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    Flexible optical aperture mechanisms
    13.
    发明授权
    Flexible optical aperture mechanisms 有权

    公开(公告)号：US09645287B2

    公开(公告)日：2017-05-09

    申请号：US13911424

    申请日：2013-06-06

    Applicant: KLA-Tencor Corporation

    Inventor： Rudolf Brunner

    IPC: G02B5/00 ,  G02B26/02 ,  G02B26/06

    CPC classification number: G02B5/005 ,  G02B26/02 ,  G02B26/06

    Abstract: A system for providing flexible optical aperture shapes in an optical inspection system (e.g., an optical wafer inspection system) is described. The system includes one or more mechanisms for providing multiple optical aperture shapes along an optical beam path in the optical wafer inspection system. The multiple optical apertures shapes are stacked or overlapped to combine the shapes and form a single combined optical aperture shape along the optical beam path.

    Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
    14.
    发明授权
    Wafer and reticle inspection systems and methods for selecting illumination pupil configurations 有权
    晶圆和掩模版检查系统和选择照明瞳孔配置的方法

    公开(公告)号：US09347891B2

    公开(公告)日：2016-05-24

    申请号：US14381315

    申请日：2013-03-01

    Applicant: KLA-Tencor Corporation

    Inventor： Grace H. Chen ,  Rudolf Brunner ,  Lisheng Gao ,  Robert M. Danen ,  Lu Chen

    IPC: G01N21/00 ,  G01N21/88 ,  G01N21/956

    CPC classification number: G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/95676 ,  G01N2201/061 ,  G01N2201/0638 ,  G01N2201/068 ,  G01N2201/12

    Abstract: In an optical inspection tool, an illumination aperture is opened at each of a plurality of aperture positions of an illumination pupil area one at a time across the illumination pupil area. For each aperture opening position, an incident beam is directed towards the illumination pupil area so as to selectively pass a corresponding ray bundle of the illumination beam at a corresponding set of one or more incident angles towards the sample and an output beam, which is emitted from the sample in response to the corresponding ray bundle of the incident beam impinging on the sample at the corresponding set of one or more incident angles, is detected. A defect detection characteristic for each aperture position is determined based on the output beam detected for each aperture position. An optimum aperture configuration is determined based on the determined defect detection characteristic for each aperture position.

    Abstract translation: 在光学检查工具中，照明光圈在照明光瞳区域的多个孔径位置中的每一个处打开，一次一个地穿过照明瞳孔区域。 对于每个光圈打开位置，入射光束被引向照明光瞳区域，以便选择性地将照射光束的相应光束束以对应于一个或多个入射角的一组对应于样品的输出光束和输出光束 检测来自样品的响应于在相应的一个或多个入射角度的入射光束入射到样品上的相应射线束。 基于针对每个孔径位置检测的输出光束来确定每个光圈位置的缺陷检测特性。 基于针对每个孔位置确定的缺陷检测特性来确定最佳孔径配置。

    2D programmable aperture mechanism
    15.
    发明授权
    2D programmable aperture mechanism 有权
    2D可编程光圈机构

    公开(公告)号：US09255887B2

    公开(公告)日：2016-02-09

    申请号：US14304373

    申请日：2014-06-13

    Applicant: KLA-Tencor Corporation

    Inventor： Rudolf Brunner

    IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G02B26/02

    CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G02B26/02

    Abstract: Methods and systems for reconfiguring an aperture of an optical inspection system are presented. A programmable aperture system includes a two dimensional array of mechanical pixels that selectively block light passing through the aperture. An array of linear guiding elements is aligned parallel to one another, and each row of mechanical pixels is supported by a corresponding linear guiding element. Each mechanical pixel is configured to slide along the corresponding linear guiding element when pushed by an actuator subsystem. The actuator subsystem repositions one or more of the mechanical pixel elements to change the shape of the aperture. The actuator subsystem is configured to selectively engage one or more mechanical pixel elements and translate the one or more mechanical pixel elements along corresponding linear guiding elements to a new position.

    Abstract translation: 提出了用于重新配置光学检测系统孔径的方法和系统。 可编程光圈系统包括选择性地阻挡通过光圈的光的机械像素的二维阵列。 线性引导元件的阵列彼此平行排列，并且每排机械像素由相应的线性引导元件支撑。 每个机械像素构造成当由致动器子系统推动时沿着相应的线性引导元件滑动。 致动器子系统重新定位一个或多个机械像素元件以改变孔的形状。 致动器子系统被配置为选择性地接合一个或多个机械像素元件并将一个或多个机械像素元件沿对应的线性引导元件平移到新的位置。

    Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
    18.
    发明授权
    Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures 有权
    通过调节和控制灯工作温度来减少热应力的方法和装置

    公开(公告)号：US09534848B2

    公开(公告)日：2017-01-03

    申请号：US13975945

    申请日：2013-08-26

    Applicant: KLA-Tencor Corporation

    Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

    IPC: F21V29/00 ,  F28C3/04 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60 ,  F21V19/00

    CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

    Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

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