FILM PEELING APPARATUS
    1.
    发明申请
    FILM PEELING APPARATUS 审中-公开
    电影裱糊装置

    公开(公告)号:US20140020844A1

    公开(公告)日:2014-01-23

    申请号:US13669344

    申请日:2012-11-05

    CPC classification number: B29C63/0013

    Abstract: A film peeling apparatus for detaching a region of a film unit on a substrate and including: a tape supply unit configured to supply an adhesive tape onto the film unit; a plurality of pins arranged above the adhesive tape, vertically descendible toward the adhesive tape to attach a portion of the film unit to an adhesive surface of the adhesive tape, and sequentially vertically liftable after the portion of the film unit is attached to the adhesive surface of the adhesive tape; and a tape recovery unit configured to recover the adhesive tape having the portion of the film attached thereto, and apply a tension force to the adhesive tape after the portion of the film unit is adhered to the adhesive tape.

    Abstract translation: 一种胶片剥离装置,用于将基片上的胶片单元的区域分离,并包括:胶带供给单元,被配置为将胶带供应到胶片单元上; 多个销布置在粘合带上方,垂直地向粘合带下降,以将胶片单元的一部分附着到粘合带的粘合表面上,并且在膜单元的一部分附着到粘合表面之后依次垂直地可升降 的胶带; 以及磁带恢复单元,其被配置为恢复具有附接到其上的膜的该部分的胶带,并且在胶片单元的一部分粘附到胶带上之后对胶带施加张力。

    METHOD OF MONITORING A LASER BEAM AND LASER IRRADIATION APPARATUS USING THE SAME
    3.
    发明申请
    METHOD OF MONITORING A LASER BEAM AND LASER IRRADIATION APPARATUS USING THE SAME 审中-公开
    使用激光束和激光照射装置监测其方法

    公开(公告)号:US20150034614A1

    公开(公告)日:2015-02-05

    申请号:US14170350

    申请日:2014-01-31

    CPC classification number: H01L22/20 B23K26/032 B23K26/705 B23K2103/56

    Abstract: A laser irradiation apparatus is provided. The laser irradiation apparatus includes a laser beam generator configured to generate laser beams; a slit unit configured to selectively transmit the laser beams; a mirror unit configured to change a path of the selectively transmitted laser beams, so as to irradiate the selectively transmitted laser beams onto a processing target; a first optical system, wherein a first portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the first optical system; and a second optical system, wherein a second portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the second optical system.

    Abstract translation: 提供了一种激光照射装置。 激光照射装置包括:激光束发生器,被配置为产生激光束; 狭缝单元,被配置为选择性地透射所述激光束; 被配置为改变选择性透射的激光束的路径的反射镜单元,以便将选择性透射的激光束照射到处理目标上; 第一光学系统,其中所述选择性透射的激光束的第一部分穿透所述反射镜单元并被投影到所述第一光学系统; 以及第二光学系统,其中所述选择性透射的激光束的第二部分穿过所述反射镜单元并被投影到所述第二光学系统。

    METHOD FOR INSPECTING POLYSILICON LAYER
    5.
    发明申请
    METHOD FOR INSPECTING POLYSILICON LAYER 有权
    检测多晶硅层的方法

    公开(公告)号:US20140353523A1

    公开(公告)日:2014-12-04

    申请号:US14094051

    申请日:2013-12-02

    CPC classification number: G01N21/6489 G01N21/9501

    Abstract: A method for inspecting a polysilicon layer includes: radiating excitation light to the polysilicon layer; and detecting a photoluminescence signal generated by the excitation light, wherein average power of the excitation light has a range of 1 W/cm2 to 10 W/cm2, and peak power of the excitation light has a range of 100 W/cm2 to 1000 W/cm2.

    Abstract translation: 一种用于检查多晶硅层的方法包括:向多晶硅层辐射激发光; 并且检测由激发光产生的光致发光信号,其中激发光的平均功率具有1W / cm 2至10W / cm 2的范围,并且激发光的峰值功率具有100W / cm 2至1000W的范围 / cm2。

    OPTICAL MODULE FOR LASER BEAM SHAKING
    6.
    发明申请
    OPTICAL MODULE FOR LASER BEAM SHAKING 有权
    激光光束激光光学模块

    公开(公告)号:US20140268265A1

    公开(公告)日:2014-09-18

    申请号:US14190661

    申请日:2014-02-26

    CPC classification number: G02B26/0816 G02B7/1825 H01S5/0071

    Abstract: Apparatus for uniformizing light amount distribution by shaking line beams along a longitudinal axis direction is provided. The apparatus includes a mirror mount, a mirror, an actuator, and a deformation member. The mirror fixed to the mirror mount and includes a reflective surface. The actuator is disposed at a distance from the mirror mount and configured to repeat expansion and contraction along a first direction. The deformation member includes a plurality of blocks connected to each other by flexible joints and is coupled to the actuator and the mirror mount. The deformation member is configured to change a displacement in the first direction due to operation of the actuator to a displacement in a second direction that crosses the first direction, amplify the changed displacement, and transmit the amplified displacement to the mirror mount.

    Abstract translation: 提供了通过沿纵向轴线方向抖动线束使光量分布均匀化的装置。 该装置包括反射镜安装件,反射镜,致动器和变形构件。 镜子固定在镜面支架上并包括一个反光表面。 致动器设置在距反射镜安装座一定距离处,并被配置成沿着第一方向重复膨胀和收缩。 变形构件包括通过柔性接头彼此连接并且连接到致动器和反射镜座的多个块。 变形构件被构造成将由于致动器的操作引起的在第一方向上的位移沿与第一方向相交的第二方向的位移改变,放大变化的位移,并将放大的位移传递到镜面安装件。

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