LASER APPARATUS, EUV LIGHT GENERATION SYSTEM, AND METHOD OF CONTROLLING LASER APPARATUS
    1.
    发明申请
    LASER APPARATUS, EUV LIGHT GENERATION SYSTEM, AND METHOD OF CONTROLLING LASER APPARATUS 审中-公开
    激光装置,EUV发光系统和控制激光装置的方法

    公开(公告)号:US20170070024A1

    公开(公告)日:2017-03-09

    申请号:US15356763

    申请日:2016-11-21

    Abstract: A laser apparatus may include: an optical amplifier configured to amplify a laser beam outputted from a master oscillator; an optical-amplifier power supply configured to supply an alternating current for optical amplification to the optical amplifier; and a laser controller. The optical-amplifier power supply may include: an alternating current generation circuit including an inverter circuit configured to change output amplitude in accordance with a duty cycle, the alternating current generation circuit being configured to generate the alternating current from an output of the inverter circuit; and a power supply control circuit configured to hold control information defining correspondence relations between command values from the laser controller and duty cycles of the inverter circuit, determine a duty cycle corresponding to a command value received from the laser controller based on the control information, and provide the determined duty cycle to the inverter circuit.

    Abstract translation: 激光装置可以包括:光放大器,被配置为放大从主振荡器输出的激光束; 光放大器电源,被配置为向光放大器提供用于光放大的交流电; 和激光控制器。 光放大器电源可以包括:交流发电电路,其包括被配置为根据占空比改变输出幅度的逆变器电路,所述交流发电电路被配置为从所述逆变器电路的输出产生交流电; 以及电源控制电路,被配置为保持定义来自激光控制器的命令值与反相器电路的占空比之间的对应关系的控制信息,基于控制信息确定与从激光控制器接收的命令值相对应的占空比,以及 向逆变器电路提供确定的占空比。

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