公开(公告)号：US20170062263A1

公开(公告)日：2017-03-02

申请号：US14842003

申请日：2015-09-01

申请人： Boris Kesil ,  Elik Gershenzon

发明人： Boris Kesil ,  Elik Gershenzon

IPC分类号： H01L21/683 ,  B25J15/06 ,  H01L21/687 ,  B25J13/08 ,  H01L21/67 ,  B25J15/00 ,  B25J9/16

CPC分类号： H01L21/6838 ,  B25J15/0616 ,  H01L21/67259 ,  H01L21/67294 ,  H01L21/68707 ,  H01L21/68735

摘要： Proposed is a universal gripping and suction chuck for use as an interchangeable end effector of a robot arm of a robotic station capable of picking up, transporting, and handling objects having colors and outlines. The chuck housing contains elements of a vacuum system for holding the object by vacuum suction force, a vortex system for holding the objects in a non-contact manner in a state of levitation, and a mechanical edge gripper. The vacuum system, the vortex system, and the mechanical edge gripper can be selectively activated by commands from the central processing system that receives a signal recognition signal, object presence/absence signal and/or object approaching signal from respective sensors and depending on the type of the object recognized by the respective sensor. As a result, the chuck can pick up and handle such different objects as solid semiconductor wafer, paper or fabric interleaves, or small-diameter rings.

摘要翻译： 提出了一种通用夹紧和吸力卡盘，用作能够拾取，运输和处理具有颜色和轮廓的物体的机器人站的机器人手臂的可互换末端执行器。 卡盘壳体包含用于通过真空抽吸力保持物体的真空系统的元件，用于以悬浮状态非接触地保持物体的涡流系统和机械边缘夹持器。 真空系统，涡流系统和机械边缘夹具可以通过接收信号识别信号的中央处理系统的命令，来自各个传感器的对象存在/不存在信号和/或物体接近信号的命令来选择性地激活，并且根据类型 由相应传感器识别的物体。 结果，卡盘可以拾取和处理诸如固体半导体晶片，纸或织物交错或小直径环之类的不同物体。

公开(公告)号：US06815958B2

公开(公告)日：2004-11-09

申请号：US10359378

申请日：2003-02-07

申请人： Boris Kesil ,  Leonid Velikov ,  Yuri Vorobyev

发明人： Boris Kesil ,  Leonid Velikov ,  Yuri Vorobyev

IPC分类号： G01R2726

CPC分类号： G01B7/105

摘要： The invention relates to an apparatus and method for measuring thickness and deviations from the thickness of very thin conductive coatings on various non-conductive substrates, or of very thin non-conductive coatings on conductive substrates. The apparatus consists of an inductive coil having specific parameters, an external AC generator operating on frequencies, e.g., from 50 MHz to 2.5 GHz, preferably from 100 MHz to 200 MHz, and a measuring instrument, such as an oscilloscope, voltmeter, etc. for measuring output of the sensor. The coil has miniature dimensions. The invention is based on the principle that inductive coil of the sensor, active resistance of the coil winding, inherent capacitance of the inductive coil (or a separate capacitor built into the sensor's circuit), and the aforementioned AC generator form a parallel oscillating circuit. The apparatus operates on very high resonance frequencies, preferably within the range of 100 to 200 MHz, at which a capacitive coupling is established between the coil of the oscillating circuit and the thin films being measured. By measuring the parameters of the resonance oscillating circuit, it becomes possible to measure film thickness below 500 Angstroms.

公开(公告)号：US09911640B2

公开(公告)日：2018-03-06

申请号：US14842003

申请日：2015-09-01

申请人： Boris Kesil ,  Elik Gershenzon

发明人： Boris Kesil ,  Elik Gershenzon

IPC分类号： B25J15/06 ,  H01L21/687 ,  H01L21/683 ,  B25J15/00 ,  B25J9/16 ,  B25J13/08 ,  H01L21/67

CPC分类号： H01L21/6838 ,  B25J15/0616 ,  H01L21/67259 ,  H01L21/67294 ,  H01L21/68707 ,  H01L21/68735

摘要： Proposed is a universal gripping and suction chuck for use as an interchangeable end effector of a robot arm of a robotic station capable of picking up, transporting, and handling objects having colors and outlines. The chuck housing contains elements of a vacuum system for holding the object by vacuum suction force, a vortex system for holding the objects in a non-contact manner in a state of levitation, and a mechanical edge gripper. The vacuum system, the vortex system, and the mechanical edge gripper can be selectively activated by commands from the central processing system that receives a signal recognition signal, object presence/absence signal and/or object approaching signal from respective sensors and depending on the type of the object recognized by the respective sensor. As a result, the chuck can pick up and handle such different objects as solid semiconductor wafer, paper or fabric interleaves, or small-diameter rings.

公开(公告)号：US20110068807A1

公开(公告)日：2011-03-24

申请号：US12887887

申请日：2010-09-22

申请人： Boris Kesil ,  Yury Nikolenko

发明人： Boris Kesil ,  Yury Nikolenko

IPC分类号： G01R27/04

CPC分类号： G01N27/023

摘要： Devices and methods of the invention can be used in many industries, including: utilities, agriculture, food, textile, pharmaceutical, photovoltaic and semiconductor, medical devices, chemical and petro-chemical, material science, and defense, where monitoring and/or analysis of various properties of materials are desired.

摘要翻译： 本发明的装置和方法可用于许多行业，包括：公用事业，农业，食品，纺织，制药，光伏和半导体，医疗器械，化学和石油化工，材料科学和国防，其中监测和/或分析 需要材料的各种性质。

公开(公告)号：US20090200250A1

公开(公告)日：2009-08-13

申请号：US12012984

申请日：2008-02-07

申请人： Boris Kesil

发明人： Boris Kesil

IPC分类号： H01L21/673

CPC分类号： H01L21/67373 ,  H01L21/67366

摘要： A wafer container made from a polymer material with inner walls of the container coated with a thin easily washable wear-resistant and scratch-resistant barrier layer of SiO2 for preventing penetration of products of diffusion of polymers, such as free radicals, into the interior space of the carrier that retains a wafer. The SiO2 coatings on the walls of the container are applied by the PECVD process. The wafer container of the invention can be manufactured at low cost by molding it from a less expensive and lower grade polymer.

摘要翻译： 由聚合物材料制成的晶片容器，其容器的内壁涂有薄的易于洗涤的耐磨和耐刮擦的SiO 2阻挡层，用于防止聚合物如自由基扩散产物渗入内部空间 的保持晶片的载体。 通过PECVD工艺施加容器壁上的SiO 2涂层。 本发明的晶片容器可以通过从较便宜和较低级别的聚合物成型而以低成本制造。

公开(公告)号：US10099384B1

公开(公告)日：2018-10-16

申请号：US15721827

申请日：2017-09-30

申请人： Boris Kesil ,  Elik Gershenzon

发明人： Boris Kesil ,  Elik Gershenzon

IPC分类号： B25J15/00 ,  B25J15/02

摘要： An industrial wedge-type gripper mechanism for gripping or releasing objects that has a housing with a piston of a pneumatic cylinder moveable in the housing in longitudinal direction of the housing and a plurality of gripper jaw holders that slide in the housing in a radial or transverse direction and that support the gripper jaws. The gripper jaw holders have inclined slots, and the piston of the pneumatic cylinder is associated with a member that supports rolling bearings rolling and sliding in the inclined slots so that with reciprocations of the piston the rolling bearings exert a camming or wedging action on the walls of the inclined slots and thus cause the gripper jaw holders and thus the gripper jaws to perform gripping or releasing action on the objects.

公开(公告)号：US08547110B2

公开(公告)日：2013-10-01

申请号：US12887887

申请日：2010-09-22

申请人： Boris Kesil ,  Yury Nikolenko

发明人： Boris Kesil ,  Yury Nikolenko

IPC分类号： G01R27/04

CPC分类号： G01N27/023

摘要： Devices and methods of the invention can be used in many industries, including, but not limited to, utilities, agriculture, food, textile, pharmaceutical, photovoltaic and semiconductor, medical devices, chemical and petro-chemical, material science, and defense, where monitoring and/or analysis of various properties of materials are desired. Sensors and methods of using same are provided for measuring at least one impedance of an object under test (or a tested object) at a predetermined frequency and/or a predetermined frequency range, particularly where resonance conditions are provided for such measurement.

摘要翻译： 本发明的装置和方法可用于许多行业，包括但不限于公用设施，农业，食品，纺织，制药，光电和半导体，医疗器械，化学和石油化工，材料科学和防御，其中 期望材料的各种性质的监测和/或分析。 提供了使用它们的传感器和方法，用于以预定的频率和/或预定的频率范围，特别是在为这种测量提供共振条件时测量被测物体（或被测物体）的至少一个阻抗。

公开(公告)号：US20070018469A1

公开(公告)日：2007-01-25

申请号：US11188249

申请日：2005-07-25

申请人： Elik Gershenzon ,  Boris Kesil

发明人： Elik Gershenzon ,  Boris Kesil

IPC分类号： B65G49/07

CPC分类号： H01L21/68707

摘要： A wafer gripping mechanism of the invention comprises a thin flat body having one linearly moveable and rotating finger for gripping an edge of the flat object and a pair of soft withdrawable object supporting pads. A distinguishing feature of the mechanism of the invention is that the wafer supporting pads are withdrawable for placing the pads into position where they do not project beyond the outlines of the external surface of the insertable portion of the gripper. The absence of elements projecting from the surface of the gripper portion insertable into narrow spaces with high speed protects the gripping mechanism, wafer, chuck, etc. from damage due to possible collision. All the drive and actuation mechanisms that are used for rotation and axial movement of the gripping finger, as well as for rotation of the withdrawable pads are enclosed in a thin hollow casing made from a thin and light-weight sheet metal.

摘要翻译： 本发明的晶片夹持机构包括具有一个可直线移动和旋转的指状物的薄平坦体，用于夹持平坦物体的边缘和一对软抽出物体支撑垫。 本发明的机构的一个突出特征在于，晶片支撑垫是可取出的，用于将垫放置在不突出超过夹持器的可插入部分的外表面的轮廓的位置。 没有从夹持部的表面突出的元件能够高速插入狭窄的空间中，因此能够保护夹持机构，晶片，卡盘等免受可能的碰撞的损坏。 用于夹紧手指的旋转和轴向移动以及用于可抽出的垫的旋转的所有驱动和致动机构被封闭在由薄而轻的金属板制成的薄的中空套管中。

公开(公告)号：US06891380B2

公开(公告)日：2005-05-10

申请号：US10449892

申请日：2003-06-02

申请人： Boris Kesil ,  Leonid Velikov ,  Yuri Vorobyev

发明人： Boris Kesil ,  Leonid Velikov ,  Yuri Vorobyev

IPC分类号： G01B7/06 ,  G01R27/04 ,  G01R27/32 ,  G01R33/12

CPC分类号： G01B7/105

摘要： The system of the invention for measuring characteristics of thin conductive and non-conductive material, such as bulk material or films, is based on the use of a resonance oscillating circuit that incorporates at least two components selected from the group consisting of an inductive coil and a capacitor, which in combination form a sensor that could be approached close to the surface to be measured. The measurement of the film or material characteristics, such as film resistance (film thickness) or a dielectric constant (film thickness) of a non-conductive material, is based on the principle that the sensor is approached to the measured surface at a distance, at which the inductance and capacitance of the sensor generate in the measured material a virtual coil and an additional capacitance, which strongly depend on the characteristics of the measured material. As the sensor approached towards the surface to be measured, the sensor-material system generates a series of resonances having different values of power. One of these resonances can be defined as the so-called full resonance, which is characterized by the maximum value of the power, and hence provides the most accurate measurement and can be used for precisely determining the measurement distance. By comparing the results of measurements with those known from measuring the precalibrated films or materials under the same conditions, it becomes possible to determine the target characteristics of the films or materials.

摘要翻译： 用于测量薄导电和非导电材料（例如散装材料或薄膜）的特性的本发明的系统基于使用谐振振荡电路，该谐振振荡电路并入至少两个选自由感应线圈和 电容器组合形成可以接近待测表面的传感器。 不导电材料的薄膜或材料特性，如薄膜电阻（薄膜厚度）或介电常数（薄膜厚度）的测量是基于传感器距离被测表面接近的原理， 传感器的电感和电容在测量材料中产生虚拟线圈和附加电容，这强烈依赖于测量材料的特性。 当传感器靠近要测量的表面时，传感器材料系统产生具有不同功率值的一系列谐振。 这些共振中的一个可以被定义为所谓的全共振，其特征在于功率的最大值，因此提供最精确的测量并且可以用于精确地确定测量距离。 通过将测量结果与在相同条件下测量预校准的膜或材料已知的结果进行比较，可以确定膜或材料的目标特性。

公开(公告)号：US06831287B2

公开(公告)日：2004-12-14

申请号：US09976890

申请日：2001-10-15

申请人： Boris Kesil ,  David Margulis ,  Elik Gershenzon

发明人： Boris Kesil ,  David Margulis ,  Elik Gershenzon

IPC分类号： G01N2186

CPC分类号： H01L21/68707 ,  H01L21/67763

摘要： The invention describes an apparatus for preventing gripping of objects having wrong dimensions or orientation. The apparatus comprises a part handler, e.g., a holder for parts to be treated in a chemical reactor, where the parts has to be transferred from a working position to a temporary storage. The holder may have different shapes, e.g., rectangular, elliptical, or circular, and is provided with positioning openings or recesses for engagement with pins or semispherical elements on the engaging surface of the part handler. The apparatus is provided with at least two through beam optical sensor units with adjustable divergence of the light beams emitted from the light emitting to the light-receiving element. The sensor units are located near the edge area of the holder. Position of the holder for aligning with the part handler is determined by combined interaction of the holder edge with the sensor units so that, depending on overlapping of one or two sensors and on the position of the overlapped zone, the apparatus determines whether or not the holder is aligned with the part handler or the gripping operation has to be rejected. In another embodiment the apparatus is equipped with three optical sensors, which simplify the control operation.

摘要翻译： 本发明描述了一种用于防止夹持具有错误尺寸或取向的物体的装置。 该装置包括部件处理器，例如用于在化学反应器中待处理的部件的保持器，其中部件必须从工作位置传送到临时存储器。 保持器可以具有不同的形状，例如矩形，椭圆形或圆形，并且设置有用于与零件处理器的接合表面上的销或半球形元件接合的定位开口或凹槽。 该装置设置有至少两个通过光束光学传感器单元，其具有从发光到光接收元件的光发射的可调发散光。 传感器单元位于支架边缘区域附近。 用于与零件处理器对准的保持器的位置通过保持器边缘与传感器单元的组合相互作用来确定，使得根据一个或两个传感器的重叠以及重叠区域的位置，装置确定是否 支架与零件处理器对齐或夹紧操作必须被拒绝。 在另一个实施例中，装置配备有三个光学传感器，这简化了控制操作。