公开(公告)号：US20150194781A1

公开(公告)日：2015-07-09

申请号：US14663086

申请日：2015-03-19

Applicant: Gigaphoton Inc.

Inventor： Takeshi ASAYAMA ,  Hakaru MIZOGUCHI ,  Kouji KAKIZAKI ,  Hiroaki TSUSHIMA ,  Osamu WAKABAYASHI ,  Kazuya TAKEZAWA

IPC: H01S3/038 ,  H01S3/08 ,  H01S3/104 ,  H01S3/225 ,  H01S3/034

CPC classification number: H01S3/038 ,  H01S3/03 ,  H01S3/034 ,  H01S3/036 ,  H01S3/0388 ,  H01S3/08009 ,  H01S3/09702 ,  H01S3/104 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

Abstract: A laser apparatus according to embodiments may include a laser chamber including a laser gain medium; a power source; a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber; and a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed.

Abstract translation: 根据实施例的激光装置可以包括包括激光增益介质的激光室; 电源; 从电源施加电压的第一电极和接地的第二电极，第一和第二电极设置在激光室中; 以及连接到所述电源的连接器，并且以允许所述第一电极向所述第二电极设置的一侧移动的方式支撑所述第一电极。

公开(公告)号：US20140374605A1

公开(公告)日：2014-12-25

申请号：US14485355

申请日：2014-09-12

Applicant: GIGAPHOTON INC.

Inventor： Hakaru MIZOGUCHI ,  Takashi SUGANUMA ,  Hideo HOSHINO ,  Osamu WAKABAYASHI

IPC: H01S3/00 ,  H01S3/13

CPC classification number: H01S3/0071 ,  H01S3/0014 ,  H01S3/10061 ,  H01S3/1305 ,  H05G2/008

Abstract: An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.

Abstract translation: 光学装置可以包括：设置在激光束的光束输送路径中的光学模块; 设置在所述光束传送路径中用于调节所述激光束的光束传送路径的光束调节单元; 设置在所述光束传送路径中用于检测所述光束传送路径的测量单元; 以及控制单元，用于基于由测量单元检测到的激光束的光束传递路径的检测结果来控制光束调节单元。

公开(公告)号：US20140300950A1

公开(公告)日：2014-10-09

申请号：US14310845

申请日：2014-06-20

Applicant: GIGAPHOTON INC.

Inventor： Krzysztof NOWAK ,  Osamu WAKABAYASHI

IPC: H01S3/00

CPC classification number: H01S3/0078 ,  H01S3/036 ,  H01S3/041 ,  H01S3/076 ,  H01S3/0971 ,  H01S3/10007 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2366 ,  H01S3/2375 ,  H01S5/12 ,  H01S2301/02

Abstract: A laser apparatus includes at least one oscillator configured to output a first laser beam; a filter device provided in a beam path of the first laser beam, the filter device including either an optical element having transmittance properties depending on a polarization direction and a wavelength and a filter device including a wavelength dispersive element; and at least one amplifier configured to amplify a second laser beam from the filter device and output as a third laser beam.

Abstract translation: 激光装置包括至少一个被配置为输出第一激光束的振荡器; 设置在第一激光束的光束路径中的滤光器装置，滤光器装置包括具有取决于偏振方向和波长的透射特性的光学元件和包括波长色散元件的滤光器件; 以及至少一个放大器，被配置为放大来自所述滤波器装置的第二激光束并作为第三激光束输出。

公开(公告)号：US20140284502A1

公开(公告)日：2014-09-25

申请号：US14215527

申请日：2014-03-17

Applicant: GIGAPHOTON INC.

Inventor： Masaki NAKANO ,  Osamu WAKABAYASHI

IPC: G03F7/20 ,  B05B17/06 ,  B05B12/02 ,  H05G2/00

CPC classification number: H05G2/006 ,  B05B9/002 ,  B05B12/02 ,  B05B17/0607 ,  B05B17/0615 ,  G03F7/70033 ,  G03F7/70041 ,  G03F7/7085 ,  H01L21/268 ,  H01L22/10 ,  H05G2/003 ,  H05G2/008

Abstract: A target supply device may include a reservoir configured to hold a target material in its interior in liquid form, a vibrating element configured to apply vibrations to the reservoir, a target sensor configured to detect droplets of the target material outputted from the reservoir, a control unit configured to set parameters based on a result of the detection performed by the target sensor, a function generator configured to generate an electrical signal having a waveform based on the parameters, and a power source configured to apply a driving voltage to the vibrating element in accordance with the electrical signal.

Abstract translation: 目标供应装置可以包括被配置为在其内部保持液体形式的目标材料的储存器，被配置为向储存器施加振动的振动元件，配置成检测从储存器输出的目标材料的液滴的目标传感器， 被配置为基于由所述目标传感器执行的检测结果来设置参数的单元，被配置为生成基于所述参数的具有波形的电信号的功能发生器，以及被配置为向所述振动元件施加驱动电压的电源 符合电信号。

公开(公告)号：US20140246187A1

公开(公告)日：2014-09-04

申请号：US14279248

申请日：2014-05-15

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi KAWASUJI ,  Masazumi KOMORI ,  Osamu WAKABAYASHI

IPC: F28F27/00

CPC classification number: F28F27/02 ,  F28F27/00 ,  F28F2250/08 ,  G05D23/1917 ,  G21K1/062 ,  H05G2/008

Abstract: A cooling water temperature controlling device includes a heat exchanger for heat-exchanging between primary cooling water and secondary cooling water, a tank for storing the secondary cooling water, an injection pipe connecting the tank and a secondary cooling water supply unit, a valve for controlling a flow rate of the secondary cooling water from the secondary cooling water supply unit to the tank, a fluid level detection unit for detecting a level of the secondary cooling water in the tank, a first circulation pipe connecting the tank and the heat exchanger, a second circulation pipe connecting the heat exchanger and a temperature-control target, a third circulation pipe connecting the tank and the temperature-control target, a pump for circulating the secondary cooling water through the first to third circulation pipes, and a controller for controlling the valve and the pump based on the detected fluid level.

Abstract translation: 一种冷却水温度控制装置，包括：一次冷却水和二次冷却水之间的热交换用热交换器，二次冷却水的储存槽，连接该罐的二次冷却水供给部的喷射管， 二次冷却水从二次冷却水供给单元向罐的流量，液位检测单元，用于检测槽内的二次冷却水的水位，连接箱和热交换器的第一循环管， 连接热交换器和温度控制目标的第二循环管，连接罐和温度控制目标的第三循环管，用于使第二至第三循环管循环第二冷却水的泵，以及用于控制 阀和泵基于检测到的液位。

公开(公告)号：US20140124685A1

公开(公告)日：2014-05-08

申请号：US14152813

申请日：2014-01-10

Applicant: GIGAPHOTON, INC.

Inventor： Tatsuya YANAGIDA ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  H01S3/10

CPC classification number: H01S3/10061 ,  H01S3/08054 ,  H01S3/08059 ,  H01S3/2308 ,  H01S3/2383 ,  H01S2301/20 ,  H05G2/003 ,  H05G2/008

Abstract: An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber; and at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam.

Abstract translation: 可以提供与激光装置一起使用的极紫外光发生系统，并且极紫外光发生系统可以包括：包括至少一个用于至少一个激光束的窗口的室，以及用于将目标材料供应到 房间 以及设置在激光束路径上的至少一个偏振控制单元，用于控制至少一个激光束的偏振状态。

公开(公告)号：US20140050239A1

公开(公告)日：2014-02-20

申请号：US13947910

申请日：2013-07-22

Applicant: Gigaphoton Inc.

Inventor： Shinji NAGAI ,  Fumika YOSHIDA ,  Osamu WAKABAYASHI ,  Kouji KAKIZAKI

IPC: H01S3/10

CPC classification number: H01S3/10061 ,  H01S3/005 ,  H01S3/2251 ,  H01S3/2316

Abstract: A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.

Abstract translation: 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。

公开(公告)号：US20140034852A1

公开(公告)日：2014-02-06

申请号：US14048654

申请日：2013-10-08

Applicant: GIGAPHOTON INC.

Inventor： Kouji KAKIZAKI ,  Tooru ABE ,  Osamu WAKABAYASHI

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H01S3/2232 ,  H01S3/2316 ,  H05G2/003

Abstract: An extreme ultraviolet light generation apparatus may include: a laser apparatus; a chamber provided with an inlet for introducing a laser beam outputted from the laser apparatus to the inside thereof; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber; a collector mirror disposed in the chamber for collecting extreme ultraviolet light generated when the target material is irradiated with the laser beam in the chamber; an extreme ultraviolet light detection unit for detecting energy of the extreme ultraviolet light; and an energy control unit for controlling energy of the extreme ultraviolet light.

Abstract translation: 极紫外光发生装置可以包括：激光装置; 设置有用于将从激光装置输出的激光束引入其内部的入口的室; 目标供给单元，其设置在所述室中，用于将目标材料供应到所述室内的预定区域; 设置在所述室中的收集器反射镜，用于收集当所述靶材料在所述腔室中被激光束照射时产生的极紫外光; 用于检测极紫外光的能量的极紫外光检测单元; 以及用于控制极紫外光的能量的能量控制单元。

公开(公告)号：US20130250402A1

公开(公告)日：2013-09-26

申请号：US13895242

申请日：2013-05-15

Applicant: GIGAPHOTON INC.

Inventor： Krzysztof NOWAK ,  Masato MORIYA ,  Osamu WAKABAYASHI

IPC: H01S3/067

CPC classification number: H01S3/06758 ,  G03F7/70025 ,  G03F7/70033 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/032 ,  H01S3/036 ,  H01S3/0387 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/2232 ,  H01S3/2308 ,  H01S3/2325 ,  H01S3/2341

Abstract: A laser beam amplifier with high optical axis stability is provided. The laser beam amplifier includes: a container for accommodating a laser medium; a pair of electrodes for performing discharge in the laser medium to form an amplification region for a laser beam in the laser medium; and an optical system for forming an optical path between a first point, upon which the laser beam is incident, and a second point, from which the laser beam is outputted, such that the amplification region is located in the optical path between the first point and the second point, wherein the first point and the second point are conjugate to each other, and the laser beam incident upon the first point is amplified while passing through the amplification region at least twice and then transferred to the second point.

Abstract translation: 提供了具有高光轴稳定性的激光束放大器。 激光束放大器包括：用于容纳激光介质的容器; 一对电极，用于在激光介质中进行放电，以在激光介质中形成用于激光束的放大区域; 以及光学系统，用于在激光束入射的第一点和从其输出激光束的第二点之间形成光路，使得放大区域位于第一点之间的光路中 以及第二点，其中第一点和第二点彼此共轭，并且入射在第一点上的激光束在通过放大区域至少两次时被放大，然后被传送到第二点。

公开(公告)号：US20130228695A1

公开(公告)日：2013-09-05

申请号：US13769166

申请日：2013-02-15

Applicant: GIGAPHOTON INC.

Inventor： Hakaru MIZOGUCHI ,  Osamu WAKABAYASHI

IPC: G02B5/08

CPC classification number: G02B5/0891 ,  G02B19/0023 ,  G02B19/0095 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70175 ,  G21K1/067 ,  H05G2/003 ,  H05G2/006 ,  H05G2/008

Abstract: A device for collecting EUV light from a plasma generation region includes first and second EUV collector mirrors. The first EUV collector mirror has a first spheroidal reflective surface and arranged such that a first focus of the first spheroidal reflective surface lies in the plasma generation region and a second focus of the first spheroidal reflective surface lies in a predetermined intermediate focus region. The second EUV collector mirror has a second spheroidal reflective surface and arranged such that a third focus of the second spheroidal reflective surface lies in the plasma generation region and a fourth focus of the second spheroidal reflective surface lies in the predetermined intermediate focus region.

Abstract translation: 用于从等离子体产生区收集EUV光的装置包括第一和第二EUV收集器反射镜。 第一EUV收集镜具有第一球状反射表面，并且被布置成使得第一球状反射表面的第一焦点位于等离子体产生区域中，并且第一球状反射表面的第二焦点位于预定的中间聚焦区域中。 第二EUV收集镜具有第二球形反射表面，并且被布置为使得第二球状反射表面的第三焦点位于等离子体产生区域中，并且第二球状反射表面的第四焦点位于预定的中间聚焦区域中。