Method and Apparatus for a Cleanspace Fabricator
    125.
    发明申请
    Method and Apparatus for a Cleanspace Fabricator 有权
    清洁空间制造者的方法和装置

    公开(公告)号:US20140013556A1

    公开(公告)日:2014-01-16

    申请号:US14024335

    申请日:2013-09-11

    Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a non-segmented cleanspace or have its tools vertically stacked.

    Abstract translation: 制造厂可以被构造为圆形或矩形的环形管,主要的清洁空间位于其内管和外管之间。 工厂可以被包围,工具可以密集包装,同时保持单向空气流动。 如果只有工具端口在内部,并且使用机器人,则可以将主要清洁空间大小最小化。 可以使用高度简化的机器人。 工具可以集中删除和修复。 可以为工具主体添加辅助清理空间。 多层结构增强了预制单元的使用,用于生产厂房或维护。 应用于传统平面洁净室的曲线或折叠可以构造出广泛的晶圆几何形状,包括管状非环形晶圆厂。 还可以根据环形管的弯曲或非弯曲截面切割来制造晶圆厂。 非弯曲部分的新颖工厂可以包括非分段清洁空间或将其工具垂直堆叠。

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