HEAT EXCHANGE DEVICE AND SINGLE CRYSTAL FURNACE

    公开(公告)号:US20230095607A1

    公开(公告)日:2023-03-30

    申请号:US18073898

    申请日:2022-12-02

    Abstract: A heat exchanging device includes: an inner wall and an outer wall, wherein the inner wall is close to the center axis of the heat exchanging device. The inner wall and the outer wall together form a chamber for a cooling medium to flow. The inner wall is provided with at least one protrusion component having an internal cavity. The protruding direction of the protrusion component faces the center axis. The internal cavity of the protrusion component is in communication with the chamber formed by the inner wall and the outer wall. The protruding direction of the protrusion component faces the crystal bar, and the internal cavity of the protrusion component is in communication with the chamber formed by the inner wall and the outer wall, which increases the heat exchanging area, and reduces the horizontal distance between the cooling medium and the crystal bar.

    Semiconductor crystal growth apparatus

    公开(公告)号:US11479874B2

    公开(公告)日:2022-10-25

    申请号:US16904564

    申请日:2020-06-18

    Abstract: The invention provides a semiconductor crystal growth device comprising a furnace body; a crucible; a pulling device; a horizontal magnetic field applying device; and a deflector, being barrel-shaped and disposed above the silicon melt in the furnace body in a vertical direction, and the pulling device pulls the silicon ingot through the deflector in the vertical direction; wherein the bottom of the deflector has different thermal reflection coefficients at different positions, and the thermal reflection coefficient of the bottom of the deflector in the direction of the horizontal magnetic field is smaller than that in the direction perpendicular to the horizontal magnetic field. According to the semiconductor crystal growth device of the present invention, the temperature distribution inside the melt silicon and quality of the semiconductor crystal are improved.

    Method of estimating oxygen concentration of silicon single crystal and method of manufacturing silicon single crystal

    公开(公告)号:US11473211B2

    公开(公告)日:2022-10-18

    申请号:US16971155

    申请日:2019-02-27

    Abstract: A method of estimating an oxygen concentration in monocrystalline silicon, which is pulled up by a pull-up device having a hot zone with a plane-asymmetric arrangement with respect to a plane defined by a crystal pull-up shaft and an application direction of a horizontal magnetic field, includes, in at least one of a neck-formation step or a shoulder-formation step for the monocrystalline silicon: a step of measuring a surface temperature of a silicon melt at a point defining a plane-asymmetric arrangement of a hot zone, and a step of estimating the oxygen concentration in a straight body of the pulled-up monocrystalline silicon based on the measured surface temperature of the silicon melt and a predetermined relationship between the surface temperature of the silicon melt and the oxygen concentration in the monocrystalline silicon.

    SINGLE CRYSTAL INGOT GROWTH CONTROL DEVICE

    公开(公告)号:US20220127749A1

    公开(公告)日:2022-04-28

    申请号:US17424098

    申请日:2020-01-20

    Inventor: Hyun Woo PARK

    Abstract: The present invention provides a single crystal ingot growth control device applied to a body process for growing the diameter of an ingot to a target diameter, and the single crystal ingot growth control device includes: an input unit that receives a diameter error (ΔD) that is a difference value between a measured diameter (D) of the ingot and a target diameter (D_T); a calculation unit that performs integral calculation on the diameter error (ΔD) received by the input unit in real time and calculates a final pulling speed (P/S_F) for each set time (t) that is increased stepwise by reflecting the diameter error integral value ∫ΔD), and an output unit that outputs the final pulling speed (P/S_F) calculated by the calculation unit to a pulling controller during the set time (t).

    Machine control device, machine control program, and machine control method

    公开(公告)号:US11092936B2

    公开(公告)日:2021-08-17

    申请号:US16345268

    申请日:2017-10-27

    Abstract: A machine control device is configured to include a measurement unit that measures regarding a state of a controlled object handled by a machine apparatus, a determination unit that determines a constraint determination value by comparing the measurement result by the measurement unit with a predetermined constraint condition, control units and that perform operation control for the machine apparatus based on the constraint determination value determined by the determination unit according to the relationship set for the constraint determination value and the operation control, and a learning unit that reconfigures the relationship between the constraint determination value and the operation control when the constraint determination value changes due to the operation control performed by the control units.

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