LASER APPARATUS AND METHOD OF IRRADIATING LASER BEAM USING THE SAME
    1.
    发明申请
    LASER APPARATUS AND METHOD OF IRRADIATING LASER BEAM USING THE SAME 审中-公开
    激光装置和使用其激光束的辐射方法

    公开(公告)号:US20140360987A1

    公开(公告)日:2014-12-11

    申请号:US14291711

    申请日:2014-05-30

    CPC classification number: B23K26/0876 B23K26/0853

    Abstract: A laser apparatus includes: a laser which selectively irradiates a laser beam to a portion of a target based on a laser driving voltage, where an intensity of the laser beam is substantially stabilized within about 10 nanoseconds; a stage which controls a relative location between the target and the laser based on a stage driving voltage; and a controller which applies the stage driving voltage to the stage, and applies the laser driving voltage to the laser

    Abstract translation: 激光装置包括:激光器,其基于激光驱动电压选择性地将激光束照射到目标的一部分,其中激光束的强度基本上稳定在约10纳秒内; 基于舞台驱动电压控制目标和激光之间的相对位置的阶段; 以及将舞台驱动电压施加到舞台上并将激光驱动电压施加到激光器的控制器

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