公开(公告)号：US11264263B2

公开(公告)日：2022-03-01

申请号：US16712970

申请日：2019-12-12

Applicant: Applied Materials, Inc.

Inventor： Asaf Schlezinger ,  Markus J. Stopper

IPC: G01R31/28 ,  H01L21/687 ,  H01L21/67 ,  H01L21/66 ,  H01L21/677 ,  G01R31/26

Abstract: A substrate rotator configured to rotate one or more substrates includes a body, a body actuator coupled to the body and configured to rotate the body, and a first and second gripper coupled to the body. A substrate edge metrology system that measures side chips or other defects on all sides of the substrate is also described. The metrology system includes two metrology stations and the substrate rotator. Methods for measuring side chips or other defects on a substrate are also provided. The method includes performing metrology on a first set of sides of the first substrate, rotating the first substrate by a first angle, and performing metrology on the second set of sides of the first substrate.

公开(公告)号：US10507991B2

公开(公告)日：2019-12-17

申请号：US16031656

申请日：2018-07-10

Applicant: Applied Materials, Inc.

Inventor： Asaf Schlezinger ,  Markus J. Stopper

IPC: B65G47/91 ,  H02S50/10 ,  H01L31/18

Abstract: A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection system is provided that includes a first conveyor module, and a second conveyor module having a movable surface positioned substantially parallel to a movable surface of the first conveyor module, wherein the first conveyor module includes a first section and a second section, the first section having a vacuum unit operable to secure a substrate to a portion of the movable surface in the first section, and the second section is configured to release the substrate from the movable surface.

公开(公告)号：US12170849B2

公开(公告)日：2024-12-17

申请号：US17650024

申请日：2022-02-04

Applicant: Applied Materials, Inc.

Inventor： Asaf Schlezinger

IPC: H04N23/74 ,  B65G47/22 ,  G06T7/00 ,  H04N7/015 ,  H04N23/56

Abstract: Embodiments described herein provide for a method and system for the inspection of fluids for defects. A plurality of containers with fluids disposed therein are inspected for defects in an inspection system. A timing sequence is used to control the timing of light pulses directed to the fluid residing in the plurality of containers. A high-resolution camera is utilized to obtain images of the fluid disposed in the plurality of containers. An illumination time of pulses of light in the inspection zone is less than an exposure time of each frame of a plurality of frames of the high-resolution camera. As such, the inspection system and method of utilizing the inspection system allows for high-resolution images of the fluid to be captured without smearing of the defects in the captured images.

公开(公告)号：US12131930B2

公开(公告)日：2024-10-29

申请号：US17799251

申请日：2021-03-02

Applicant: Applied Materials, Inc.

Inventor： Asaf Schlezinger ,  Markus J. Stopper

IPC: H01L21/67 ,  B65G15/12 ,  B65G47/64 ,  B65G49/06 ,  H01L21/677

CPC classification number: H01L21/67288 ,  B65G15/12 ,  B65G47/647 ,  B65G49/067 ,  H01L21/67271 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67718

Abstract: Embodiments herein generally relate to inspection systems for substrates or wafers for solar cell applications. The inspection system is configured to analyze substrates or wafers for chips, cracks, and other defects. The system includes conveyor apparatuses, and the conveyor apparatuses include one or more conveyor elements. The conveyor elements are configured to transport rectangular wafers having a width between about 175 mm to about 250 mm. The conveyor elements include a first conveyor belt and a second conveyor belt to transport the substrates. The spacing of the belts reduces vibrations of the substrate edge.

公开(公告)号：US11072502B2

公开(公告)日：2021-07-27

申请号：US16358478

申请日：2019-03-19

Applicant: Applied Materials, Inc.

Inventor： Asaf Schlezinger ,  Markus J. Stopper

IPC: B65G47/91 ,  H01L21/683 ,  H01L21/67 ,  B25J15/06

Abstract: An apparatus and method for sorting a plurality of substrates is disclosed. The apparatus includes a sorting unit capable of supporting a plurality of bins, a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis, a plurality of grippers coupled to the rotatable support on a common radius relative to the rotational axis, the grippers positioned to travel along a path above the bins as the rotatable support rotates, and an air nozzle configured to reorient a sorted substrate relative to a stacked substrate in a bin of the plurality of bins when released by one of the grippers into the bin.

公开(公告)号：US10406562B2

公开(公告)日：2019-09-10

申请号：US15708943

申请日：2017-09-19

Applicant: Applied Materials, Inc.

Inventor： Markus J. Stopper ,  Asaf Schlezinger

IPC: H01L21/677 ,  B07C5/36

Abstract: In one example, a sorting unit includes a sorting system and a plurality of bins into which substrates are sorted. The sorting unit includes a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin. In one example, a method of operating a sorting unit is also provided.

公开(公告)号：US10403533B2

公开(公告)日：2019-09-03

申请号：US14703851

申请日：2015-05-04

Applicant: Applied Materials, Inc.

Inventor： Markus J. Stopper ,  Asaf Schlezinger

IPC: H01L21/677

Abstract: A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection station is disclosed herein. The loading module includes two arms, a plurality of substrate grippers, two rotatable support members, a conveyor, and at least one actuator. Each arm has a first end and a second end, wherein the second end is opposite the first end. Each substrate gripper is disposed at a respective end of each arm. Each rotatable support member is coupled to a respective one of the arms. The conveyor is disposed between the rotatable support members. The at least one actuator is configured to rotate the arms about the rotatable support members to selectively position the grippers over the conveyor in a location that allows a substrate held by the gripper to be released onto the conveyor.

公开(公告)号：US09341580B2

公开(公告)日：2016-05-17

申请号：US14493824

申请日：2014-09-23

Applicant: Applied Materials, Inc.

Inventor： Asaf Schlezinger ,  Shengde Zhong

IPC: G01N21/00 ,  G01N21/95 ,  G01N21/64 ,  G01R31/26 ,  H02S50/15 ,  H02S50/10

CPC classification number: G01N21/9501 ,  G01N21/64 ,  G01N21/6489 ,  G01N21/95 ,  G01N2201/0612 ,  G01R31/2601 ,  G01R31/44 ,  H02S50/00 ,  H02S50/10 ,  H02S50/15

Abstract: Embodiments of the disclosure generally relate to comprehensive, expandable substrate inspection systems. The inspection systems include multiple metrology units adapted to inspect, detect, or measure one or more characteristics of a substrate, including thickness, resistivity, saw marks, geometry, stains, chips, micro cracks, crystal fraction, and photoluminescence. The inspection systems may be utilized to identify defects on substrates and estimate solar cell efficiency of a solar cell produced with the substrate, prior to processing a substrate into a solar cell. Substrates may be transferred through the inspection system between metrology units on a track or conveyor, and then sorted based upon inspection data.

Abstract translation: 本公开的实施例一般涉及综合的，可扩展的基板检查系统。 检查系统包括适于检查，检测或测量衬底的一个或多个特性的多个测量单元，包括厚度，电阻率，锯痕，几何形状，污渍，芯片，微裂纹，晶体分数和光致发光。 在将衬底加工成太阳能电池之前，可以使用检查系统来识别衬底上的缺陷并估计由衬底制造的太阳能电池的太阳能电池效率。 基板可以通过轨道或传送带上的计量单元之间的检查系统传送，然后根据检查数据进行分类。