- Patent Title: Method of fabricating a high-pressure laser-sustained-plasma lamp
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Application No.: US17837889Application Date: 2022-06-10
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Publication No.: US11923185B2Publication Date: 2024-03-05
- Inventor: Mark S. Wang , Joshua Wittenberg
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J9/26
- IPC: H01J9/26 ; H01J9/24 ; H01J61/54

Abstract:
A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.
Public/Granted literature
- US20220406553A1 METHOD OF FABRICATING A HIGH-PRESSURE LASER-SUSTAINED-PLASMA LAMP Public/Granted day:2022-12-22
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