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公开(公告)号：US11923185B2
公开(公告)日：2024-03-05
申请号：US17837889
申请日：2022-06-10
申请人： KLA Corporation
发明人： Mark S. Wang , Joshua Wittenberg
摘要： A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.
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公开(公告)号：US11825588B2
公开(公告)日：2023-11-21
申请号：US17977870
申请日：2022-10-31
发明人： Rudi Blondia
摘要： An illumination source includes a laser driver unit configured to emit a plasma sustaining beam. An ingress collimator receives the plasma sustaining beam and produces a collimated ingress beam. A focusing optic receives the collimated ingress beam and produce a focused sustaining beam. A sealed lamp chamber contains an ionizable media that, once ignited, forms a high intensity light emitting plasma having a waist size smaller than 150 microns. The sealed lamp chamber further includes an ingress window configured to receive the focused sustaining beam and an egress window configured to emit the high intensity light. An ignition source is configured to ignite the ionizable media, and an exit fiber is configured to receive and convey the high intensity light. The high intensity light is white light with a black body spectrum, and the exit fiber has a diameter in the range of 200-500 micrometers.
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公开(公告)号：US20230164902A1
公开(公告)日：2023-05-25
申请号：US17977870
申请日：2022-10-31
发明人： Rudi Blondia
摘要： An illumination source includes a laser driver unit configured to emit a plasma sustaining beam. An ingress collimator receives the plasma sustaining beam and produces a collimated ingress beam. A focusing optic receives the collimated ingress beam and produce a focused sustaining beam. A sealed lamp chamber contains an ionizable media that, once ignited, forms a high intensity light emitting plasma having a waist size smaller than 150 microns. The sealed lamp chamber further includes an ingress window configured to receive the focused sustaining beam and an egress window configured to emit the high intensity light. An ignition source is configured to ignite the ionizable media, and an exit fiber is configured to receive and convey the high intensity light. The high intensity light is white light with a black body spectrum, and the exit fiber has a diameter in the range of 200-500 micrometers.
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公开(公告)号：US20220310379A1
公开(公告)日：2022-09-29
申请号：US17210048
申请日：2021-03-23
申请人： Hubbell Incorporated
发明人： Rajesh Balan , Jayaraj Ramasamy
IPC分类号： H01J61/54
摘要： An instant restrike igniter for use with a high-intensity discharge (HID) lamp and having a bleeder circuit including a resistor in parallel with a capacitor. The bleeder circuit in electrical communication with a voltage source. A transformer is in electrical communication with the bleeder circuit. The transformer includes a first winding that is in communication with and powers a lamp and a second winding. A triggering circuit is in electrical communication with the second winding of the transformer and the bleeder circuit. The triggering circuit has a minimum holding current of 50 mA and is configured to discharge the capacitor to generate high voltage pulses that are sent, via the transformer, to the lamp to reignite the lamp after a power interruption that extinguishes the lamp.
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公开(公告)号：US11373855B2
公开(公告)日：2022-06-28
申请号：US17397661
申请日：2021-08-09
发明人： Hideaki Yagyu
摘要： An excimer lamp includes a discharge vessel in which a rare gas and a halogen are enclosed. The excimer lamp also includes at least one first electrode and at least one second electrode for generating a dielectric barrier discharge inside the discharge vessel. The discharge vessel has a discharge forming region and a non-discharge region such that discharging takes place in the discharge forming region and no discharging takes place in the non-discharge region. The discharge forming region is formed between the first electrode(s) and the second electrode(s). The non-discharge region communicates with the discharge forming region. The excimer lamp satisfies a following equation: (Vb×Ph)/Sd≥4.50 where Vb [mm3] represents a space volume inside the discharge vessel, Sd [mm2] represents an inner surface area of the discharge vessel in the discharge forming region, and Ph [Torr] represents a halogen-atoms partial pressure enclosed in the discharge vessel.
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公开(公告)号：US11366066B2
公开(公告)日：2022-06-21
申请号：US16600363
申请日：2019-10-11
发明人： David W. Koppenaal , Ying Zhu , Edward D. Hoegg , R. Kenneth Marcus , Gordon A. Anderson , Chris Anderson , Tyler Williams
IPC分类号： G01N21/67 , H01J49/10 , H01J37/32 , G01N27/68 , G01N30/72 , G01N27/62 , H01J47/12 , H01J61/54
摘要： Apparatus include an atmospheric pressure glow discharge (APGD) analyte electrode defining an analyte discharge axis into an APGD volume, and a plurality of APGD counter electrodes having respective electrical discharge ends directed to the APGD volume, wherein the APGD analyte electrode and the APGD counter electrodes are configured to produce an APGD plasma in the APGD volume with a voltage difference between the APGD analyte electrode and one or more of the AGPD counter electrodes. An electrode can be integrated into an ion inlet. Apparatus can be configured to perform auto-ignition and/or provide multi-modal operation through selectively powering electrodes. Electrode holder devices are disclosed. Related methods are disclosed.
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公开(公告)号：US20220189759A1
公开(公告)日：2022-06-16
申请号：US17452559
申请日：2021-10-27
申请人： The Boeing Company
摘要： Modules, systems and methods that disinfect surfaces using ultraviolet (UV) light are disclosed. In one aspect, a UV light-emitting module comprises an enclosure comprising a rear wall and a face plate spaced from the rear wall and comprising a light-transmitting aperture. At least one sidewall extends between the rear wall and the face plate, and at least one UV light emitter is within the enclosure. A ventilation opening is located in one or more walls selected from (1) the rear wall and (2) the at least one sidewall.
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公开(公告)号：US11295946B2
公开(公告)日：2022-04-05
申请号：US17375680
申请日：2021-07-14
申请人： UNILAM CO., LTD.
发明人： Joo Young Yoon , Young Duk Ha , Eun Sik Kim , Hong Chae Jung , So Ree Kim
摘要： A triple tube type excimer lamp according to an embodiment of the present invention includes a discharge unit which includes an outer tube having an external electrode on an outer circumferential surface thereof, an inner tube having the same axis as the outer tube, inserted into the outer tube, and having an internal electrode on an inner surface thereof, and one pair of assembly tubes respectively disposed on both sides of the inner tube, and configured to generate light by discharge, a cover tube having a shape surrounding an outer side of the outer tube; and one pair of bases respectively coupled with the one pair of assembly tubes and respectively sealed with both ends of the cover tube.
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公开(公告)号：US10446397B2
公开(公告)日：2019-10-15
申请号：US15297213
申请日：2016-10-19
发明人： Takayuki Aoyama , Hikaru Kawarazaki
IPC分类号： H01L21/225 , H01L21/324 , H01L21/67 , H01L21/268 , H01L29/16 , H01J61/54 , H05B41/34 , H01L29/78
摘要： When an insulated gate bipolar transistor is incorporated in a drive circuit of a flash lamp, so that a light emission pattern of the flash lamp is freely defined, a temperature change pattern of a surface of a semiconductor wafer that receives the emission of flash light can be adjusted. The length of diffusion of impurities can be controlled by rising a surface temperature of the semiconductor wafer from a preheating temperature to a diffusion temperature through emission of flash light and maintaining the surface temperature at the diffusion temperature for a time period not shorter than 1 millisecond and not longer than 10 milliseconds. Subsequently, the impurities can be activated by rising the surface temperature of the semiconductor wafer from the diffusion temperature to an activation temperature.
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公开(公告)号：US10325769B2
公开(公告)日：2019-06-18
申请号：US15533643
申请日：2015-12-04
摘要： The invention describes a gas-discharge lamp comprising an inner vessel enclosing a pair of electrodes separated by a gap; and an outer vessel enclosing the inner vessel; and wherein the lamp comprises a lateral stripe arranged on the surface of a vessel such that the lateral stripe lies below a horizontal plane through a longitudinal axis through the center of the lamp, and wherein the lateral stripe extends essentially only over a region corresponding to the gap between the electrodes.
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