公开(公告)号：US10312656B1

公开(公告)日：2019-06-04

申请号：US15623633

申请日：2017-06-15

Applicant: Facebook Technologies, LLC

Inventor： Andrew Matthew Bardagjy ,  Joseph Duggan ,  Cina Hazegh ,  Fei Liu ,  Mark Timothy Sullivan ,  Simon Morris Shand Weiss

IPC: A61B5/00 ,  G01B9/02 ,  G01J3/10 ,  G01J3/18 ,  G02B5/18 ,  G02F1/33 ,  G03F7/20 ,  H01S3/08 ,  G01N21/47 ,  G06T7/521

Abstract: A wavelength tuning system determines a temperature calibrated to a DOE of a structured light (SL) projector. The wavelength tuning system includes a camera and controller. The camera captures images of a SL pattern projected by the SL projector. The controller generates tuning instruction. The tuning instructions cause a wavelength regulator of the SL projector to set a light source of the SL projector to different temperatures. The tuning instruction also cause the camera to capture images of the structured light pattern at each of the different temperatures. Using at least some of the captured images, the controller determines the temperature calibrated to the DOE. In one embodiment, the temperature calibrated to the DOE corresponds to a wavelength of light emitted by the light source that result in an estimated minimum power of a zeroth order diffracted beam of the SL pattern.

公开(公告)号：US10302490B2

公开(公告)日：2019-05-28

申请号：US15320567

申请日：2015-06-19

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Burkhard Roscher ,  Stefan Wilhelm ,  Gunter Moehler

IPC: G01J3/06 ,  G01J3/12 ,  G01J3/18 ,  G01J3/28 ,  G02F1/11 ,  G02F1/33 ,  H01S3/00 ,  G02B21/00 ,  G02B21/16

Abstract: A method and apparatus for actuating an acousto-optical component for manipulating light passing therethrough, in particular for manipulating the illumination and/or detection light in the beam path of a microscope, preferably a laser scanning microscope, where the illumination and/or detection wavelength is adjusted by means of at least one frequency generator connected to the acousto-optical component and controlling the manipulation, the frequency generator generates a signal which generates a spectral spread for the intensity distribution of the wavelength of the illumination and/or detection light for ensuring a temperature-independent manipulation. Actuation is effected by two or more actuation signals in such a way that two or more overlapping and/or superposing main lobes of the transfer function of the acousto-optical component or main maxima are generated.

公开(公告)号：US10302486B2

公开(公告)日：2019-05-28

申请号：US15371229

申请日：2016-12-07

Applicant: OTO PHOTONICS INC.

Inventor： Chien-Hsiang Hung

IPC: G01J3/02 ,  G01J3/18

Abstract: A spectrometer module and a fabrication method thereof are provided. The fabrication method includes the steps of: providing at least one substrate; and forming at least one positioning side and at least one optical component of the spectrometer on the at least one substrate by a microelectromechanical systems (MEMS) process. The spectrometer module fabricated by the fabrication method includes a plurality of substrates and at least one optical component. At least one of the substrates has at least one positioning side, and the at least one optical component of the spectrometer is formed on at least one of the substrates. The positioning side and the optical component are fabricated by a MEMS process.

公开(公告)号：US20190145824A1

公开(公告)日：2019-05-16

申请号：US16095191

申请日：2016-06-06

Applicant: Shimadzu Corporation

Inventor： Hiroyuki SASAI

IPC: G01J3/18 ,  G02B5/18 ,  G01J3/02

Abstract: An irradiation region 21 of a diffraction grating 2 includes a first irradiation region (21A) and a second irradiation region (21B). In the diffraction grating 2, a blaze wavelength of a groove 22 of the first irradiation region (21A) is different from a blaze wavelength of a groove 23 of the second irradiation region (21B). That is, the first irradiation region (21A) and the second irradiation region (21B) have different relationships between a wavelength of light to be spectrally dispersed and a diffraction efficiency. Therefore, in a spectral device, light on a short wavelength side of light reflected by the second irradiation region (21B) of the diffraction grating 2 is not diffracted and is not received by a detector. Then, in a spectral device 1, aberration on the short wavelength side is corrected. In this way, in the diffraction grating 2, an aberration can be corrected with a simple structure in which the grooves (22, 23) are formed such that the blaze wavelengths in the first irradiation region (21A) and the second irradiation region (21B) are different from each other.

公开(公告)号：US10260944B2

公开(公告)日：2019-04-16

申请号：US16166658

申请日：2018-10-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi Yokino ,  Katsumi Shibayama ,  Katsuhiko Kato

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02 ,  G02B5/18 ,  G01J3/36

Abstract: A spectrometer includes a support having a bottom wall part in which a depression including a concave curved inner surface and a peripheral part adjacent to the depression are provided, and a side wall part disposed on a side on which the depression is open with respect to the bottom wall part, a light detection element supported by the side wall part while opposing the depression, and a dispersive part disposed on the inner surface of the depression. A length of the depression in a second direction in which a plurality of grating grooves included in the dispersive part is aligned is larger than a length of the depression in a third direction orthogonal to the second direction when viewed in a first direction in which the depression and the light detection element oppose each other. An area of the peripheral part adjacent to the depression in the second direction is larger than an area of the peripheral part adjacent to the depression in the third direction when viewed in the first direction.

公开(公告)号：US20190072430A1

公开(公告)日：2019-03-07

申请号：US16180328

申请日：2018-11-05

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi YOKINO ,  Katsumi SHIBAYAMA

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/02 ,  G01J3/36

Abstract: A spectrometer includes a light detection element having a substrate made of a semiconductor material, a light passing part provided in the substrate, and a light detection part put in the substrate, a support having a base wall part opposing the light detection element, and side wall parts integrally formed with the base wall part, the light detection element being fixed to the side wall parts, the support being provided with a wiring electrically connected to the light detection part, and a dispersive part provided on a surface of the base wall part on a side of a space. An end part of the wiring is connected to a terminal of the light detection element. An end part of the wiring is positioned on a surface in the base wall part on an opposite side from the side of the space.

公开(公告)号：US10222261B2

公开(公告)日：2019-03-05

申请号：US15200535

申请日：2016-07-01

Applicant: Otsuka Electronics Co., Ltd.

Inventor： Yoshihiro Osawa ,  Tsutomu Mizuguchi ,  Munehiro Noguchi

IPC: G01J3/02 ,  G01J3/28 ,  G01N21/27 ,  G01N21/33 ,  G01N21/35 ,  G01N21/64 ,  G01J3/18 ,  G01N21/03

Abstract: There is provided an optical characteristic measurement system that can be set up in a relatively short time and can increase a detection sensitivity. The optical characteristic measurement system includes a first measurement apparatus. The first measurement apparatus includes: a first detection element arranged in a housing; a first cooling unit at least partially joined to the first detection element that cools the detection element; and a suppression mechanism that suppresses temperature variations occurring around the detection element in the housing.

公开(公告)号：US10211596B2

公开(公告)日：2019-02-19

申请号：US15248763

申请日：2016-08-26

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Kwang Ryong Oh

IPC: H01S5/14 ,  H01S5/028 ,  G01J3/45 ,  G01J3/18

Abstract: Disclosed is an optical sensor, including an external cavity laser configured to output sensing light and reference light; and a photodetector configured to detect a beating signal by an interference of the sensing light and the reference light output from the external cavity laser, in which the external cavity laser includes a reflecting filter including a sensing grating, to which a sensing object is attachable, and a reference grating, which is disposed on the same plane as that of the sensing grating, and outputs sensing light reflected from the sensing grating and reference light reflected from the reference grating. Accordingly, the optical sensor does not require a high-resolution spectroscope and has improved resolution and sensitivity.

公开(公告)号：US20190041266A1

公开(公告)日：2019-02-07

申请号：US15672120

申请日：2017-08-08

Applicant: KLA-Tencor Corporation

Inventor： Tianhan Wang ,  Aaron Rosenberg ,  Dawei Hu ,  Alexander Kuznetsov ,  Manh Dang Nguyen ,  Stilian Pandev ,  John Lesoine ,  Qiang Zhao ,  Liequan Lee ,  Houssam Chouaib ,  Ming Di ,  Torsten R. Kaack ,  Andrei V. Shchegrov ,  Zhengquan Tan

IPC: G01J3/18 ,  G01J3/28

Abstract: A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion parameters indicative of a dispersion of the test layer. The controller further receives a spectroscopic signal of a fabricated multilayer grating corresponding to the modeled multilayer grating from the spectroscopic metrology tool. The controller further determines values of the one or more parameters of the modeled multilayer grating providing a simulated spectroscopic signal corresponding to the measured spectroscopic signal within a selected tolerance. The controller further predicts a bandgap of the test layer of the fabricated multilayer grating based on the determined values of the one or more parameters of the test layer of the fabricated structure.

公开(公告)号：US10184834B2

公开(公告)日：2019-01-22

申请号：US15116231

申请日：2015-02-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi Yokino ,  Katsumi Shibayama ,  Katsuhiko Kato

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02

Abstract: A spectrometer includes a package having a stem and a cap, an optical unit disposed on the stem, and a lead pin for securing the optical unit to the stem. The optical unit includes a dispersive part for dispersing and reflecting light entering from a light entrance part of the cap, a light detection element having a light detection part for detecting the light dispersed and reflected by the dispersive part, a support for supporting the light detection element such that a space is formed between the dispersive part and the light detection element, and a projection protruding from the support, the lead pin being secured to the projection. The optical unit is movable with respect to the stem in a contact part of the optical unit and the stem.