-
公开(公告)号：US20170003226A1
公开(公告)日：2017-01-05
申请号：US15200540
申请日：2016-07-01
Applicant: COBALT LIGHT SYSTEMS LIMITED
Inventor： William Parker
IPC: G01N21/65
CPC classification number: G01N21/65 , G01N21/85 , G01N21/90 , G01N2201/1056
Abstract: Apparatus for carrying out spatially offset Raman spectroscopy (SORS) is described. The apparatus comprises a rotatable prism arranged such that a spatial offset between an entry region and a collection region at a sample is dependent upon an angle of rotation of the prism.
Abstract translation: 描述了用于进行空间偏移拉曼光谱（SORS）的装置。 该装置包括可旋转的棱镜，其布置成使得入射区域和样品处的收集区域之间的空间偏移取决于棱镜的旋转角度。
-
公开(公告)号：US09880099B2
公开(公告)日：2018-01-30
申请号：US15200540
申请日：2016-07-01
Applicant: COBALT LIGHT SYSTEMS LIMITED
Inventor： William Parker
CPC classification number: G01N21/65 , G01N21/85 , G01N21/90 , G01N2201/1056
Abstract: Apparatus for carrying out spatially offset Raman spectroscopy (SORS) is described. The apparatus comprises a rotatable prism arranged such that a spatial offset between an entry region and a collection region at a sample is dependent upon an angle of rotation of the prism.
-
公开(公告)号：US09546962B2
公开(公告)日：2017-01-17
申请号：US14619004
申请日：2015-02-10
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
Abstract translation: 公开了用于检查或测量样本的装置和方法。 一种系统包括用于产生和偏转多个入射光束以形成多个斑点的照明通道，其跨越由样本的多个扫描部分组成的分割线扫描。 该系统还包括一个或多个检测通道，用于响应于朝向这种样本的入射光束，感测从样本发出的光，并且在每个入射光束的光点扫描其扫描部分时收集每个扫描部分的检测图像。 一个或多个检测通道包括至少一个纵向侧通道，用于纵向收集每个扫描部分的检测图像，因为每个入射光束的光斑在其扫描部分上扫描。
-
公开(公告)号：US20240280479A1
公开(公告)日：2024-08-22
申请号：US18441815
申请日：2024-02-14
Applicant: Lightsense Technology, Inc.
Inventor： John Coates , Wade Poteet , Terje Skotheim
IPC: G01N21/3504 , G01N21/01 , G01N21/35
CPC classification number: G01N21/3504 , G01N2021/0106 , G01N2021/3595 , G01N2201/0696 , G01N2201/1056
Abstract: An optical spectral sensing system that provides a full-range mid-IR FTIR based measurement for gases and vapors. The system features a small interferometer module which is integrated with a sample cell and solid-state source, that has an optimized optical path matched to the intended concentration ranges for the gas/vapor measurements. The concentration ranges targeted are from % level for high targeted gas concentrations, as provided by short-pathlength gas cells, to parts-per-million (ppm) and for certain gases high parts-per-billion (ppb) for low trace targeted gas concentrations, provided by long-pathlength gas cells. The optics and opto-mechanical components selected are able to provide a spectral range of 400 cm−1 to 5000 cm−1, with nominal spectral resolutions of 4 cm−1 to 16 cm−1, with the potential to extend the resolution from 2 cm−1 out to 32 cm−1. The electronics are optimized to support both the range and spectral resolution based the use of a “universal” mid-IR detector.
-
公开(公告)号：US09970883B2
公开(公告)日：2018-05-15
申请号：US15399331
申请日：2017-01-05
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
-
Patent Agency Ranking
公开(公告)号：US09329084B2
公开(公告)日：2016-05-03
申请号：US14080234
申请日：2013-11-14
Inventor： Malcolm Smith , Michael Burka , Stephen McLaughlin
CPC classification number: G01J3/0208 , G01N21/65 , G01N2201/1056
Abstract: In an embodiment, an apparatus may include a light source, a beam manipulator, an optical component, an analyzer, and a detector. The light source may generate an incident light at a first frequency. The beam manipulator may include one or more polyhedron-shaped prisms that may deflect the incident light for focus at a plurality of points on a sample. The optical component may collect the deflected incident light, focus the collected deflected incident light at the plurality of points on the sample, and collect scattered light from the sample. The scattered light may include elastic scattered light and/or inelastic scattered light. The inelastic scattered light may have a second frequency that is shifted up or down from the first frequency. The detector may detect the inelastic scattered light and the analyzer may identify a substance contained in the sample based on the detected inelastic scattered light.
Abstract translation: 在一个实施例中，装置可以包括光源，光束操纵器，光学部件，分析器和检测器。 光源可以以第一频率产生入射光。 光束操纵器可以包括一个或多个多面体形状的棱镜，其可以将样品上的多个点的入射光偏转成焦点。 光学部件可以收集偏转的入射光，将收集的偏转的入射光聚焦在样品上的多个点上，并收集来自样品的散射光。 散射光可以包括弹性散射光和/或非弹性散射光。 非弹性散射光可以具有从第一频率向上或向下偏移的第二频率。 检测器可以检测非弹性散射光，并且分析器可以基于检测到的非弹性散射光来识别样品中包含的物质。
-
公开(公告)号：US20240345000A1
公开(公告)日：2024-10-17
申请号：US18579687
申请日：2022-08-16
Applicant: LG ENERGY SOLUTION, LTD.
Inventor： Jiwon KIM , Tae Young KIM , Seung Gyun HONG
IPC: G01N21/952 , G01N21/88 , H01M10/42
CPC classification number: G01N21/952 , G01N21/8806 , G01N2201/102 , G01N2201/1056 , H01M10/4285
Abstract: A side surface inspection device is provided for a cylindrical battery having a side surface defining first to fourth areas. The side surface inspection device includes a first light to emit light toward the side surface of the cylindrical battery; a plurality of mirrors having a first to fourth mirrors that each reflect light emitted from the first light to be incident on each of the first to fourth areas, respectively, of the cylindrical battery, and are configured to reflect light reflected by each of the first to fourth areas, respectively, of the cylindrical battery; and a camera to receive the light reflected by each of the plurality of mirrors and configured to form an image including images of the first to fourth areas of the cylindrical battery.
-
公开(公告)号：US20170115232A1
公开(公告)日：2017-04-27
申请号：US15399331
申请日：2017-01-05
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
-
公开(公告)号：US20150226677A1
公开(公告)日：2015-08-13
申请号：US14619004
申请日：2015-02-10
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
Abstract translation: 公开了用于检查或测量样本的装置和方法。 一种系统包括用于产生和偏转多个入射光束以形成多个斑点的照明通道，其跨越由样本的多个扫描部分组成的分割线扫描。 该系统还包括一个或多个检测通道，用于响应于朝向这种样本的入射光束，感测从样本发出的光，并且在每个入射光束的光点扫描其扫描部分时收集每个扫描部分的检测图像。 一个或多个检测通道包括至少一个纵向侧通道，用于纵向收集每个扫描部分的检测图像，因为每个入射光束的光斑在其扫描部分上扫描。
-
公开(公告)号：US20150131091A1
公开(公告)日：2015-05-14
申请号：US14080234
申请日：2013-11-14
Applicant: Malcolm Smith , Michael Burka , Stephen McLaughlin
Inventor： Malcolm Smith , Michael Burka , Stephen McLaughlin
IPC: G01J3/02
CPC classification number: G01J3/0208 , G01N21/65 , G01N2201/1056
Abstract: In an embodiment, an apparatus may include a light source, a beam manipulator, an optical component, an analyzer, and a detector. The light source may generate an incident light at a first frequency. The beam manipulator may include one or more polyhedron-shaped prisms that may deflect the incident light for focus at a plurality of points on a sample. The optical component may collect the deflected incident light, focus the collected deflected incident light at the plurality of points on the sample, and collect scattered light from the sample. The scattered light may include elastic scattered light and/or inelastic scattered light. The inelastic scattered light may have a second frequency that is shifted up or down from the first frequency. The detector may detect the inelastic scattered light and the analyzer may identify a substance contained in the sample based on the detected inelastic scattered light.
Abstract translation: 在一个实施例中，装置可以包括光源，光束操纵器，光学部件，分析器和检测器。 光源可以以第一频率产生入射光。 光束操纵器可以包括一个或多个多面体形状的棱镜，其可以将样品上的多个点的入射光偏转成焦点。 光学部件可以收集偏转的入射光，将收集的偏转的入射光聚焦在样品上的多个点上，并收集来自样品的散射光。 散射光可以包括弹性散射光和/或非弹性散射光。 非弹性散射光可以具有从第一频率向上或向下偏移的第二频率。 检测器可以检测非弹性散射光，并且分析器可以基于检测到的非弹性散射光来识别样品中包含的物质。
-
-
-
-
-
-
-
-
-
Search Results
11
records
(took 0.016 seconds)
