公开(公告)号：US20190157833A1

公开(公告)日：2019-05-23

申请号：US16261313

申请日：2019-01-29

Applicant: Gigaphoton Inc.

Inventor： Takashi SUGANUMA

IPC: H01S3/13 ,  H05G2/00

Abstract: A laser device includes at least one amplification unit configured to amplify laser light emitted from a laser oscillator, and an amplification control unit configured to control the amplification unit. The amplification unit includes an incident-side optical adjustment unit including a wavefront adjustment unit configured to adjust a wavefront of the laser light and a first direction adjustment unit configured to adjust an optical axis thereof, an amplifier configured to amplify the laser light, an emission-side optical adjustment unit including a second direction adjustment unit configured to adjust an optical axis of the laser light, and a measurement unit configured to measure the laser light and acquire information on at least one of an optical axis, a wavefront and energy of the laser light. The amplification control unit controls the incident-side optical adjustment unit and/or the emission-side optical adjustment unit, based on a measurement result of the measurement unit.

公开(公告)号：US20150188277A1

公开(公告)日：2015-07-02

申请号：US14657640

申请日：2015-03-13

Applicant: Gigaphoton Inc.

Inventor： Krzysztof NOWAK ,  Takashi SUGANUMA ,  Takashi SAITO ,  Yasufumi KAWASUJI

IPC: H01S3/034 ,  H01S3/23 ,  H01S3/223

CPC classification number: H01S3/034 ,  H01S3/03 ,  H01S3/076 ,  H01S3/0971 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2366 ,  H01S3/2375 ,  H01S2301/02 ,  H05G2/008

Abstract: There is provided a slab amplifier including an optical system (48, 51) provided in a chamber (47) to allow a seed beam having entered from a first window into the space between a pair of electrodes (42, 43) to be repeatedly reflected between the space so that the seed beam is amplified to be an amplified beam; a first aperture plate (61) provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and a second aperture plate (62) provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window.

Abstract translation: 提供了一种平板放大器，包括设置在室（47）中的光学系统（48,51），以允许从第一窗口进入的种子束进入一对电极（42,43）之间的空间中，以反复反射 在空间之间，使得种子束被放大为放大的光束; 设置在所述第一窗口和所述电极之间并且具有等于或大于所述种子束的横截面的尺寸的开口并且等于或小于所述第一窗口的尺寸的第一孔板（61） 以及设置在第二窗口和电极之间并具有等于或大于放大光束的横截面的尺寸的开口并且等于或小于第二窗口的尺寸的第二孔板（62）。

公开(公告)号：US20230387644A1

公开(公告)日：2023-11-30

申请号：US18186662

申请日：2023-03-20

Applicant: Gigaphoton Inc.

Inventor： Takashi SUGANUMA

IPC: H01S3/04 ,  H01S3/00 ,  H01S3/11 ,  H01S3/06 ,  H01S3/13 ,  H05G2/00

CPC classification number: H01S3/0407 ,  H01S3/0014 ,  H01S3/11 ,  H01S3/0606 ,  H01S3/1305 ,  H05G2/008

Abstract: An extreme ultraviolet light generation apparatus includes a first light source outputting first excitation light, a laser oscillator including an active medium and performing laser oscillation by irradiating the active medium with the first excitation light to output the laser light, a measurement instrument measuring a pulse energy and a pulse time width of the laser light, a temperature regulator that adjusts a temperature of a cooling medium that cools the first light source, and a processor. The processor controls the temperature regulator to adjust the temperature of the cooling medium so that the pulse energy measured by the measurement instrument falls within a target range of the pulse energy, and adjust a current value of a current supplied to the first light source so that the pulse time width measured by the measurement instrument falls within a target range of the pulse time width.

公开(公告)号：US20160285222A1

公开(公告)日：2016-09-29

申请号：US15172757

申请日：2016-06-03

Applicant: GIGAPHOTON INC.

Inventor： Takashi SUGANUMA ,  Takayuki YABU ,  Osamu WAKABAYASHI ,  Seiji NOGIWA

IPC: H01S3/00 ,  H01S3/23 ,  H01S3/223 ,  H05G2/00

CPC classification number: H01S3/005 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2366 ,  H05G2/005 ,  H05G2/008

Abstract: There is provided a laser unit that may include a master oscillator, a laser amplifier, and an adjuster. The master oscillator may be configured to output a laser light beam. The laser amplifier may be disposed in a light path of the laser light beam outputted from the master oscillator. The adjuster may be disposed in the light path of the laser light beam, and may be configured to adjust a beam cross-sectional shape of the laser light beam amplified by the laser amplifier to be a substantially circular shape. The beam cross-sectional shape may be at a beam waist of the laser light beam or in the vicinity of the beam waist of the laser light beam, and may be in a plane orthogonal to a light path axis.

Abstract translation: 提供了可以包括主振荡器，激光放大器和调节器的激光单元。 主振荡器可以被配置为输出激光束。 激光放大器可以设置在从主振荡器输出的激光束的光路中。 调整器可以设置在激光束的光路中，并且可以被配置为将由激光放大器放大的激光束的光束横截面形状调整为大致圆形。 光束横截面形状可以在激光束的束腰处或激光束的束腰附近，并且可以在与光路轴线正交的平面中。

公开(公告)号：US20160172820A1

公开(公告)日：2016-06-16

申请号：US15040588

申请日：2016-02-10

Applicant: GIGAPHOTON INC.

Inventor： Takashi SUGANUMA ,  Hideo HOSHINO

IPC: H01S3/23 ,  H05G2/00 ,  H01S3/08 ,  H01S3/081

CPC classification number: H01S3/2316 ,  G03F7/70033 ,  H01S3/0078 ,  H01S3/08059 ,  H01S3/08095 ,  H01S3/081 ,  H01S3/0971 ,  H01S3/2232 ,  H01S3/2325 ,  H01S3/2375 ,  H01S5/3402 ,  H01S2301/02 ,  H05G2/008

Abstract: There may be provided a laser amplifier including: a chamber containing a laser medium; a first window provided on the chamber, and configured to allow a laser light beam inputted from outside of the chamber to enter the chamber; an excitation unit configured to amplify, by exciting the laser medium, the laser light beam that has entered the chamber; a second window provided on the chamber, and configured to allow the laser light beam that has been amplified by the excitation unit to exit from the chamber to the outside; a mirror provided on a laser light path between the first window and the second window; and a wavelength selection film provided on one or more of the first window, the second window, and the mirror, and configured to suppress propagation of light beams of one or more suppression target wavelengths different from a desired wavelength.

Abstract translation: 可以提供一种激光放大器，包括：包含激光介质的腔室; 设置在所述室上的第一窗口，并且被配置为允许从所述室的外部输入的激光束进入所述室; 激励单元，被配置为通过激励激光介质来放大已经进入所述腔室的激光束; 设置在所述室上的第二窗口，并且被配置为允许被所述激励单元放大的激光束从所述室排出到外部; 设置在第一窗口和第二窗口之间的激光路径上的反射镜; 以及设置在第一窗口，第二窗口和反射镜的一个或多个上的波长选择膜，并且被配置为抑制不同于期望波长的一个或多个抑制目标波长的光束的传播。

公开(公告)号：US20160172814A1

公开(公告)日：2016-06-16

申请号：US15040645

申请日：2016-02-10

Applicant: GIGAPHOTON INC.

Inventor： Takashi SUGANUMA ,  Hakaru MIZOGUCHI ,  Osamu WAKABAYASHI

IPC: H01S3/00 ,  G03F7/20 ,  H01S3/23 ,  G02B27/28 ,  H05G2/00 ,  H01S3/038

CPC classification number: H01S3/005 ,  G02B27/286 ,  G03F7/70033 ,  G03F7/70041 ,  H01S3/038 ,  H01S3/2316 ,  H05G2/008

Abstract: There is provided a laser unit that may include: a master oscillator configured to output a linear-polarized laser light beam; a first polarization device disposed in a light path of the linear-polarized laser light beam and provided with a polarization axis substantially aligned with a polarization direction of the linearly-polarized incident laser light beam; a second polarization device disposed in the light path of the linear-polarized laser light beam and provided with a polarization axis substantially aligned with a direction of the polarization axis of the first polarization device; and a laser amplifier disposed between the first polarization device and the second polarization device in the light path of the linear-polarized laser light beam and including a pair of discharge electrodes disposed to oppose each other, an opposing direction of the pair of discharge electrodes being substantially aligned with the direction of the polarization axis of the first polarization device.

Abstract translation: 提供了一种激光单元，其可以包括：主振荡器，被配置为输出线偏振激光束; 设置在所述线偏振激光的光路中并具有基本上与所述线偏振的入射激光的偏振方向对准的偏振轴的第一偏振光装置; 设置在所述线偏振激光的光路中并具有基本上与所述第一偏振装置的偏振轴的方向对准的偏振轴的第二偏振装置; 以及激光放大器，其设置在所述线偏振激光的光路中的所述第一偏振光装置与所述第二偏振光装置之间，并且包括一对相对设置的放电电极，所述一对放电电极的相反方向为 基本上与第一偏振装置的偏振轴的方向对准。

公开(公告)号：US20130315272A1

公开(公告)日：2013-11-28

申请号：US13956282

申请日：2013-07-31

Applicant: GIGAPHOTON INC.

Inventor： Krzysztof NOWAK ,  Takashi SUGANUMA ,  Osamu WAKABAYASHI

IPC: H01S3/05 ,  H01S5/06 ,  H01S5/042 ,  H01S3/22

CPC classification number: H01S3/05 ,  B82Y20/00 ,  H01S3/0315 ,  H01S3/08031 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2232 ,  H01S3/2325 ,  H01S3/235 ,  H01S3/2366 ,  H01S3/2375 ,  H01S5/042 ,  H01S5/06 ,  H01S5/14 ,  H01S5/3401

Abstract: A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.

Abstract translation: 根据本公开的一个方面的再生放大器与激光装置组合使用，再生放大器可以包括：构成光谐振器的一对谐振器镜; 设置在所述一对所述谐振器镜之间用于放大从所述激光装置输出的预定波长的激光束的平板放大器; 以及光学系统，被配置为配置多个光路，激光束沿着该光路在所述平板放大器内部往复运动，所述光学系统将所述激光束的光学图像在第一位置处作为所述激光束的光学图像在第二位置 。

公开(公告)号：US20130240762A1

公开(公告)日：2013-09-19

申请号：US13873001

申请日：2013-04-29

Applicant: GIGAPHOTON INC.

Inventor： Masato MORIYA ,  Osamu WAKABAYSHI ,  Tamotsu ABE ,  Takashi SUGANUMA ,  Akira ENDO ,  Akira SUMITANI

IPC: G21K5/04

CPC classification number: G21K5/04 ,  G03F7/70191 ,  G03F7/70575 ,  G03F7/70858 ,  G03F7/70941 ,  G21K1/10 ,  H05G2/005 ,  H05G2/008

Abstract: An extreme ultraviolet light source apparatus using a spectrum purity filter capable of obtaining EUV light with high spectrum purity. The apparatus includes a chamber; a target supply unit for supplying a target material; a driver laser using a laser gas containing a carbon dioxide gas as a laser medium, for applying a laser beam to the target material to generate plasma; a collector mirror for collecting and outputting the extreme ultraviolet light radiated from the plasma; and a spectrum purity filter provided in an optical path of the extreme ultraviolet light, for transmitting the extreme ultraviolet light and reflecting the laser beam, the spectrum purity filter including a mesh having electrical conductivity and formed with an arrangement of apertures having a pitch not larger than a half of a shortest wavelength of the laser beam applied by the driver laser.