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    LASER SYSTEM
    1.
    发明申请
    LASER SYSTEM 审中-公开
    激光系统

    公开(公告)号：US20170063024A1

    公开(公告)日：2017-03-02

    申请号：US15350277

    申请日：2016-11-14

    Applicant: Gigaphoton Inc.

    Inventor： Kouji KAKIZAKI ,  Takashi MATSUNAGA ,  Masaki ARAKAWA ,  Osamu WAKABAYASHI

    IPC: H01S3/13 ,  H01L21/02 ,  H01L21/67 ,  H01S3/23 ,  H01S3/139

    CPC classification number: H01S3/09702 ,  B23K26/00 ,  B23K26/0608 ,  H01L21/02686 ,  H01L21/67115 ,  H01S3/0057 ,  H01S3/104 ,  H01S3/1305 ,  H01S3/1394 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2383

    Abstract: The laser system may include a first laser apparatus configured to emit a first pulse laser beam, a second laser apparatus configured to emit a second pulse laser beam, a timing detector, and a controller. The timing detector may be configured to detect a first passage timing at which the first pulse laser beam passes a first position and a second passage timing at which the second pulse laser beam passes a second position. The controller may be configured to control a first trigger timing for the first laser apparatus to emit the first pulse laser beam and a second trigger timing for the second laser apparatus to emit the second pulse laser beam based on the first passage timing and the second passage timing.

    Abstract translation: 激光系统可以包括被配置为发射第一脉冲激光束的第一激光装置，被配置为发射第二脉冲激光束的第二激光装置，定时检测器和控制器。 定时检测器可以被配置为检测第一脉冲激光束通过第一位置的第一通过定时和第二脉冲激光束通过第二位置的第二通过定时。 控制器可以被配置为控制第一激光装置发射第一脉冲激光束的第一触发时序和用于第二激光装置基于第一通过定时和第二通道发射第二脉冲激光束的第二触发时序 定时。

    LASER DEVICE
    3.
    发明申请
    LASER DEVICE 审中-公开

    公开(公告)号：US20170338620A1

    公开(公告)日：2017-11-23

    申请号：US15669218

    申请日：2017-08-04

    Applicant: Gigaphoton Inc.

    Inventor： Masaki ARAKAWA ,  Kouji KAKIZAKI ,  Osamu WAKABAYASHI

    IPC: H01S3/23 ,  H01S3/097 ,  H01S3/038 ,  H01S3/225 ,  H01S3/034

    Abstract: A laser device may include: a master oscillator including a first laser chamber, a first pair of discharge electrodes provided in the first laser chamber, and an optical resonator, the master oscillator being configured to output a laser beam; a first amplifier including a second laser chamber provided in an optical path of the laser beam outputted from the master oscillator and a second pair of discharge electrodes provided in the second laser chamber at a first gap distance, the first amplifier being configured to amplify the laser beam; and a first beam-adjusting optical system provided in an optical path of the laser beam between the master oscillator and the first amplifier, the first beam-adjusting optical system being configured to adjust the laser beam outputted from the master oscillator such that a beam width of the laser beam entering the first amplifier measured in a direction of electric discharge between the second pair of discharge electrodes is substantially equal to the first gap distance between the second pair of discharge electrodes.

    LASER SYSTEM
    5.
    发明申请
    LASER SYSTEM 审中-公开
    激光系统

    公开(公告)号：US20170063025A1

    公开(公告)日：2017-03-02

    申请号：US15353235

    申请日：2016-11-16

    Applicant: Gigaphoton Inc.

    Inventor： Osamu WAKABAYASHI ,  Masaki ARAKAWA ,  Kouji KAKIZAKI

    IPC: H01S3/13 ,  G01J1/42 ,  H01S3/00 ,  H01S3/23 ,  H01S3/139

    CPC classification number: H01S3/1305 ,  G01J1/4257 ,  G01J2001/4261 ,  H01S3/0014 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/1394 ,  H01S3/225 ,  H01S3/2383

    Abstract: The laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled pulse laser beam, and a beam parameter measuring device provided in an optical path of the bundled pulse laser beam to measure a beam parameter of each one of the pulse laser beams and a beam parameter of the bundled pulse laser beam.

    Abstract translation: 激光系统可以包括多个激光装置，束传送装置，其配置为捆扎从多个激光装置的各个激光装置发射的脉冲激光束以发射捆扎的脉冲激光束;以及光束参数测量装置，其设置在光学 束脉冲激光束的路径，以测量每一个脉冲激光束的光束参数和束脉冲激光束的光束参数。

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