- 专利标题: Vertical memory device and method of fabricating the same
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申请号: US15486681申请日: 2017-04-13
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公开(公告)号: US10586797B2公开(公告)日: 2020-03-10
- 发明人: Kyoung-hoon Kim , Hong-soo Kim
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Lee IP Law, P.C.
- 优先权: KR10-2016-0104982 20160818
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L27/105 ; H01L27/11573 ; H01L27/11575 ; H01L27/11582 ; G11C16/08 ; G11C16/28 ; H01L23/528 ; H01L29/78 ; G11C16/04 ; H01L27/11565
摘要:
A vertical memory device includes a substrate with a cell array region, a word line contact region, and a peripheral circuit region, gate electrodes parallel to the substrate in the cell array and word line contact regions, the gate electrodes being stacked and spaced apart in a direction perpendicular to the substrate, a channel structure through the gate electrodes in the cell array region, the channel structure being electrically connected to the substrate, a dummy channel structure through the gate electrodes in the word line contact region, the dummy channel structure being spaced apart from the substrate, and a conductive line parallel to the substrate and electrically connected to a first gate electrode, the conductive line crossing at least a portion of an extension of the dummy channel structure in the perpendicular direction.
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