公开(公告)号：US20180342849A1

公开(公告)日：2018-11-29

申请号：US16052659

申请日：2018-08-02

Applicant: Gigaphoton Inc.

Inventor： Seiji NOGIWA ,  Yasufumi KAWASUJI

IPC: H01S3/131 ,  H05G2/00 ,  H01S3/13 ,  H01S3/04 ,  H01S3/042 ,  H01S3/0941 ,  H01S3/00 ,  H01S3/16 ,  G02F1/01

CPC classification number: H01S3/1312 ,  G02F1/0136 ,  G02F2203/48 ,  H01S3/005 ,  H01S3/0085 ,  H01S3/0405 ,  H01S3/0407 ,  H01S3/042 ,  H01S3/0941 ,  H01S3/10069 ,  H01S3/1301 ,  H01S3/1305 ,  H01S3/1306 ,  H01S3/1611 ,  H01S3/1673 ,  H01S5/02423 ,  H01S5/06804 ,  H05G2/008

Abstract: A laser apparatus includes a light source configured to output excitation light, an optical resonator in which laser medium. is excited by the excitation light, the optical resonator being configured to output laser beam, a temperature regulator configured to adjust temperature of the light source to a standard temperature, an optical detector configured to detect output power of the laser beam, and a controller configured to change the standard temperature based on the detected output power of the laser beam.

公开(公告)号：US20170373461A1

公开(公告)日：2017-12-28

申请号：US15698412

申请日：2017-09-07

Applicant: GIGAPHOTON INC.

Inventor： Seiji NOGIWA ,  Yasufumi KAWASUJI

IPC: H01S3/0941 ,  H01S3/10 ,  H01S3/104 ,  H05G2/00 ,  H01S3/23 ,  H01S3/101

Abstract: A laser apparatus may include: a quantum cascade laser outputting, based on a supplied current, laser light at an oscillation start timing when a first delay time elapses from a current rising timing of the supplied current: an amplifier disposed in a laser light optical path, and selectively amplifying light of a predetermined wavelength to output the amplified laser light to a chamber including a plasma generation region into which a target is fed; and a laser controller controlling a third delay time, from an output timing of a laser output instruction to the current rising timing, to cause a laser light wavelength to be equal to the predetermined wavelength at an aimed timing when a second delay time elapses from the oscillation start timing, based on oscillation parameters including the first delay time, a supplied current waveform, and a device temperature of the quantum cascade laser.

公开(公告)号：US20140246187A1

公开(公告)日：2014-09-04

申请号：US14279248

申请日：2014-05-15

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi KAWASUJI ,  Masazumi KOMORI ,  Osamu WAKABAYASHI

IPC: F28F27/00

CPC classification number: F28F27/02 ,  F28F27/00 ,  F28F2250/08 ,  G05D23/1917 ,  G21K1/062 ,  H05G2/008

Abstract: A cooling water temperature controlling device includes a heat exchanger for heat-exchanging between primary cooling water and secondary cooling water, a tank for storing the secondary cooling water, an injection pipe connecting the tank and a secondary cooling water supply unit, a valve for controlling a flow rate of the secondary cooling water from the secondary cooling water supply unit to the tank, a fluid level detection unit for detecting a level of the secondary cooling water in the tank, a first circulation pipe connecting the tank and the heat exchanger, a second circulation pipe connecting the heat exchanger and a temperature-control target, a third circulation pipe connecting the tank and the temperature-control target, a pump for circulating the secondary cooling water through the first to third circulation pipes, and a controller for controlling the valve and the pump based on the detected fluid level.

Abstract translation: 一种冷却水温度控制装置，包括：一次冷却水和二次冷却水之间的热交换用热交换器，二次冷却水的储存槽，连接该罐的二次冷却水供给部的喷射管， 二次冷却水从二次冷却水供给单元向罐的流量，液位检测单元，用于检测槽内的二次冷却水的水位，连接箱和热交换器的第一循环管， 连接热交换器和温度控制目标的第二循环管，连接罐和温度控制目标的第三循环管，用于使第二至第三循环管循环第二冷却水的泵，以及用于控制 阀和泵基于检测到的液位。

公开(公告)号：US20240173796A1

公开(公告)日：2024-05-30

申请号：US18399043

申请日：2023-12-28

Applicant: Gigaphoton Inc.

Inventor： Yasufumi KAWASUJI ,  Yasuhiro ADACHI ,  Akira SUWA

IPC: B23K26/066 ,  H01L21/48 ,  H01L23/00

CPC classification number: B23K26/066 ,  H01L21/481 ,  H01L24/16 ,  H01L2224/16225

Abstract: A laser processing apparatus forms a hole in a workpiece having a resin layer on a processing surface by irradiating the workpiece with a laser beam discharge-excited between a pair of discharge electrodes, and includes a laser apparatus that outputs the laser beam having a first divergence angle in a discharge direction between the pair of discharge electrodes larger than a second divergence angle in a direction perpendicular to the discharge direction and a laser beam traveling direction, a transfer mask that forms a transfer pattern, an introducing optical system for guiding the laser beam to the transfer mask, a projection optical system that images the transfer pattern on the resin layer, and a divergence angle adjusting optical system that is disposed on an optical path of the laser beam and adjusts a difference between the first divergence angle and the second divergence angle to be reduced.

公开(公告)号：US20180120041A1

公开(公告)日：2018-05-03

申请号：US15857055

申请日：2017-12-28

Applicant: Gigaphoton Inc.

Inventor： Yasufumi KAWASUJI ,  Masazumi KOMORI ,  Osamu WAKABAYASHI

IPC: F28F27/02 ,  H05G2/00

CPC classification number: F28F27/02 ,  F28F27/00 ,  F28F2250/08 ,  G05D23/1917 ,  G21K1/062 ,  H05G2/008

Abstract: A device for controlling the temperature of cooling water includes a three-way valve having a first inlet, a second inlet, and an outlet; a first feed pipe; a second feed pipe; and a return pipe for connecting between an outlet of the temperature-control target and an inlet of the cooling water supply unit. The device also includes a return-side bypass pipe for connecting between the return pipe and the second inlet of the three-way valve; a pump provided on the second feed pipe for circulating the cooling water between the three-way valve and the temperature-control target; and a temperature measuring unit for measuring a temperature of the cooling water flowing in the second feed pipe. In addition, the device includes a controller for controlling the three-way valve and the pump in accordance with a detection result of the temperature measuring unit.

公开(公告)号：US20170070024A1

公开(公告)日：2017-03-09

申请号：US15356763

申请日：2016-11-21

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi KAWASUJI ,  Naoya TAKAOKA ,  Toshio YOKOZUKA

IPC: H01S3/102 ,  H05G2/00 ,  H01S3/09 ,  H01S3/223 ,  H01S3/104 ,  H01S3/097 ,  H01L21/67 ,  H01S3/23

CPC classification number: H01S3/102 ,  H01L21/67115 ,  H01S3/09 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/104 ,  H01S3/134 ,  H01S3/2232 ,  H01S3/2308 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2375 ,  H01S5/3401 ,  H01S5/4012 ,  H05G2/008

Abstract: A laser apparatus may include: an optical amplifier configured to amplify a laser beam outputted from a master oscillator; an optical-amplifier power supply configured to supply an alternating current for optical amplification to the optical amplifier; and a laser controller. The optical-amplifier power supply may include: an alternating current generation circuit including an inverter circuit configured to change output amplitude in accordance with a duty cycle, the alternating current generation circuit being configured to generate the alternating current from an output of the inverter circuit; and a power supply control circuit configured to hold control information defining correspondence relations between command values from the laser controller and duty cycles of the inverter circuit, determine a duty cycle corresponding to a command value received from the laser controller based on the control information, and provide the determined duty cycle to the inverter circuit.

Abstract translation: 激光装置可以包括：光放大器，被配置为放大从主振荡器输出的激光束; 光放大器电源，被配置为向光放大器提供用于光放大的交流电; 和激光控制器。 光放大器电源可以包括：交流发电电路，其包括被配置为根据占空比改变输出幅度的逆变器电路，所述交流发电电路被配置为从所述逆变器电路的输出产生交流电; 以及电源控制电路，被配置为保持定义来自激光控制器的命令值与反相器电路的占空比之间的对应关系的控制信息，基于控制信息确定与从激光控制器接收的命令值相对应的占空比，以及 向逆变器电路提供确定的占空比。

公开(公告)号：US20160156150A1

公开(公告)日：2016-06-02

申请号：US15016961

申请日：2016-02-05

Applicant: GIGAPHOTON INC.

Inventor： Yoshiaki KUROSAWA ,  Yasufumi KAWASUJI

IPC: H01S3/23 ,  H01S3/223 ,  H01S3/107 ,  H05G2/00

CPC classification number: H01S3/2316 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/034 ,  H01S3/10061 ,  H01S3/107 ,  H01S3/2232 ,  H01S2301/02 ,  H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.

Abstract translation: 本公开的一个实例是一种激光装置，其包括能够输出脉冲激光束的主振荡器，设置在从主振荡器输出的脉冲激光束的光路上的多个光放大器，并且被配置为顺序地放大脉冲激光束 能够使脉冲激光束通过并反射在多个光放大器之一中产生的自振荡光束的光反射器，以及能够接收和吸收由光反射器反射的自振荡光束的光吸收体。

公开(公告)号：US20150351211A1

公开(公告)日：2015-12-03

申请号：US14824270

申请日：2015-08-12

Applicant: GIGAPHOTON INC.

Inventor： Hakaru MIZOGUCHI ,  Yasufumi KAWASUJI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  G03F7/20 ,  G21K1/06

CPC classification number: H05G2/008 ,  G03F7/70033 ,  G03F7/7085 ,  G21K1/067 ,  H05G2/003 ,  H05G2/005

Abstract: Provided is an extreme ultraviolet light generating apparatus that may include: a chamber containing one or more kinds of gases; a light concentration optical system provided in an optical path of pulsed laser light outputted from a laser unit, and configured to concentrate the pulsed laser light into a concentrated beam; and an image pickup section provided at a position out of the optical path of the pulsed laser light, and configured to pick up a plasma emission image that is an image of plasma emission in the chamber. The plasma emission is caused by application of the concentrated beam to the one or more kinds of gases in the chamber.

Abstract translation: 提供一种极紫外光发生装置，其可以包括：容纳一种或多种气体的室; 光浓缩光学系统，其设置在从激光单元输出的脉冲激光的光路中，并且将脉冲激光聚焦成浓缩光束; 以及摄像部，其设置在所述脉冲激光的光路外的位置处，并且被配置为拾取作为所述室中的等离子体发射的图像的等离子体发射图像。 等离子体发射是通过将浓缩的束施加到腔室中的一种或多种气体而引起的。

公开(公告)号：US20150346457A1

公开(公告)日：2015-12-03

申请号：US14737289

申请日：2015-06-11

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi KAWASUJI ,  Hidenobu KAMEDA

IPC: G02B7/182 ,  H05G2/00 ,  G02B26/08

CPC classification number: G02B7/1827 ,  G02B5/0891 ,  G02B7/198 ,  G02B26/0816 ,  G03F7/70033 ,  G03F7/70825 ,  G21K1/06 ,  H05G2/003 ,  H05G2/008

Abstract: A mirror unit may include a mirror, a first holding member holding the mirror, a second holding member holding the first holding member to allow the first holding member to pivot on a first pivot shaft, an actuator provided on the second holding member and configured to allow the first holding member to pivot, and a counter weight provided on the first holding member to allow a centroid of a structure to be substantially coincident with a center of a reflection surface of the mirror. The structure includes the mirror and is pivotable on the first pivot shaft.

Abstract translation: 反射镜单元可以包括反射镜，保持反射镜的第一保持构件，保持第一保持构件以允许第一保持构件在第一枢转轴上枢转的第二保持构件，设置在第二保持构件上的致动器， 允许第一保持构件枢转，并且设置在第一保持构件上的配重，以允许结构的质心与反射镜的反射表面的中心大致重合。 该结构包括反射镜并且可在第一枢轴上枢转。