公开(公告)号：US20210124112A1

公开(公告)日：2021-04-29

申请号：US17077756

申请日：2020-10-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Peter Maximilian GÖTZ ,  Sebastian Thomas BAUERSCHMIDT ,  Coen Hubertus Matheus BALTIS ,  Janneke RAVENSBERGEN

IPC: G02B6/02 ,  G03F7/20 ,  G03F9/00 ,  F21V8/00 ,  C03B37/15

Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.

公开(公告)号：US20240262736A1

公开(公告)日：2024-08-08

申请号：US18566713

申请日：2022-05-24

Applicant: ASML NETHERLANDS B.V.

Inventor： Janneke RAVENSBERGEN ,  Patrick Sebastian UEBEL ,  Johannes Jacobus Matheus BASELMANS

IPC: C03B37/027

CPC classification number: C03B37/0279 ,  C03B37/02781 ,  C03B2203/16 ,  C03B2203/42

Abstract: A method of producing photonic crystal fibers (PCFs) is disclosed, the method includes: 1) obtaining an intermediate PCF having an initial outer fiber diameter of less than 1 mm; and 2) elongating the intermediate PCF so as to controllably reduce at least one dimension of the intermediate PCF.

公开(公告)号：US20240004319A1

公开(公告)日：2024-01-04

申请号：US18039487

申请日：2021-11-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Willem Richard PONGERS ,  Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GOTZ ,  Ludovicus VAN DEN OETELAAR

IPC: G03F9/00 ,  G03F7/00 ,  G02F1/35

CPC classification number: G03F9/7065 ,  G03F7/70625 ,  G03F7/70633 ,  G02F1/3528 ,  G02F1/365

Abstract: A radiation source for generating broadband radiation, the source including: a pump source having only one single fiber amplifier configured to generate pump radiation including a plurality of radiation pulses having a pulse energy of 2.5 μJ or less; and a hollow core fiber having a hollow core region and a cladding surrounding the hollow core region, the hollow core region having a pressurized gas therein, and the hollow core fiber being arranged to receive, at an input end, the pump radiation, wherein the hollow core region is dimensioned such that the radiation pulses have a soliton order higher than 16 so as to broaden a spectrum of the pump radiation using modulation instability as the pump radiation propagates along the hollow-core fiber, for providing output broadband radiation from an output end of the hollow core fiber.

公开(公告)号：US20230280660A1

公开(公告)日：2023-09-07

申请号：US18196108

申请日：2023-05-11

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ ,  Patrick Sebastian UEBEL ,  Ronald Franciscus Herman HUGERS ,  Jan Adrianus BOER ,  Edwin Johannes Cornelis BOS ,  Andreas Johannes Antonius BROUNS ,  Vitaliy PROSYENTSOV ,  Paul William SCHOLTES - VAN EIJK ,  Paulus Antonius Andreas TEUNISSEN ,  Mahesh Upendra AJGAONKAR

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

CPC classification number: G03F7/70625 ,  G02B1/005 ,  G02B6/02 ,  G03F7/7065 ,  G01B11/27 ,  G01J1/4257 ,  G03F7/70525 ,  G01M11/30

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US20220291595A1

公开(公告)日：2022-09-15

申请号：US17626852

申请日：2020-07-07

Applicant: ASML Netherlands B.V.

Inventor： Marinus Petrus REIJNDERS ,  Hendrik SABERT ,  Patrick Sebastian UEBEL

IPC: G03F7/20

Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.

公开(公告)号：US20200319400A1

公开(公告)日：2020-10-08

申请号：US16838400

申请日：2020-04-02

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ

IPC: G02B6/02 ,  G02B6/44

Abstract: An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.

公开(公告)号：US20200285129A1

公开(公告)日：2020-09-10

申请号：US16808141

申请日：2020-03-03

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GOTZ

IPC: G02F1/35

Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.

公开(公告)号：US20240231243A1

公开(公告)日：2024-07-11

申请号：US18612659

申请日：2024-03-21

Applicant: ASML Netherlands B.V.

Inventor： Marinus Petrus REIJNDERS ,  Hendrik SABERT ,  Patrick Sebastian UEBEL

IPC: G03F7/00

CPC classification number: G03F7/70616

Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.

公开(公告)号：US20240152024A1

公开(公告)日：2024-05-09

申请号：US18277821

申请日：2022-02-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Willem Richard PONGERS ,  Patrick Sebastian UEBEL ,  Johannes Richard Karl KOHLER

IPC: G02F1/365 ,  G02F1/35 ,  G03F7/00

CPC classification number: G02F1/365 ,  G02F1/3528 ,  G03F7/70166

Abstract: A radiation source including: a hollow core optical fiber having a body having a hollow core for confining a working medium, the hollow core optical fiber being operable to receive pulsed pump radiation such that the received pulsed pump radiation propagates through the hollow core from an input end to an output end of the hollow core optical fiber, wherein one or more source parameters of the radiation source are configured such that the pulsed pump radiation undergoes a soliton self-compression process so as to change a spectrum of the pulsed pump radiation to form output radiation; and at least one dispersion control mechanism being operable to change dispersion characteristics in a first portion of the optical fiber so as to spectrally shift a dispersive wave generated in the soliton self-compression process.

公开(公告)号：US20240061314A1

公开(公告)日：2024-02-22

申请号：US18373421

申请日：2023-09-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ ,  Patrick Sebastian UEBEL

IPC: G02F1/35 ,  G03F9/00 ,  H01S3/00 ,  H01S3/067

CPC classification number: G02F1/3528 ,  G03F9/7034 ,  H01S3/0057 ,  H01S3/06741

Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.