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公开(公告)号:US20240321726A1
公开(公告)日:2024-09-26
申请号:US18419715
申请日:2024-01-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jinwoo LEE , Yubo QIAN , Hyunjae KANG , Gyeongseop KIM , Sutae KIM , Jaeyoung PARK , Jeonwon JEONG
IPC: H01L23/522 , H01L23/528 , H01L27/088
CPC classification number: H01L23/5226 , H01L23/528 , H01L27/088 , H01L27/0886
Abstract: An integrated circuit device includes a first conductive pattern disposed on a substrate, a second conductive pattern surrounding a portion of the first conductive pattern and covering a lower portion of a sidewall of the first conductive pattern, an upper insulation structure on the first conductive pattern and the second conductive pattern, and an upper conductive pattern penetrating through the upper insulation structure and extending in a vertical direction, wherein the upper conductive pattern includes a main plug portion overlapping the first conductive pattern and the second conductive pattern in the vertical direction, and a vertical extension extending from a portion of the main plug portion toward the substrate, covering an upper of the upper sidewall of the first conductive pattern, and overlapping the second conductive pattern in the vertical direction, and a dummy contact is formed on a single diffusion break region on the substrate.
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公开(公告)号:US20240274598A1
公开(公告)日:2024-08-15
申请号:US18500636
申请日:2023-11-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jinwoo LEE , Hojun CHOI , Sutae KIM
IPC: H01L27/06 , H01L21/306 , H01L23/48 , H01L23/522 , H01L29/732
CPC classification number: H01L27/0623 , H01L21/30625 , H01L23/481 , H01L23/5226 , H01L29/7322
Abstract: The present disclosure relates to an integrated circuit element and a manufacturing method thereof. An integrated circuit element may include a substrate including a first region and a second region, a first element in the first region of the substrate and configured to generate an electric field in a horizontal direction, and a second element in the second region of the substrate and configured to generate an electric field is formed in a vertical direction, wherein a thickness of the second region of the substrate is thicker than a thickness of the first region.
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公开(公告)号:US20240202879A1
公开(公告)日:2024-06-20
申请号:US18471504
申请日:2023-09-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jinwoo LEE , Bumjoo LEE , Su-Young LEE
CPC classification number: G06T5/50 , G06T5/002 , G06T7/11 , G06T7/62 , G06T2207/20132 , G06T2207/20216
Abstract: An image processing method includes generating a full image of an area of interest in which unit patterns are repeatedly arranged, blurring each of the unit patterns, calculating respective center positions of each of the unit patterns based on the blurring, setting respective reference positions on each of the unit patterns based on the center positions, cropping the full image into a plurality of unit images, and merging the plurality of unit images based on the reference positions to generate an averaged image.
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公开(公告)号:US20210254224A1
公开(公告)日:2021-08-19
申请号:US17313534
申请日:2021-05-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jungah KIM , Mihyun PARK , Jinwoo LEE , Keonyoung KIM , Hyosan LEE , Hoon HAN , Jin Uk LEE , Jung Hun LIM
IPC: C23F1/26 , C23F1/30 , H01L21/311 , H01L21/306
Abstract: A method of etching a metal barrier layer and a metal layer is provided. The method includes forming the metal barrier layer and the metal layer on a substrate, and using an etching composition to etch the metal barrier layer and the metal layer. The etching composition may include an oxidant selected from nitric acid, bromic acid, iodic acid, perchloric acid, perbromic acid, periodic acid, sulfuric acid, methane sulfonic acid, p-toluenesulfonic acid, benzenesulfonic acid, or a combination thereof, a metal etching inhibitor including a compound expressed by Chemical Formula 1, and a metal oxide solubilizer selected from phosphoric acid, phosphate, carboxylic acid having 3 to 20 carbon atoms, or a combination thereof.
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公开(公告)号:US20200343113A1
公开(公告)日:2020-10-29
申请号:US16690498
申请日:2019-11-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yong Jun CHOI , Seok Hoon KIM , Young-Hoo KIM , In Gi KIM , Sung Hyun PARK , Seung Min SHIN , Kun Tack LEE , Jinwoo LEE , Hun Jae JANG , Ji Hoon CHA
IPC: H01L21/67 , H01L21/687 , B08B3/08
Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.
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公开(公告)号:US20200087798A1
公开(公告)日:2020-03-19
申请号:US16574372
申请日:2019-09-18
Applicant: SAMSUNG ELECTRONICS CO., LTD. , SOULBRAIN CO., LTD.
Inventor: Jungah KIM , Mihyun PARK , Jinwoo LEE , Keonyoung KIM , Hyosan LEE , Hoon HAN , Jin Uk LEE , Jung Hun LIM
IPC: C23F1/26 , H01L21/306 , H01L21/311 , C23F1/30
Abstract: Disclosed is a method of etching a metal barrier layer and a metal layer. The method includes forming the metal barrier layer and the metal layer on a substrate, and using an etching composition to etch the metal barrier layer and the metal layer. The etching composition may include an oxidant selected from nitric acid, bromic acid, iodic acid, perchloric acid, perbromic acid, periodic acid, sulfuric acid, methane sulfonic acid, p-toluenesulfonic acid, benzenesulfonic acid, or a combination thereof, a metal etching inhibitor including a compound expressed by Chemical Formula 1, and a metal oxide solubilizer selected from phosphoric acid, phosphate, carboxylic acid having 3 to 20 carbon atoms, or a combination thereof.
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公开(公告)号:US20250048723A1
公开(公告)日:2025-02-06
申请号:US18645844
申请日:2024-04-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jinwoo LEE , Sutae KIM
IPC: H01L27/088 , H01L23/48 , H01L29/417 , H01L29/423 , H01L29/775 , H01L29/786
Abstract: A semiconductor device includes a substrate having first and second surfaces; an active pattern extending on the first surface of the substrate, the active pattern having first and second conductivity-type impurity regions, the first and second conductivity-type impurity regions in contact with each other; semiconductor patterns stacked on a portion of the active pattern between the first and second conductivity-type impurity regions; an inactive gate structure extending across the portion of the active pattern between the first and second conductivity-type impurity regions, the inactive gate structure surrounding the semiconductor patterns; a first contact passing through the substrate from the second surface of the substrate and connected to the first conductivity-type impurity region; and a second contact passing through the substrate from the second surface of the substrate and connected to the second conductivity-type impurity region.
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公开(公告)号:US20250014169A1
公开(公告)日:2025-01-09
申请号:US18644638
申请日:2024-04-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Bumjoo LEE , Jinwoo LEE , Suyoung LEE
Abstract: A defect inspection method includes: recognizing image peaks that are reference positions of image patterns included an inspection image; performing filtering on a reference image including reference patterns, recognizing reference peaks, and then selecting some of the reference peaks as peak samples; calculating candidate correction constants by overlapping the filtered inspection image and the filtered reference image, and then selecting a primary correction constant among the candidate correction constants; applying the first correction constant to the reference image and selecting a secondary correction constant by matching the image peaks to the reference peaks included in a primary corrected reference image, and then applying the secondary correction constant to the primary corrected reference image and forming a secondary corrected reference image aligned with the inspection image; and performing a defect inspection on the inspection image by matching the image patterns to reference patterns included in the secondary corrected reference image.
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公开(公告)号:US20240196763A1
公开(公告)日:2024-06-13
申请号:US18214755
申请日:2023-06-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yumin KIM , Seyun KIM , Garam PARK , Hyunjae SONG , Seungyeul YANG , Seungdam HYUN , Jooheon KANG , Jinwoo LEE
CPC classification number: H10N70/826 , H10B63/84 , H10N70/8833
Abstract: A variable resistance memory device includes a pillar, a resistance change layer provided at a side surface of the pillar, a semiconductor layer provided at a side surface of the resistance change layer, a gate insulating layer provided at a side surface of the semiconductor layer, a plurality of isolating layers and a plurality of gate electrodes alternately arranged along a surface of the gate insulating layer, and an internal resistance layer between the resistance change layer and the semiconductor layer, where a resistance of the internal resistance layer is greater than a resistance of the semiconductor layer when the semiconductor layer includes conductor characteristics and the resistance of the internal resistance layer is less than the resistance of the semiconductor layer when the semiconductor layer includes insulator characteristics.
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公开(公告)号:US20230253218A1
公开(公告)日:2023-08-10
申请号:US18135618
申请日:2023-04-17
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ji Hoon CHA , Jinwoo LEE , Seok Hoon KIM , In Gi KIM , Seung Min SHIN , Yong Jun CHOI
IPC: H01L21/67 , H01L21/687
CPC classification number: H01L21/67115 , H01L21/67051 , H01L21/68728 , H01L21/68764
Abstract: An apparatus is provided. The apparatus includes a spinner configured to hold a wafer, a nozzle configured to supply a liquid chemical onto an upper surface of the wafer, and a laser module configured to heat the wafer by radiating a laser beam to a lower surface of the wafer while the nozzle supplies the liquid chemical onto the upper surface of the wafer.
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