公开(公告)号：US20190145824A1

公开(公告)日：2019-05-16

申请号：US16095191

申请日：2016-06-06

Applicant: Shimadzu Corporation

Inventor： Hiroyuki SASAI

IPC: G01J3/18 ,  G02B5/18 ,  G01J3/02

Abstract: An irradiation region 21 of a diffraction grating 2 includes a first irradiation region (21A) and a second irradiation region (21B). In the diffraction grating 2, a blaze wavelength of a groove 22 of the first irradiation region (21A) is different from a blaze wavelength of a groove 23 of the second irradiation region (21B). That is, the first irradiation region (21A) and the second irradiation region (21B) have different relationships between a wavelength of light to be spectrally dispersed and a diffraction efficiency. Therefore, in a spectral device, light on a short wavelength side of light reflected by the second irradiation region (21B) of the diffraction grating 2 is not diffracted and is not received by a detector. Then, in a spectral device 1, aberration on the short wavelength side is corrected. In this way, in the diffraction grating 2, an aberration can be corrected with a simple structure in which the grooves (22, 23) are formed such that the blaze wavelengths in the first irradiation region (21A) and the second irradiation region (21B) are different from each other.

公开(公告)号：US20160259098A1

公开(公告)日：2016-09-08

申请号：US15027898

申请日：2013-10-07

Applicant: SHIMADZU CORPORATION

Inventor： Hiroyuki SASAI

IPC: G02B5/18

CPC classification number: G02B5/1857 ,  G02B5/1852 ,  G02B5/1861

Abstract: An object is to provide a blazed diffraction grating having a smaller blaze angle than an existing blaze angle, and a method for producing the same. A method for producing a blazed diffraction grating includes the steps of forming a resin layer on a support having a saw-tooth sectional shape and having a surface on which a basic blaze surface and a basic riser surface are arranged alternately and repeatedly in a direction, such that the thickness of the resin layer contacting with the surface monotonically changes in the direction, and forming a metal coating film covering the resin layer surface. The method for monotonically changes the thickness comes in a formation method by difference in volatilization volume after applying a solvent resin on the support, and a formation method by a centrifugal force.

Abstract translation: 本发明的目的是提供一种具有比现有的发光角度更小的闪耀角度的闪耀衍射光栅及其制造方法。 用于制造闪耀衍射光栅的方法包括以下步骤：在具有锯齿截面形状的支撑件上形成树脂层，并且具有基本火焰表面和基本提升板表面在其方向上交替重复地布置的表面， 使得与表面接触的树脂层的厚度在方向上单调变化，并且形成覆盖树脂层表面的金属涂膜。 通过在载体上施加溶剂树脂之后的挥发体积的差异以及通过离心力的形成方法，单调地改变厚度的方法是形成方法。

公开(公告)号：US20130266120A1

公开(公告)日：2013-10-10

申请号：US13856834

申请日：2013-04-04

Applicant: JAPAN ATOMIC ENERGY AGENCY ,  JEOL LTD. ,  SHIMADZU CORPORATION ,  TOHOKU UNIVERSITY

Inventor： Takashi IMAZONO ,  Masato KOIKE ,  Hideyuki TAKAHASHI ,  Hiroyuki SASAI ,  Masami TERAUCHI

IPC: G21K1/06

CPC classification number: G21K1/06 ,  G01N23/20 ,  G21K1/062 ,  G21K1/067

Abstract: To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings G1 to G3, the corresponding energy ranges for G1, G2, and G3 being 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles α1 to α3 for G1 to G3 measured from the normal line of the diffraction grating are specified to be α1

Abstract translation: 为了覆盖宽波长带宽，分光装置使用三个变化的线间距凹面衍射光栅G1至G3，G1，G2和G3的相应能量范围分别为50至200,155至350和300至2200eV。 在各波长范围内，满足衍射条件。 为了在各个波长区域中提供高通量和高分辨率，从衍射光栅的法线测量的用于G1至G3的入射角α1至α3被指定为α1<α2α3。 假设所有衍射光栅的法线重叠在公共法线上，为了满足α1<α2<α3，将G1至G3的中心位置Delta1至Delta3设置在法线上（Delta1