01-13

Applicant: Samsung Display Co., Ltd.

Inventor： Yoonchan Oh ,  Jongho Yang ,  Youngsun Cho ,  Jaemin Hong

IPC: C23C14/04 ,  C23C16/04 ,  C23C16/458

Abstract: A mask frame assembly and a manufacturing method of the same are provided. The mask frame assembly includes a frame unit having a plurality of frames to form an opening, a deposition mask extended in a first direction and fixed to the frame unit, and a gap adjusting unit installed between one frame and another frame disposed adjacent to the one frame among the plurality of frames, wherein the gap adjusting unit adjusts a distance between the one frame and the another frame.

公开(公告)号：US20160167083A1

公开(公告)日：2016-06-16

申请号：US14719155

申请日：2015-05-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jeunghoon Kim ,  Yoonchan Oh ,  Jangwoo Kim ,  Heeseak Noh ,  Bongjun Park ,  Taeyong An ,  Daesik Jang ,  Cheolgyu Jeong ,  Jaemin Hong

IPC: B05C21/00 ,  B05B15/04

CPC classification number: B05B12/20 ,  B05C21/005 ,  C23C14/042 ,  H01L51/0011 ,  H01L51/56

Abstract: A mask frame assembly includes a frame and a mask including a pattern portion having a pattern hole and a shape memory alloy portion. A method of manufacturing a mask frame assembly includes forming a pattern portion having a pattern hole and a shape memory alloy portion on a mask, the shape memory alloy portion extending in a first direction at a deposition temperature, and coupling the mask to a frame by extending the mask at a room temperature in a second direction perpendicular to the first direction.

Abstract translation: 荫罩框架组件包括框架和掩模，其包括具有图形孔的图案部分和形状记忆合金部分。 一种掩模框架组件的制造方法包括在掩模上形成具有图案孔和形状记忆合金部分的图案部分，所述形状记忆合金部分在沉积温度下沿第一方向延伸，并将所述掩模与框架相连 在垂直于第一方向的第二方向上在室温下延伸掩模。