公开(公告)号：US20240152024A1

公开(公告)日：2024-05-09

申请号：US18277821

申请日：2022-02-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Willem Richard PONGERS ,  Patrick Sebastian UEBEL ,  Johannes Richard Karl KOHLER

IPC: G02F1/365 ,  G02F1/35 ,  G03F7/00

CPC classification number: G02F1/365 ,  G02F1/3528 ,  G03F7/70166

Abstract: A radiation source including: a hollow core optical fiber having a body having a hollow core for confining a working medium, the hollow core optical fiber being operable to receive pulsed pump radiation such that the received pulsed pump radiation propagates through the hollow core from an input end to an output end of the hollow core optical fiber, wherein one or more source parameters of the radiation source are configured such that the pulsed pump radiation undergoes a soliton self-compression process so as to change a spectrum of the pulsed pump radiation to form output radiation; and at least one dispersion control mechanism being operable to change dispersion characteristics in a first portion of the optical fiber so as to spectrally shift a dispersive wave generated in the soliton self-compression process.

公开(公告)号：US20230194954A1

公开(公告)日：2023-06-22

申请号：US18072196

申请日：2022-11-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Gerrit Jacobus Hendrik BRUSSAARD ,  Johannes Richard Karl KOHLER

IPC: G02F1/365 ,  G02F1/35

CPC classification number: G02F1/365 ,  G02F1/3528

Abstract: A waveguide including: a first section, the first section configured to generate, by a non-linear optical process, a broadened wavelength spectrum of pulsed radiation provided to an input end of the waveguide; a second section, the second section including an output end of the waveguide, the second section configured to exhibit a larger absolute value of group velocity dispersion than the first section; wherein a length of the second section is configured to reduce a peak intensity of one or more peaks in the broadened wavelength spectrum by at least 20%.