Invention Grant
- Patent Title: Ion milling system
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Application No.: US15760994Application Date: 2015-09-25
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Publication No.: US10361065B2Publication Date: 2019-07-23
- Inventor: Kengo Asai , Toru Iwaya , Hisayuki Takasu , Hiroyasu Shichi
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Volpe and Koenig, P.C.
- International Application: PCT/JP2015/077095 WO 20150925
- International Announcement: WO2017/051469 WO 20170330
- Main IPC: H01J37/31
- IPC: H01J37/31 ; H01J37/28 ; H01J37/20 ; H01J37/09 ; H01J37/08 ; H01J37/305

Abstract:
To provide an ion milling system that can suppress an orbital shift of an observation electron beam emitted from an electron microscope column, the ion milling system includes: a Penning discharge type ion gun 100 that includes a permanent magnet 114 and that generates ions for processing a sample; and a scanning electron microscope for observing the sample, in which a magnetic shield 172 for reducing a leakage magnetic field from the permanent magnet 114 to the electron microscope column is provided.
Public/Granted literature
- US20180286633A1 ION MILLING SYSTEM Public/Granted day:2018-10-04
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