公开(公告)号：US07508569B2

公开(公告)日：2009-03-24

申请号：US11557769

申请日：2006-11-08

申请人： Shaoher X. Pan ,  Tore Nauta

发明人： Shaoher X. Pan ,  Tore Nauta

IPC分类号： G02B26/00

CPC分类号： G09G3/346 ,  G02B26/0841

摘要： Methods for driving a plurality of MEMS devices in an apparatus are described. A voltage pulse is applied to an electrode or a structure portion of a MEMS device. The electrode is on the substrate underneath the structure portion. At least two MEMS devices of the plurality of MEMS devices have different threshold voltages, and the threshold voltage is the minimum voltage required to move the structure portion. A bias voltage is applied to whichever of the electrode or the structure portion of the MEMS device does not have the voltage pulse applied thereto. The bias voltage and the voltage pulse are capable of moving the structure portion of the MEMS device that has the higher threshold voltage of the different threshold voltages.

摘要翻译： 描述了在装置中驱动多个MEMS器件的方法。 电压脉冲施加到MEMS器件的电极或结构部分。 电极位于结构部分下方的基板上。 多个MEMS器件中的至少两个MEMS器件具有不同的阈值电压，阈值电压是移动结构部分所需的最小电压。 偏置电压施加到MEMS器件的电极或结构部分中的哪一个不具有施加到其上的电压脉冲。 偏置电压和电压脉冲能够移动具有不同阈值电压的较高阈值电压的MEMS器件的结构部分。

公开(公告)号：US07428092B2

公开(公告)日：2008-09-23

申请号：US11292329

申请日：2005-11-30

申请人： Chii Guang Lee ,  Chun-Teh Kao ,  Hung Kwei Hu ,  Shaoher X. Pan

发明人： Chii Guang Lee ,  Chun-Teh Kao ,  Hung Kwei Hu ,  Shaoher X. Pan

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  B81B3/0008 ,  B81B2201/042 ,  B81B2203/0109

摘要： A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an opening on the lower surface, a second cavity in the substrate portion, and a membrane over the second cavity. The modulator includes a substrate comprising an upper surface, a hinge support post in connection with the upper surface, a hinge component supported by the hinge support post and in connection with the mirror plate to facilitate a rotation of the mirror plate, and an upright landing tip in connection with the upper surface of the substrate. The hinge component is extends into the first cavity. The upright landing tip is configured to contact the membrane over the second cavity in the substrate portion of the mirror plate to stop the rotation of the mirror plate at a predetermined orientation.

摘要翻译： 一种空间光调制器包括一个镜面板，它包括一个反射上表面，一个具有导电表面部分的下表面，以及一个基底部分，该基底部分具有一个在下表面上具有开口的第一腔， 超过第二个腔。 该调制器包括一个衬底，该衬底包括一个上表面，一个与上表面相连的铰链支撑柱，由铰链支撑柱支撑并与镜面板连接的铰链部件，以便于镜面板的旋转， 尖端与衬底的上表面相连。 铰链部件延伸到第一腔中。 直立着陆尖端构造成在镜板的基底部分中的第二腔上接触膜以阻止镜板在预定取向的旋转。

公开(公告)号：US20080203054A1

公开(公告)日：2008-08-28

申请号：US11679767

申请日：2007-02-27

申请人： Shaoher X. Pan ,  Chii Guang Lee

发明人： Shaoher X. Pan ,  Chii Guang Lee

IPC分类号： B29D11/00

CPC分类号： B29D11/00596 ,  B29C59/14 ,  G02B26/0833

摘要： A method for fabricating a micro structure includes disposing a sacrificial material in a recess formed in a lower layer and forming a layer of compensatory material on the sacrificial material in the recess. The compensatory material is higher than the upper surface of the lower layer. A first portion of the compensatory material is removed to form a substantially flat surface on the sacrificial material. The substantially flat surface is substantially co-planar with the upper surface of the lower layer. An upper layer is formed on the lower layer and the substantially flat surface.

摘要翻译： 一种用于制造微结构的方法包括将牺牲材料设置在形成在下层中的凹陷中并在凹陷中的牺牲材料上形成补偿材料层。 补偿材料高于下层的上表面。 去除补偿材料的第一部分以在牺牲材料上形成基本平坦的表面。 基本平坦的表面与下层的上表面基本上共面。 上层形成在下层和基本平坦的表面上。

公开(公告)号：US07391556B2

公开(公告)日：2008-06-24

申请号：US11461413

申请日：2006-07-31

申请人： Shaoher X. Pan

发明人： Shaoher X. Pan

IPC分类号： G02B26/08 ,  G02B26/00 ,  H04N9/04

CPC分类号： H04N9/3129 ,  G02B26/123 ,  G02B26/124 ,  G02B26/125 ,  G03B21/008 ,  G03B21/14 ,  G03B21/208 ,  G03B33/12 ,  H04N5/7458 ,  H04N9/3108 ,  H04N9/3111 ,  H04N9/3114

摘要： A display system includes a transparent tapered plate comprising a first face, a second face, and a third face. The first face is substantially smaller than the second face and the third face. The display system also includes a row of tiltable mirror plates each comprising a reflective surface. Each of the mirror plates is configured to tilt to an “on” position to reflect incident light in an “on” direction or to tilt to an “off” position to reflect incident light in an “off” direction. An optical scanning system is configured to control the direction of the light reflected by the mirror plates in the “on” direction. The row of the tiltable mirror plates, optical scanning system and the tapered plate are configured to allow the light reflected by the row of mirror plates in the “on” direction to enter the tapered plate at the first face, be reflected by the second face, and produce a line of image pixels on the third face. The optical scanning system is configured to scan the line of image pixels across the third face to produce a display image.

摘要翻译： 显示系统包括透明锥形板，包括第一面，第二面和第三面。 第一面基本上小于第二面和第三面。 显示系统还包括一排每个包括反射表面的可倾斜镜板。 每个镜板被配置为倾斜到“开”位置以将入射光反射到“开”方向或倾斜到“关”位置以将入射光反射到“关”方向。 光学扫描系统被配置为控制由“反光板”反射的光在“向”方向上的方向。 可倾斜镜板，光学扫描系统和锥形盘的行被配置为允许由“行”方向的一列反射镜反射的光在第一面进入锥形板，被第二面反射 并且在第三面上产生一行图像像素。 光学扫描系统被配置为扫描跨越第三面的图像像素线以产生显示图像。

公开(公告)号：US20080100897A1

公开(公告)日：2008-05-01

申请号：US11553886

申请日：2006-10-27

申请人： Shaoher X. Pan

发明人： Shaoher X. Pan

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge is configured to produce an elastic restoring force on the mirror plate when the mirror plate is tilted away from an un-tilted position. The micro mirror device also includes a controller that can produce an electrostatic force to overcome the elastic restoring force to tilt the mirror plate from the un-tilted position to an “on” position or an “off” position. The electrostatic force can counter the elastic restoring force to hold the mirror plate at the “on” position or the “off” position.

摘要翻译： 微镜装置包括由基板支撑的铰链和可围绕铰链倾斜的镜板。 铰链构造成当镜板从未倾斜位置倾斜时在镜板上产生弹性恢复力。 微反射镜装置还包括能产生静电力以克服弹性恢复力以将镜板从未倾斜位置倾斜到“打开”位置或“关闭”位置的控制器。 静电力可以抵抗弹性恢复力，以将镜板保持在“开”位置或“关”位置。

公开(公告)号：US5907820A

公开(公告)日：1999-05-25

申请号：US621279

申请日：1996-03-22

申请人： Shaoher X Pan

发明人： Shaoher X Pan

IPC分类号： G06F17/40 ,  G06F17/00 ,  H01L21/66

CPC分类号： G05B23/0216 ,  G05B23/0272 ,  G05B2219/31318 ,  G05B2219/32191 ,  Y02P90/22

摘要： A system for acquiring and displaying which represents a two-dimensional array of data in an intuitive graphical display, where the graphical display is controlled through a plurality of display interfaces. Specifically, the system acquires data representing a phenomenon such as a plasma, processes that data and displays the data, in real-time, in one of a number of user selectable graphical formats. The data, once acquired, can be further processed by editing, filtering and smoothing. Such processed data can then be "replayed" such that a user can compare various sets of data acquired under various test scenarios. Additionally, the system is used to control and optimize a plasma within plasma generating equipment.

摘要翻译： 一种用于获取和显示的系统，其表示直观图形显示中的二维数据阵列，其中通过多个显示接口来控制图形显示。 具体地，系统获取表示诸如等离子体的现象的数据，以多个用户可选择的图形格式之一实时处理数据和显示数据。 一旦获得了数据，就可以通过编辑，过滤和平滑进一步处理。 然后可以“重放”这样的处理数据，使得用户可以比较在各种测试场景下获取的各种数据集。 此外，该系统用于控制和优化等离子体发生设备内的等离子体。

公开(公告)号：US08268648B2

公开(公告)日：2012-09-18

申请号：US12537102

申请日：2009-08-06

申请人： Shaoher X. Pan

发明人： Shaoher X. Pan

IPC分类号： H01L21/00

CPC分类号： H01L33/007 ,  B82Y20/00 ,  H01L33/12 ,  H01S5/34333 ,  H01S2301/173

摘要： A semiconductor device includes a substrate comprising a first surface having a [111] orientation and a second surface having a second orientation and a plurality of III-V compound layers on the substrate, wherein the plurality of III-V compound layers are configured to emit light when an electric current is produced in one or more of the plurality of III-V compound layers.

摘要翻译： 半导体器件包括：衬底，其包括具有[111]取向的第一表面和在衬底上具有第二取向的第二表面和多个III-V化合物层，其中所述多个III-V化合物层被配置为发射 当在多个III-V化合物层中的一个或多个中产生电流时发光。

公开(公告)号：US07821010B2

公开(公告)日：2010-10-26

申请号：US11427272

申请日：2006-06-28

申请人： Shaoher X. Pan ,  Chii Guang Lee

发明人： Shaoher X. Pan ,  Chii Guang Lee

IPC分类号： H01L27/14 ,  H01L29/04 ,  H01L29/15 ,  H01L31/036 ,  H01L29/78

CPC分类号： B81C1/00246 ,  B81B2201/047 ,  B81C2201/0176 ,  B81C2203/0721 ,  H01L21/02381 ,  H01L21/02532 ,  H01L21/0262

摘要： A method of fabricating a micro structure includes depositing amorphous silicon over a substrate having an electric circuit at a temperature below 550° C. to form a first structure portion, wherein at least part of the first structure portion is configured to receive an electrical signal from the electric circuit.

摘要翻译： 一种制造微结构的方法包括在低于550℃的温度下在具有电路的衬底上沉积非晶硅，以形成第一结构部分，其中第一结构部分的至少一部分被配置成从 电路。

公开(公告)号：US07800810B2

公开(公告)日：2010-09-21

申请号：US12186747

申请日：2008-08-06

申请人： Shaoher X. Pan ,  Vlad Novotny

发明人： Shaoher X. Pan ,  Vlad Novotny

IPC分类号： G02B26/00 ,  H01L23/58 ,  H01L21/66

CPC分类号： G02B26/101 ,  G02B26/0833

摘要： A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.

摘要翻译： 包含多个电光器件的晶片，每个器件封装在具有半透明盖的腔室中。 晶片上的一对互连的X-Y矩阵连接到用于寻址电光器件的电光装置的电路。 这些互连对延伸到包围器件的外部的外部到晶圆周边的测试区域。 通过互连施加的信号进行测试，同时通过半透明盖将设备曝光。

公开(公告)号：US07763962B2

公开(公告)日：2010-07-27

申请号：US11558883

申请日：2006-11-10

申请人： Shaoher X. Pan ,  Vlad Novotny

发明人： Shaoher X. Pan ,  Vlad Novotny

IPC分类号： H01L23/20

CPC分类号： B81C1/00285 ,  G02B26/0841 ,  H01L23/26 ,  H01L2924/0002 ,  H01L2924/12044 ,  Y10S257/913 ,  H01L2924/00

摘要： An encapsulated device includes a micro device on a substrate, a cover bonded to the substrate thereby forming a chamber to encapsulate the micro device, and a desiccant material on the cover and in the chamber. An anti-stiction material is absorbed in the desiccant material.

摘要翻译： 封装装置包括在基板上的微型装置，与基板结合的盖，从而形成用于封装微型装置的腔室，以及在盖子和腔室中的干燥剂材料。 抗静电材料被吸收在干燥剂材料中。