知搜-全球专利检索

  1. 登录
  2. 注册

搜索结果

22 条记录 (耗时 0.022 秒)

    Planarization of dielectric layers in integrated circuits
    11.
    发明授权
    Planarization of dielectric layers in integrated circuits 失效
    集成电路中介质层的平面化

    公开(公告)号：US4642162A

    公开(公告)日：1987-02-10

    申请号：US815603

    申请日：1986-01-02

    申请人： David J. Brownell ,  Daniel C. Christensen ,  David G. Erie ,  Daniel Youngner

    发明人： David J. Brownell ,  Daniel C. Christensen ,  David G. Erie ,  Daniel Youngner

    IPC分类号： H01L21/3105 ,  H01L21/768 ,  B44C1/22 ,  C03B15/00

    CPC分类号： H01L21/76819 ,  H01L21/31055

    摘要： A method is disclosed for the planarization of a semiconductor device structure by a two stage planarization process which comprises: applying a dielectric layer over a first conductive layer, spin coating an organic layer onto the first dielectric layer, etching the device in a plasma etching process to substantially remove the organic planarization layer, then etching the device in a plasma etching process which etches the exposed dielectric layer to substantially remove all of it, removing the remaining organic planarization layer, followed by the application of a second dielectric layer under bias sputter deposition conditions. The bias sputter deposition fills trenches and eliminates peaks in the remaining first dielectric layer as it builds up the second dielectric layer. The process planarizes the dielectric layer without thickness variations dependent upon conductor layer pattern density.

    摘要翻译： 公开了一种通过两级平坦化工艺对半导体器件结构进行平面化的方法，该方法包括：在第一导电层上施加电介质层，将有机层旋涂到第一介电层上，在等离子体蚀刻工艺中蚀刻器件 以基本上去除有机平坦化层，然后在等离子体蚀刻工艺中蚀刻该器件，其蚀刻暴露的电介质层以基本上除去其中的所有材料，去除剩余的有机平坦化层，随后在偏置溅射沉积下施加第二介电层 条件。 偏置溅射沉积填充沟槽并消除剩余的第一介电层中的峰值，因为它构成第二介电层。 该过程使介电层平坦化，而不依赖于导体层图案密度的厚度变化。

    DYNAMIC REFLECTOR ARRAY AND METHOD OF MAKING THE SAME
    14.
    发明申请
    DYNAMIC REFLECTOR ARRAY AND METHOD OF MAKING THE SAME 失效
    动态反射器阵列及其制造方法

    公开(公告)号：US20070025002A1

    公开(公告)日：2007-02-01

    申请号：US11277961

    申请日：2006-03-30

    申请人： Daniel Youngner ,  Eugen Cabuz ,  Thomas Ohnstein ,  Paul Bauhahn

    发明人： Daniel Youngner ,  Eugen Cabuz ,  Thomas Ohnstein ,  Paul Bauhahn

    IPC分类号： G02B5/122

    CPC分类号： G02B5/124 ,  G02B26/0841 ,  Y10S359/90 ,  Y10S359/904

    摘要： A dynamic micro-structured reflector includes a substrate having a generally planar major surface and a plurality of cavities on the planar major surface. Each cavity having at least a first and second sidewalls set at an angle offset from the planar major surface. The first sidewall being a stationary optical face and the second sidewall being a dynamic optical face. The dynamic optical face is deflectable between a first position and a second position. The dynamic optical face in the first position redirects more light back to a light source than the dynamic optical face in the second position. Methods of making a dynamic micro-structured reflector are also disclosed.

    摘要翻译： 动态微结构反射器包括在平面主表面上具有大致平坦的主表面和多个空腔的基底。 每个空腔具有至少第一和第二侧壁设置成与平面主表面偏移的角度。 第一侧壁是固定光学面，第二侧壁是动态光学面。 动态光学面可在第一位置和第二位置之间偏转。 第一位置中的动态光学面将第二位置的动态光学面更多的光重定向到光源。 还公开了制造动态微结构反射器的方法。

    Robotic member
    16.
    发明申请
    Robotic member 失效
    机器人会员

    公开(公告)号：US20050099254A1

    公开(公告)日：2005-05-12

    申请号：US10712840

    申请日：2003-11-12

    申请人： Thomas Ohnstein ,  Daniel Youngner ,  Robert Horning

    发明人： Thomas Ohnstein ,  Daniel Youngner ,  Robert Horning

    IPC分类号： B25J9/06 ,  B25J18/06 ,  H02N1/00 ,  H01F7/08

    CPC分类号： B08B9/045 ,  B25J9/06 ,  B25J9/065 ,  B25J18/06 ,  H02N1/006

    摘要： An elongated robotic member that is simple in design and structure, relatively inexpensive and consumes little power. In one illustrative embodiment, one or more linear actuators are used in conjunction with two or more plates that are fixed at spaced locations along a spine member. Fixed between each pair of plates is one or more actuators, which when activated, pull or push corresponding portions of the plates towards or away from each other. This changes the relative orientation of the plate pairs, thus providing a bending movement. The spine preferably is flexible at least in the lateral direction, and bends in response to the relative movement of the plates. A number of plate pairs may be provided to create an arbitrarily long robotic member.

    摘要翻译： 一种细长的机器人构件，其设计和结构简单，相对便宜并且消耗很少的动力。 在一个说明性实施例中，一个或多个线性致动器与两个或更多个板一起使用，两个或更多个板沿着脊柱构件固定在间隔开的位置。 在每对板之间固定有一个或多个致动器，当致动器被致动时，拉动或推动板的相应部分朝向或远离彼此。 这样会改变板对的相对方位，从而提供弯曲运动。 脊柱优选至少在横向上是柔性的，并且响应于板的相对运动而弯曲。 可以提供多个板对以产生任意长的机器人构件。

    Self-healing liquid contact switch
    18.
    发明申请
    Self-healing liquid contact switch 失效
    自愈液体接触开关

    公开(公告)号：US20050104693A1

    公开(公告)日：2005-05-19

    申请号：US10749255

    申请日：2003-12-31

    申请人： Daniel Youngner

    发明人： Daniel Youngner

    IPC分类号： C23C14/04 ,  C23C14/50 ,  H01H29/00 ,  H01H29/06 ,  H01H59/00 ,  H01H51/22

    CPC分类号： H01H29/00 ,  H01H29/06 ,  H01H59/0009 ,  H01H2029/008

    摘要： A self-healing liquid contact switch and methods for producing such devices are disclosed. An illustrative self-healing liquid contact switch can include an upper actuating surface and a lower actuating surface each having a number of liquid contact regions thereon configured to wet with a liquid metal. The upper and lower actuating surfaces can be brought together electrostatically by an upper and lower actuating electrode. During operation, the liquid metal can be configured to automatically rearrange during each actuating cycle to permit the switch to self-heal.

    摘要翻译： 公开了一种自愈式液体接触开关及其制造方法。 说明性自修复液体接触开关可以包括上致动表面和下致动表面，每个上致动表面和下致动表面上都具有多个液体接触区域，其上配置为用液态金属润湿。 上下致动表面可以通过上和下致动电极静电地组合在一起。 在操作期间，液态金属可以配置成在每个致动循环期间自动重新排列，以允许开关自愈。

    Resonant photo acoustic system
    19.
    发明授权
    Resonant photo acoustic system 有权
    共振光声系统

    公开(公告)号：US09243998B2

    公开(公告)日：2016-01-26

    申请号：US13524407

    申请日：2012-06-15

    申请人： Viorel Avramescu ,  Mihai Gologanu ,  Daniel Youngner ,  Bob Jon Carlson

    发明人： Viorel Avramescu ,  Mihai Gologanu ,  Daniel Youngner ,  Bob Jon Carlson

    IPC分类号： G01N21/17

    CPC分类号： G01N21/1702 ,  G01N2021/1704 ,  G01N2021/1708

    摘要： A device includes a resonator having an oscillating portion with dimensions chosen to lead to a desired resonant frequency. A light source is positioned to provide light along the length of the oscillating portion at a specific wave length. A detector detects a change in oscillation of the resonator responsive to the wave pressure produced by the light source heating a gas. The light source is modulated with a frequency the same as the resonant frequency of the resonator.

    摘要翻译： 一种器件包括具有选择为导致期望谐振频率的尺寸的振荡部分的谐振器。 光源被定位成沿着振荡部分的长度以特定波长提供光。 检测器响应于由加热气体的光源产生的波压而检测谐振器的振荡变化。 以与谐振器的谐振频率相同的频率调制光源。