发明授权
- 专利标题: System for acquiring and analyzing a two-dimensional array of data
- 专利标题(中): 用于获取和分析二维数据阵列的系统
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申请号: US621279申请日: 1996-03-22
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公开(公告)号: US5907820A公开(公告)日: 1999-05-25
- 发明人: Shaoher X Pan
- 申请人: Shaoher X Pan
- 申请人地址: CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: CA Santa Clara
- 主分类号: G06F17/40
- IPC分类号: G06F17/40 ; G06F17/00 ; H01L21/66
摘要:
A system for acquiring and displaying which represents a two-dimensional array of data in an intuitive graphical display, where the graphical display is controlled through a plurality of display interfaces. Specifically, the system acquires data representing a phenomenon such as a plasma, processes that data and displays the data, in real-time, in one of a number of user selectable graphical formats. The data, once acquired, can be further processed by editing, filtering and smoothing. Such processed data can then be "replayed" such that a user can compare various sets of data acquired under various test scenarios. Additionally, the system is used to control and optimize a plasma within plasma generating equipment.
公开/授权文献
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