Fabrication process for preparing recording head sliders made from silicon substrates with SiO2 overcoats
    12.
    发明授权
    Fabrication process for preparing recording head sliders made from silicon substrates with SiO2 overcoats 有权
    制备由SiO 2外涂层由硅衬底制成的记录头滑块的制造工艺

    公开(公告)号:US07196016B2

    公开(公告)日:2007-03-27

    申请号:US10675203

    申请日:2003-09-29

    CPC classification number: G11B5/3173 G11B5/102

    Abstract: A method for fabricating recording head sliders made from silicon substrates, is described. A Silicon wafer with a SiO2 overcoat is provided, and a layer of material which is resistant to Deep Reactive Ion Etching (DRIE) is deposited on the SiO2 overcoat. A patterned layer of material which is resistant to Reactive Ion Etching (RIE) is deposited on the layer of DRIE-resistant material to form a primary mask. RIE is used through the primary mask to pattern the SiO2 overcoat layer and the layer of DRIE-resistant material. The primary mask is then removing to expose the layer of DRIE-resistant material which has now been patterned to form a secondary mask. DRIE is then used through the secondary mask to cut the Si wafer into pieces. Finally, the secondary mask is removed.

    Abstract translation: 描述了由硅衬底制造记录头滑块的方法。 提供具有SiO 2 2外涂层的硅晶片,并且将耐深度反应离子蚀刻(DRIE)的材料层沉积在SiO 2外涂层上。 耐反应离子蚀刻(RIE)的图案化材料层沉积在抗DRIE材料层上以形成初级掩模。 RIE通过初级掩模使用以对SiO 2外涂层和DRIE抗性材料层进行图案化。 然后去除主要掩模以暴露现在被图案化以形成二次掩模的耐DRIE材料层。 然后通过二次掩模使用DRIE将Si晶片切成片。 最后,二次掩模被去除。

    Disk drive with improved retract circuit and method
    13.
    发明授权
    Disk drive with improved retract circuit and method 有权
    磁盘驱动器具有改进的回缩电路和方法

    公开(公告)号:US06643087B1

    公开(公告)日:2003-11-04

    申请号:US09519142

    申请日:2000-03-06

    CPC classification number: G11B21/12 G11B19/04

    Abstract: A method and apparatus to provide a retract circuit that can correspond to the tendency toward miniaturization and low supply voltage. When drive supply voltage Vcc is applied, a retract circuit charges a retract condenser Cr with boosted voltage Vup, equal to three times Vcc, generated by a booster circuit. Then, if the drive supply voltage Vcc is cut off and a VCM driver stops, the retract circuit detects power-off with a power OFF sense circuit, and provides retract delay time by a retract delay circuit. Furthermore, when the retract delay time elapses after the drive power supply is turned off, the retract driver switches the switching circuits on, discharges the retract condenser, charged at the boosted voltage, supplies discharge current to a voice coil, and retracts the head assembly.

    Abstract translation: 一种提供可以对应于小型化和低电源电压趋势的缩回电路的方法和装置。 当施加驱动电源电压Vcc时,后退电路对由升压电路产生的升压电压Vup等于三倍Vcc充电回缩电容器Cr。 然后,如果驱动器电源电压Vcc被切断并且VCM驱动器停止,则缩回电路用电源OFF感测电路检测掉电,并且通过缩回延迟电路提供缩回延迟时间。 此外,当在驱动电源关闭之后经过缩回延迟时间时,后退驱动器接通开关电路,放电收缩冷凝器,以升压电压充电,向扬声器提供放电电流,并使头部组件 。

    Pattern-electroplated lapping plates for reduced loads during single slider lapping and process for their fabrication
    17.
    发明授权
    Pattern-electroplated lapping plates for reduced loads during single slider lapping and process for their fabrication 失效
    图案电镀研磨板,用于在单个滑块研磨过程中减少负载,并制造其工艺

    公开(公告)号:US06802761B1

    公开(公告)日:2004-10-12

    申请号:US10392630

    申请日:2003-03-20

    CPC classification number: B24B37/16 B24D18/00

    Abstract: A lapping plate has photolithographically defined patterns that are electroplated to produce lands with well-defined channels. By choosing a particular geometry, the retention force is significantly reduced over prior art options, while still retaining a high land area fraction. In some versions, the material is electroplated onto sufficiently thin substrates to allow conformation to a curved vacuum chuck. This configuration provides a very large reduction in retraction force when compared to smooth, flat lapping plates. In addition, the substrate used to form the lapping plate has reduced thickness, and a vacuum chuck is used to pull the thin, flat lapping plate against it to define the curvature. This allows the lapping plate to be charged by a flat charging ring. The substrate used is typically glass and has been sputter-metallized on both sides. The resist is then patterned, leaving an exposed pattern in the metallization on both sides.

    Abstract translation: 研磨板具有光刻定义的图案,其电镀以产生具有明确定义的通道的焊盘。 通过选择特定的几何形状,保持力比现有技术的选择显着降低,同时仍然保持高的陆地面积分数。 在一些版本中,将材料电镀到足够薄的衬底上以允许构成弯曲的真空吸盘。 与平滑的平板研磨板相比,该构造提供了非常大的缩回力的减小。 此外,用于形成研磨板的基底具有减小的厚度,并且使用真空卡盘将薄的平的研磨板拉向其以限定曲率。 这样可以通过一个扁平的充电环来对研磨板进行充电。 所使用的基底通常是玻璃并且已经在两侧溅射金属化。 然后将抗蚀剂图案化,在两侧的金属化中留下暴露的图案。

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