- 专利标题: Metal rail conductors for non-planar semiconductor devices
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申请号: US17068444申请日: 2020-10-12
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公开(公告)号: US11532751B2公开(公告)日: 2022-12-20
- 发明人: Chih-Liang Chen , Charles Chew-Yuen Young , Hui-Ting Yang , Jiann-Tyng Tzeng , Kam-Tou Sio , Shih-Wei Peng , Wei-Cheng Lin , Lei-Chun Chou
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/768 ; H01L21/8234 ; H01L23/48 ; H01L27/088 ; H01L29/66 ; H01L29/417 ; H01L21/74 ; H01L23/538 ; H01L21/3213 ; H01L23/528 ; H01L23/535
摘要:
The present disclosure describes various non-planar semiconductor devices, such as fin field-effect transistors (finFETs) to provide an example, having one or more metal rail conductors and various methods for fabricating these non-planar semiconductor devices. In some situations, the one or more metal rail conductors can be electrically connected to gate, source, and/or drain regions of these various non-planar semiconductor devices. In these situations, the one or more metal rail conductors can be utilized to electrically connect the gate, the source, and/or the drain regions of various non-planar semiconductor devices to other gate, source, and/or drain regions of various non-planar semiconductor devices and/or other semiconductor devices. However, in other situations, the one or more metal rail conductors can be isolated from the gate, the source, and/or the drain regions these various non-planar semiconductor devices. This isolation prevents electrical connection between the one or more metal rail conductors and the gate, the source, and/or the drain regions these various non-planar semiconductor devices.
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