公开(公告)号：US5665260A

公开(公告)日：1997-09-09

申请号：US364196

申请日：1994-12-27

申请人： Nobuo Kawada ,  Shoji Kano ,  Koji Hagiwara ,  Nobuo Arai ,  Junichi Arami ,  Kenji Ishikawa

发明人： Nobuo Kawada ,  Shoji Kano ,  Koji Hagiwara ,  Nobuo Arai ,  Junichi Arami ,  Kenji Ishikawa

IPC分类号： B23Q3/15 ,  C04B37/00 ,  C04B41/89 ,  H01L21/027 ,  H01L21/265 ,  H01L21/324 ,  H01L21/683 ,  H01L23/34 ,  H02N13/00 ,  H05B3/14 ,  H05B3/68 ,  H05B3/44

CPC分类号： H01L23/345 ,  H01L21/6833 ,  H05B3/143 ,  H01L2924/0002

摘要： A ceramic electrostatic chuck with a built-in heater having electrodes of an electroconductive ceramic bonded to a surface of a supporting substrate of an electrically conducting ceramic. A heat generating layer of an electroconductive ceramic is bonded to the other surface of the supporting substrate and a covering layer of an electrically insulating ceramic is provided thereon. Each of the supporting substrate, electrode for the electrostatic chuck and heat generating layer has a surface roughness Rmax of 5 .mu.m or larger.

摘要翻译： 一种具有内置加热器的陶瓷静电卡盘，其具有与导电陶瓷的支撑基板的表面结合的导电陶瓷电极。 导电陶瓷的发热层与支撑基板的另一个表面接合，并且在其上提供电绝缘陶瓷的覆盖层。 支撑基板，静电卡盘和发热层用电极的表面粗糙度Rmax为5μm以上。

公开(公告)号：US4124729A

公开(公告)日：1978-11-07

申请号：US717617

申请日：1976-08-25

申请人： Shigeru Kubota ,  Shoji Kano ,  Masahiro Kubo

发明人： Shigeru Kubota ,  Shoji Kano ,  Masahiro Kubo

IPC分类号： C25D13/00 ,  B05D1/18 ,  B05D1/28 ,  B05C3/09

CPC分类号： B05D1/18 ,  B05D2258/02 ,  B05D2401/32 ,  Y10T74/18528 ,  Y10T74/19879

摘要： A method of multiple powder coating wherein articles to be coated are fed to a conveyor which comprises a pair of Geneva gears secured to both ends of a rotatable shaft. The Geneva gears have a plurality of channels around the periphery thereof for holding the articles. The gears are rotated intermittently at an interval of one channel and an article to be coated is fed to a pair of channels at every Y intermittent rotations, where Y is the number of coatings to be applied. The article is coated once in each cycle of rotation of the Geneva gears and is removed following X times Y intermittent rotations, where X is the number of channels around the periphery of each gear. X is odd when Y is even and X/Y is a decimal when Y is odd.

摘要翻译： 一种多粉末涂料的方法，其中待涂覆的制品被馈送到包括一对固定在可旋转轴的两端的日内瓦齿轮的输送机。 日内瓦齿轮具有围绕其周边的多个通道，用于保持物品。 齿轮以一个通道的间隔间歇地旋转，并且待涂覆的制品在每Y次间歇旋转时被供给到一对通道，其中Y是要施加的涂层的数量。 物品在日内瓦齿轮的每个旋转周期中被涂覆一次，并且在X次Y间歇旋转之后被移除，其中X是围绕每个齿轮的周边的通道数。 当Y为偶数时X为奇数，Y为奇数时为X / Y为小数。

公开(公告)号：US20090242544A1

公开(公告)日：2009-10-01

申请号：US12064338

申请日：2006-10-10

申请人： Shoji Kano

发明人： Shoji Kano

IPC分类号： H05B3/68

CPC分类号： H01L21/6831 ,  H01L21/67103

摘要： In a wafer heating apparatus having an electrostatic attraction function, a conductive heat generating layer is formed on one plane of a supporting substrate, and a conductive electrode for electrostatic attraction is formed on the other plane, and furthermore, an insulating layer is formed to cover the heat generating layer and the electrode for electrostatic attraction. The wafer heating apparatus has the electrostatic attraction function characterized in that the insulating layer covering the electrode for electrostatic attraction has a lower surface resistivity (ρsE) in a portion on the side of an object to be attracted compared with a surface resistivity (ρsE) in a portion on the side of the electrostatic attraction electrode.

摘要翻译： 在具有静电吸引功能的晶片加热装置中，在支撑基板的一个平面上形成导电发热层，在另一平面上形成静电吸引用导电电极，此外，形成绝缘层以覆盖 发热层和静电吸引用电极。 晶片加热装置具有静电吸引功能，其特征在于，覆盖静电吸引用电极的绝缘层的表面电阻率（rhosE）与表面电阻率（rhosE）相比具有较低的待吸附物体侧部分的表面电阻率（rhosE） 静电吸引电极一侧的一部分。

公开(公告)号：US20120107613A1

公开(公告)日：2012-05-03

申请号：US13137837

申请日：2011-09-16

申请人： Shoji Kano ,  Mitsumasa Kubota ,  Mitsuo Tanaka ,  Koji Kato ,  Waichi Yamamura

发明人： Shoji Kano ,  Mitsumasa Kubota ,  Mitsuo Tanaka ,  Koji Kato ,  Waichi Yamamura

IPC分类号： B32B33/00 ,  C23C16/56 ,  C23C16/34 ,  C23C16/44 ,  B32B9/00 ,  B32B15/04

CPC分类号： C23C16/34 ,  C23C16/56 ,  Y10T428/30

摘要： A corrosion-resistant article is proposed which is coated with an aluminum nitride wherein the aluminum nitride grains contain oxygen by 0.1 mass % or greater but not greater than 20 mass % so that the thermal expansion coefficient of the coating layer is made even with that of the base body; the relative density of the coating layer is preferably 50% or higher but lower than 98%. It is preferred that the coating layer is first made by chemical vapor deposition and then subjected to an oxidizing atmosphere of a temperature of 700 degrees centigrade or higher but 1150 degrees centigrade or lower; or it is preferable that after the chemical vapor deposition step the coating layer is exposed to the natural atmosphere to adsorb hydrate and then subjected to a heat treatment in an inert atmosphere of a temperature of 900 degrees centigrade but 1300 degrees centigrade or lower.

摘要翻译： 提出了一种耐蚀制品，其涂覆有氮化铝，其中氮化铝颗粒含有0.1质量％以上但不大于20质量％的氧，使得涂层的热膨胀系数甚至与 基体; 涂层的相对密度优选为50％以上且低于98％。 优选首先通过化学气相沉积制造涂层，然后经受700摄氏度或更高但1150摄氏度或更低的氧化气氛; 或者优选在化学气相沉积步骤之后，将涂层暴露于天然气氛中以吸附水合物，然后在900摄氏度至1300摄氏度或更低的惰性气氛中进行热处理。

公开(公告)号：US08115141B2

公开(公告)日：2012-02-14

申请号：US11783580

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00 ,  C23C16/00

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H05B3/143 ,  H05B2203/003

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 导电层3，其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p，或由保护层4上形成的含有掺杂剂的化合物构成。可以提供一种加热元件，其中腐蚀 氮气渗透性，电阻率或硬度被控制的耐热层形成在保护层上，即使在高温环境和腐蚀性气体环境下腐蚀性气体也难以透过，腐蚀性降低 导电层，特别是电源端子部分，可以避免和附加地，即使当具有卡盘图案并且具有长的使用寿命并且能够在 低成本。

公开(公告)号：US5759646A

公开(公告)日：1998-06-02

申请号：US699148

申请日：1996-08-16

申请人： Shoji Kano ,  Nobuo Kawada ,  Ryoji Nakajima ,  Yukio Kurosawa

发明人： Shoji Kano ,  Nobuo Kawada ,  Ryoji Nakajima ,  Yukio Kurosawa

IPC分类号： C04B41/87 ,  C04B35/583 ,  C04B41/50 ,  C04B41/51 ,  C04B41/85 ,  C04B41/88 ,  C30B15/10 ,  C30B23/06 ,  C30B35/00 ,  H01L21/203 ,  B01L3/04

CPC分类号： C04B41/009 ,  C04B41/5001 ,  C04B41/5133 ,  C04B41/85 ,  C04B41/88 ,  C30B15/10 ,  C30B23/06 ,  C30B35/002 ,  Y10T428/131 ,  Y10T428/1317

摘要： Proposed is an improvement in a vessel, e.g., crucible, of pyrolytic boron nitride (PBN) used, for example, in the process of molecular beam epitaxy for melting silicon and the like at a high temperature. Different from conventional PBN crucibles used for such a process, in which contamination of high-purity silicon is unavoidable by the reaction of molten silicon with PBN or a thermal decomposition products of boron nitride, the inventive PBN vessel is provided on the surface with a protective coating layer of pyrolytic graphite or a refractory metal such as platinum so as not to cause troubles due to contamination of high-purity silicon melted therein with the crucible materials.

摘要翻译： 提出了在例如用于在高温下熔化硅等的分子束外延过程中使用的热解氮化硼（PBN）的容器（例如坩埚）的改进。 与用于这种工艺的常规PBN坩埚不同，其中高纯度硅的污染是熔融硅与PBN或氮化硼的热分解产物的反应所不可避免的，本发明的PBN容器在表面上提供有保护 热解石墨或难熔金属如铂的涂层，以免由于用坩埚材料熔化的高纯度硅的污染而引起麻烦。

公开(公告)号：US08829397B2

公开(公告)日：2014-09-09

申请号：US12285108

申请日：2008-09-29

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： H05B3/68 ,  C23C16/00 ,  H01L21/683 ,  H02N13/00 ,  H01L21/687 ,  H05B3/14 ,  H01L21/67

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H02N13/00 ,  H05B3/143

摘要： The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.

摘要翻译： 本发明涉及一种耐腐蚀多层陶瓷构件，其至少包括：陶瓷支撑基板; 形成在所述陶瓷支撑基板上的电极层; 连接到所述电极层的电源构件; 形成在所述陶瓷支撑基板上以覆盖所述电极层的绝缘保护层; 以及陶瓷保护基板，其至少一部分设置在绝缘保护层上。 由此，即使在暴露于腐蚀性气体的情况下，也能够提供耐腐蚀性优异的长寿命耐腐蚀性的多层陶瓷部件。

公开(公告)号：US20120100698A1

公开(公告)日：2012-04-26

申请号：US13189006

申请日：2011-07-22

申请人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

发明人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

IPC分类号： H01L21/205

CPC分类号： C23C16/4404 ,  C23C16/34 ,  C23C16/45576

摘要： The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.

摘要翻译： 该方法适用于通过化学气相沉积工艺形成具有高密度和高耐热冲击性的氮化铝薄膜，并且包括将含有铝原子（Al）的气体和含有氮原子（N）的气体混合的步骤， 含有含有氧原子（O）的气体，并将混合物供给要被氮化铝薄膜覆盖的构件。

公开(公告)号：US20070274021A1

公开(公告)日：2007-11-29

申请号：US11797726

申请日：2007-05-07

申请人： Shoji Kano ,  Waichi Yamamura

发明人： Shoji Kano ,  Waichi Yamamura

IPC分类号： H01T23/00

CPC分类号： H01L21/6831

摘要： An electrostatic chuck apparatus for holding a workpiece such as a semiconductor wafer or glass substrate comprises a support substrate, an electrode formed on one surface of the support substrate, and an insulating layer covering the electrode and having a bearing surface for the workpiece. The insulating layer comprises pyrolytic boron nitride containing carbon and at least one element selected from silicon, aluminum, yttrium, and titanium, and has a Vickers hardness Hv of 50 to 1000.

摘要翻译： 用于保持诸如半导体晶片或玻璃基板的工件的静电卡盘装置包括支撑基板，形成在支撑基板的一个表面上的电极以及覆盖电极并具有用于工件的支承面的绝缘层。 绝缘层包含含碳的热解氮化硼和选自硅，铝，钇和钛的至少一种元素，维氏硬度Hv为50〜1000。

公开(公告)号：US06953918B2

公开(公告)日：2005-10-11

申请号：US10695870

申请日：2003-10-30

申请人： Shoji Kano ,  Kenji Satoh ,  Kenji Ito

发明人： Shoji Kano ,  Kenji Satoh ,  Kenji Ito

IPC分类号： H05B3/20 ,  C23C16/26 ,  C23C16/38 ,  H01L21/00 ,  H01L21/02 ,  H01L21/68 ,  H01L21/683 ,  H05B3/10 ,  H05B3/26 ,  H05B3/74 ,  H05B3/16

CPC分类号： H01L21/67103 ,  H01L21/6833 ,  H05B3/265

摘要： There is disclosed a heating apparatus which has an electrostatic adsorption function and which comprises at least a supporting substrate, an electrode for electrostatic adsorption formed on a surface of one side of the supporting substrate, a heating layer formed on a surface of the other side of the supporting substrate, and an insulating layer formed so that it may cover the electrode for electrostatic adsorption and the heating layer wherein a volume resistivity of the insulating layer is varied in a plane. Thus, there can be provided a heating apparatus which has an electrostatic adsorption function wherein uniformity of a temperature distribution in a plane of the wafer when the wafer is heated can be improved, and the wafer can be heat-treated uniformly.

摘要翻译： 公开了一种具有静电吸附功能的加热装置，其至少包括支撑基板，在支撑基板的一侧的表面上形成的用于静电吸附的电极，形成在另一侧的表面上的加热层 支撑基板和形成为能够覆盖静电吸附用电极的绝缘层和绝缘层的体积电阻率在平面内变化的加热层。 因此，可以提供一种具有静电吸附功能的加热装置，其中可以提高晶片加热时晶片的平面中的温度分布的均匀性，并且可以均匀地对晶片进行热处理。