公开(公告)号：US20160276125A1

公开(公告)日：2016-09-22

申请号：US15067394

申请日：2016-03-11

Applicant: JEOL Ltd.

Inventor： Hirofumi Iijima

IPC: H01J37/147 ,  H01J37/26

CPC classification number: H01J37/147 ,  H01J37/026 ,  H01J37/04 ,  H01J37/26 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: A phase plate capable of suppressing electrification and a method of fabricating the plate are provided. The phase plate is for use in an electron microscope and includes a phase control layer provided with a through-hole and at least one conductive layer covering and closing off the through-hole. The conductive layer is formed on at least one of a first surface and a second surface of the phase control layer, the second surface being on the opposite side of the first surface. The phase control layer produces a given phase difference between electron waves transmitted through the phase control layer and electron waves transmitted through the through-hole.

Abstract translation: 提供了能够抑制通电的相位板和制造该板的方法。 该相位板用于电子显微镜，并且包括设置有通孔的相位控制层和覆盖并封闭通孔的至少一个导电层。 导电层形成在相位控制层的第一表面和第二表面中的至少一个上，第二表面位于第一表面的相对侧上。 相位控制层产生通过相位控制层传输的电子波和透过通孔的电子波之间给定的相位差。

公开(公告)号：US09196456B2

公开(公告)日：2015-11-24

申请号：US14509402

申请日：2014-10-08

Applicant: JEOL Ltd.

Inventor： Hirofumi Iijima

IPC: H01J37/21 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/21 ,  H01J37/226 ,  H01J37/26 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/0492 ,  H01J2237/10 ,  H01J2237/1534 ,  H01J2237/2007 ,  H01J2237/21 ,  H01J2237/2602 ,  H01J2237/2614

Abstract: An image acquisition method and system for use in transmission electron microscopy and capable of providing information about a wide range of frequency range. The method is initiated with setting at least one of the spherical aberration coefficient and chromatic aberration coefficient of the imaging system of the microscope to suppress attenuation of a contrast transfer function due to an envelope function. Then, an image is obtained by the imaging system placed in defocus conditions.

Abstract translation: 一种用于透射电子显微镜的图像采集方法和系统，能够提供有关宽范围频率范围的信息。 通过设置显微镜的成像系统的球面像差系数和色差系数中的至少一个来开始该方法，以抑制由于包络函数引起的对比度传递函数的衰减。 然后，通过放置在散焦条件下的成像系统获得图像。