公开(公告)号：US5272913A

公开(公告)日：1993-12-28

申请号：US724146

申请日：1991-07-01

申请人： Akitoshi Toda ,  Kaoru Tadokoro ,  Yasuji Nagata ,  Etsuo Shinohara ,  Yoshimitsu Enomoto ,  Michio Takayama ,  Ryo Ohta

发明人： Akitoshi Toda ,  Kaoru Tadokoro ,  Yasuji Nagata ,  Etsuo Shinohara ,  Yoshimitsu Enomoto ,  Michio Takayama ,  Ryo Ohta

IPC分类号： G01B21/30 ,  B81C1/00 ,  G01B5/28 ,  G01N27/00 ,  G01N37/00 ,  G01Q60/16 ,  G01Q70/10 ,  G01Q70/16 ,  H01J37/28 ,  H01L21/302

CPC分类号： G01Q70/16 ,  B82Y35/00 ,  G01Q70/02 ,  G01Q70/10 ,  Y10S977/878 ,  Y10S977/879

摘要： A cantilever for a scanning probe microscope comprises a lever section and a probe section disposed near the free end thereof. The probe section includes a conical distal end portion having a narrow point angle and a bulging proximal end portion continuous with the distal end portion. The cantilever is manufactured by utilizing a semiconductor process.

摘要翻译： 用于扫描探针显微镜的悬臂包括设置在其自由端附近的杆部和探针部。 探头部分包括具有窄点角度的锥形远端部分和与远端部分连续的凸出近端部分。 通过利用半导体工艺制造悬臂。

公开(公告)号：US5260824A

公开(公告)日：1993-11-09

申请号：US511054

申请日：1990-04-19

申请人： Takao Okada ,  Shuzo Mishima ,  Tsugiko Takase ,  Hirofumi Miyamoto ,  Hiroko Ohta ,  Yasushi Satoh ,  Yoshimitsu Enomoto ,  Toshiaki Matsuzawa ,  Yuzo Nakamura ,  Hiroshi Kajimura

发明人： Takao Okada ,  Shuzo Mishima ,  Tsugiko Takase ,  Hirofumi Miyamoto ,  Hiroko Ohta ,  Yasushi Satoh ,  Yoshimitsu Enomoto ,  Toshiaki Matsuzawa ,  Yuzo Nakamura ,  Hiroshi Kajimura

IPC分类号： G01B7/34 ,  G01B21/30 ,  G01L5/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/38 ,  G02B4/00 ,  G01B5/28 ,  G01N23/00

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q20/02 ,  G01Q30/025 ,  Y10S977/87

摘要： An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.