公开(公告)号：US10203247B2

公开(公告)日：2019-02-12

申请号：US15369560

申请日：2016-12-05

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick A. Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: H01J65/04 ,  G01J3/02 ,  G01J3/10 ,  F21V13/08 ,  F21V13/00 ,  F21V13/12 ,  G02B6/35 ,  G02B6/293 ,  G01J3/12

Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

公开(公告)号：US09921050B2

公开(公告)日：2018-03-20

申请号：US15098008

申请日：2016-04-13

Applicant: KLA-Tencor Corporation

Inventor： Amnon Manassen ,  Andrew V. Hill ,  Ohad Bachar ,  Avi Abramov ,  Daria Negri

IPC: G02B27/10 ,  G01B11/02 ,  G01N21/55 ,  G02B6/02 ,  G02B26/00 ,  G02B27/14 ,  G02B26/02 ,  F21V5/02 ,  F21V5/04 ,  F21V9/10 ,  F21V14/08 ,  G02B5/18 ,  G02B5/20 ,  F21V8/00 ,  G02B26/04 ,  G02B26/08 ,  G02B6/35 ,  G02B6/42

CPC classification number: G01B11/02 ,  F21V5/02 ,  F21V5/04 ,  F21V9/40 ,  F21V14/08 ,  G01N21/55 ,  G02B5/18 ,  G02B5/205 ,  G02B6/0005 ,  G02B6/02 ,  G02B6/3512 ,  G02B6/4215 ,  G02B26/008 ,  G02B26/023 ,  G02B26/04 ,  G02B26/0816 ,  G02B27/1026 ,  G02B27/141 ,  G02B27/146

Abstract: The disclosure is directed to a system and method of controlling spectral attributes of illumination. According to various embodiments, a portion of illumination including an excluded selection of illumination spectra is blocked, while another portion of the illumination including a transmitted selection of illumination spectra is directed along an illumination path. In some embodiments, optical metrology is performed utilizing the spectrally controlled illumination to enhance measurement capability. For instance, the spectral attributes of illumination utilized to analyze different portions of a sample, such as different semiconductor layers, may be selected according to certain measurement characteristics associated with the analyzed portions of the sample.

公开(公告)号：US09719940B2

公开(公告)日：2017-08-01

申请号：US14875084

申请日：2015-10-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Amnon Manassen ,  Andrew Hill ,  Avi Abramov

IPC: G01J4/00 ,  G01N21/88 ,  G01J3/02 ,  G01N21/956 ,  G03F7/20 ,  G01N21/95 ,  G01N21/47

CPC classification number: G01N21/8806 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/2823 ,  G01N21/47 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95623 ,  G01N2021/8848 ,  G01N2201/06 ,  G03F7/70633

Abstract: Methods and systems are provided, which pattern an illumination of a metrology target with respect to spectral ranges and/or polarizations, illuminate a metrology target by the patterned illumination, and measure radiation scattered from the target by directing, at a pupil plane, selected pupil plane pixels from a to respective single detector(s) by applying a collection pattern to the pupil plane pixels. Single detector measurements (compressive sensing) has increased light sensitivity which is utilized to pattern the illumination and further enhance the information content of detected scattered radiation with respect to predefined metrology parameters.

公开(公告)号：US20160305766A1

公开(公告)日：2016-10-20

申请号：US15098008

申请日：2016-04-13

Applicant: KLA-Tencor Corporation

Inventor： Amnon Manassen ,  Andrew V. Hill ,  Ohad Bachar ,  Avi Abramov ,  Daria Negri

IPC: G01B11/02 ,  F21V5/02 ,  F21V9/10 ,  F21V14/08 ,  F21V8/00 ,  G01N21/55 ,  G02B26/08 ,  G02B26/04 ,  G02B26/00 ,  G02B27/14 ,  G02B5/20 ,  F21V5/04 ,  G02B5/18

CPC classification number: G01B11/02 ,  F21V5/02 ,  F21V5/04 ,  F21V9/40 ,  F21V14/08 ,  G01N21/55 ,  G02B5/18 ,  G02B5/205 ,  G02B6/0005 ,  G02B6/02 ,  G02B6/3512 ,  G02B6/4215 ,  G02B26/008 ,  G02B26/023 ,  G02B26/04 ,  G02B26/0816 ,  G02B27/1026 ,  G02B27/141 ,  G02B27/146

Abstract: The disclosure is directed to a system and method of controlling spectral attributes of illumination. According to various embodiments, a portion of illumination including an excluded selection of illumination spectra is blocked, while another portion of the illumination including a transmitted selection of illumination spectra is directed along an illumination path. In some embodiments, optical metrology is performed utilizing the spectrally controlled illumination to enhance measurement capability. For instance, the spectral attributes of illumination utilized to analyze different portions of a sample, such as different semiconductor layers, may be selected according to certain measurement characteristics associated with the analyzed portions of the sample.

Abstract translation: 本公开涉及一种控制照明的光谱属性的系统和方法。 根据各种实施例，包括排除的照明光谱选择的照明部分被阻挡，而包括发射的照明光谱选择的照明的另一部分沿着照明路径被引导。 在一些实施例中，利用光谱控制的照明来执行光学测量以增强测量能力。 例如，可以根据与样本的分析部分相关联的某些测量特性来选择用于分析样本的不同部分（例如不同半导体层）的照明的光谱属性。

公开(公告)号：US20140168650A1

公开(公告)日：2014-06-19

申请号：US13945352

申请日：2013-07-18

Applicant: KLA-Tencor Corporation

Inventor： Amnon Manassen ,  Andrew V. Hill ,  Ohad Bachar ,  Avi Abramov ,  Daria Negri

IPC: F21V11/04 ,  F21V7/00 ,  F21V9/10 ,  F21V11/08 ,  G01N21/59 ,  F21V9/00 ,  G02B6/02 ,  G01N21/47 ,  G01N21/55 ,  F21V5/02 ,  G02B27/14

CPC classification number: G01B11/02 ,  F21V5/02 ,  F21V5/04 ,  F21V9/40 ,  F21V14/08 ,  G01N21/55 ,  G02B5/18 ,  G02B5/205 ,  G02B6/0005 ,  G02B6/02 ,  G02B6/3512 ,  G02B6/4215 ,  G02B26/008 ,  G02B26/023 ,  G02B26/04 ,  G02B26/0816 ,  G02B27/1026 ,  G02B27/141 ,  G02B27/146

Abstract: The disclosure is directed to a system and method of controlling spectral attributes of illumination. According to various embodiments, a portion of illumination including an excluded selection of illumination spectra is blocked, while another portion of the illumination including a transmitted selection of illumination spectra is directed along an illumination path. In some embodiments, optical metrology is performed utilizing the spectrally controlled illumination to enhance measurement capability. For instance, the spectral attributes of illumination utilized to analyze different portions of a sample, such as different semiconductor layers, may be selected according to certain measurement characteristics associated with the analyzed portions of the sample.

Abstract translation: 本公开涉及一种控制照明的光谱属性的系统和方法。 根据各种实施例，包括排除的照明光谱选择的照明部分被阻挡，而包括发射的照明光谱选择的照明的另一部分沿着照明路径被引导。 在一些实施例中，利用光谱控制的照明来执行光学测量以增强测量能力。 例如，可以根据与样本的分析部分相关联的某些测量特性来选择用于分析样本的不同部分（例如不同半导体层）的照明的光谱属性。