公开(公告)号：US20140360987A1

公开(公告)日：2014-12-11

申请号：US14291711

申请日：2014-05-30

Applicant: Samsung Display Co., LTD.

Inventor： Hee-Geun SON ,  Byoung-Kwon CHOO ,  Do-Yeob KIM

IPC: B23K26/30

CPC classification number: B23K26/0876 ,  B23K26/0853

Abstract: A laser apparatus includes: a laser which selectively irradiates a laser beam to a portion of a target based on a laser driving voltage, where an intensity of the laser beam is substantially stabilized within about 10 nanoseconds; a stage which controls a relative location between the target and the laser based on a stage driving voltage; and a controller which applies the stage driving voltage to the stage, and applies the laser driving voltage to the laser

Abstract translation: 激光装置包括：激光器，其基于激光驱动电压选择性地将激光束照射到目标的一部分，其中激光束的强度基本上稳定在约10纳秒内; 基于舞台驱动电压控制目标和激光之间的相对位置的阶段; 以及将舞台驱动电压施加到舞台上并将激光驱动电压施加到激光器的控制器

公开(公告)号：US20140051218A1

公开(公告)日：2014-02-20

申请号：US14067454

申请日：2013-10-30

Applicant: Samsung Display Co., Ltd.

Inventor： Won-Kyu LEE ,  Tae-Hoon YANG ,  Bo-Kyng CHOI ,  Byoung-Kwon CHOO ,  Sang-Ho MOON ,  Kyu-Sik CHO ,  Yong-Hwan PARK ,  Joon-Hoo CHOI ,  Min-Chul SHIN ,  Yun-Gyu LEE

IPC: H01L29/66 ,  H01L21/02 ,  H01L21/8234

CPC classification number: H01L29/66742 ,  H01L21/02595 ,  H01L21/8234 ,  H01L27/12 ,  H01L27/1218 ,  H01L27/1251 ,  H01L27/1277 ,  H01L27/1281 ,  H01L27/1285 ,  H01L27/3262 ,  H01L2227/323

Abstract: In an organic light emitting diode (OLED) display and a manufacturing method thereof, the OLED display includes a substrate main body; an insulation layer pattern formed on the substrate main body, and including a first thickness layer and a second thickness layer thinner than the first thickness layer; a metal catalyst that is scattered on the first thickness layer of the insulation layer pattern; and a polycrystalline semiconductor layer formed on the insulation layer pattern, and divided into a first crystal area corresponding to the first thickness layer and to a portion of the second thickness layer adjacent to the first thickness layer and a second crystal area corresponding to the remaining part of the second thickness layer. The first crystal area of the polycrystalline semiconductor layer is crystallized through the metal catalyst, and the second crystal area of the polycrystalline semiconductor layer is solid phase crystallized.

Abstract translation: 在有机发光二极管（OLED）显示器及其制造方法中，OLED显示器包括：基板主体; 绝缘层图案，形成在所述基板主体上，并且包括第一厚度层和比所述第一厚度层更薄的第二厚度层; 分散在绝缘层图案的第一厚度层上的金属催化剂; 以及形成在所述绝缘层图案上的多晶半导体层，并且被分成与所述第一厚度层相对应的第一晶体区域和与所述第一厚度层相邻的所述第二厚度层的一部分，以及与所述第一厚度层的剩余部分相对应的第二晶体区域 的第二厚度层。 多晶半导体层的第一晶体区域通过金属催化剂结晶，多晶半导体层的第二晶体区域是固相结晶化的。

公开(公告)号：US20170145259A1

公开(公告)日：2017-05-25

申请号：US15355917

申请日：2016-11-18

Applicant: SAMSUNG DISPLAY CO., LTD. ,  UBmaterials lnc.

Inventor： Byoung-Kwon CHOO ,  Jin-Hyung PARK ,  Jeong-Kyun NA ,  Joon-Hwa BAE ,  Byoung-Ho CHEONG ,  Joo-Woan CHO ,  In-Sun HWANG

IPC: C09G1/02 ,  H01L29/786 ,  H01L21/306 ,  H01L27/12 ,  C09K3/14 ,  H01L21/02

CPC classification number: C09G1/02 ,  B81C2201/0104 ,  C09K3/1409 ,  G02F1/1368 ,  G02F2202/104 ,  H01L21/3212 ,  H01L27/1222 ,  H01L27/1274 ,  H01L27/3262 ,  H01L29/66757 ,  H01L29/78675

Abstract: A polishing slurry for silicon, a method of polishing polysilicon, and a method of manufacturing a thin film transistor substrate, the slurry including a polishing particle; a dispersing agent including an anionic polymer, a hydroxyl acid, or an amino acid; a stabilizing agent including an organic acid, the organic acid including a carboxyl group; a hydrophilic agent including a hydrophilic group and a hydrophobic group, and water, wherein the polishing particle is included in the polishing slurry in an amount of about 0.1% by weight to about 10% by weight, based on a total weight of the slurry, a weight ratio of the polishing particle and the dispersing agent is about 1:0.01 to about 1:0.2, a weight ratio of the polishing particle and the stabilizing agent is about 1:0.001 to about 1:0.1, and a weight ratio of the polishing particle and the hydrophilic agent is about 1:0.01 to about 1:3.

公开(公告)号：US20210008685A1

公开(公告)日：2021-01-14

申请号：US16926034

申请日：2020-07-10

Applicant: Samsung Display Co., LTD.

Inventor： Jung-Gun NAM ,  Seung-Bae KANG ,  Heesung YANG ,  Bonggu KANG ,  Joon-Hwa BAE ,  Woo-Jin CHO ,  Byoung-Kwon CHOO

IPC: B24B37/10 ,  B24B7/22 ,  H01L21/321

Abstract: A method of manufacturing a display and a chemical mechanical polishing method which employ a chemical mechanical polishing apparatus that includes a conveyor belt to transfer a substrate, a polishing head disposed on the conveyor belt, and a body part which moves the polishing head and supplies a slurry to the polishing head. The polishing head includes a first polishing part including a first polishing pad surrounding a first slurry outlet, and a second polishing part surrounding the first polishing part and including a second polishing pad. A second slurry outlet is formed between the first polishing part and the second polishing part, and the first polishing part and the second polishing part are movable independently of each other in a direction substantially perpendicular to the substrate.

公开(公告)号：US20150348782A1

公开(公告)日：2015-12-03

申请号：US14600113

申请日：2015-01-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byoung-Kwon CHOO ,  Sang-Hoon AHN ,  Byoung-Ho CHEONG ,  Joo-Woan CHO ,  Hyun-Jin CHO ,  Soo-Yeon HAN

IPC: H01L21/02 ,  H01L21/67

CPC classification number: H01L21/02683 ,  H01L21/02532 ,  H01L21/02686 ,  H01L21/02691 ,  H01L27/14698

Abstract: An apparatus for crystallizing an active layer of a thin film transistor, the apparatus includes a first laser irradiating a first beam toward a substrate, an amorphous layer on the substrate being crystallizable into the active layer of the thin film transistor by the first beam, and a second laser irradiating a second beam toward the substrate to heat the active layer, the second beam having an asymmetric intensity profile in a scanning direction of the first and second beams.

Abstract translation: 一种用于使薄膜晶体管的有源层结晶的装置，该装置包括：向基板照射第一光束的第一激光器，基板上的非晶层通过第一光束可结晶到薄膜晶体管的有源层中;以及 将第二光束照射到所述基板以加热所述有源层的第二激光器，所述第二光束在所述第一和第二光束的扫描方向上具有不对称的强度分布。

公开(公告)号：US20140179044A1

公开(公告)日：2014-06-26

申请号：US14193227

申请日：2014-02-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyu-Sik CHO ,  Joon-Hoo CHOI ,  Byoung-Kwon CHOO ,  Min-Chul SHIN ,  Tae-Hoon YANG ,  Won-Kyu LEE ,  Yun-Gyu LEE ,  Bo-Kyung CHOI ,  Yong-Hwan PARK ,  Sang-Ho MOON

IPC: H01L51/56 ,  H01L27/32

CPC classification number: H01L51/56 ,  H01L27/1255 ,  H01L27/1288 ,  H01L27/3262 ,  H01L27/3265

Abstract: An OLED display includes a first polysilicon layer pattern on a substrate having a first gate electrode, a second gate electrode, and a first capacitor electrode, a gate insulating layer pattern, a second polysilicon layer pattern including a first active layer, a second active layer, and a capacitor polycrystalline dummy layer, a third amorphous silicon layer pattern including first source and drain resistant contact layers on a predetermined region of the first active layer, second source and drain resistant contact layers on a predetermined region of the second active layer, and a capacitor amorphous dummy layer on the capacitor polycrystalline dummy layer, and a data metal layer pattern including first source/drain electrodes, second source/drain electrodes, and a second capacitor electrode.

Abstract translation: OLED显示器包括在具有第一栅电极，第二栅极和第一电容器电极的基板上的第一多晶硅层图案，栅极绝缘层图案，包括第一有源层的第二多晶硅层图案，第二有源层 以及电容器多晶虚拟层，在第一有源层的预定区域上包括第一源极和漏极接触层的第三非晶硅层图案，在第二有源层的预定区域上的第二源极和漏极接触层，以及 电容器多晶虚拟层上的电容器非晶虚拟层，以及包括第一源极/漏极，第二源极/漏极和第二电容器电极的数据金属层图案。