公开(公告)号：US11003080B2

公开(公告)日：2021-05-11

申请号：US16138142

申请日：2018-09-21

Applicant: Applied Materials, Inc.

Inventor： Kartik Ramaswamy ,  Srinivas D. Nemani

IPC: G03F7/20 ,  G03F7/26 ,  H01J11/22 ,  H01J11/32 ,  H01J37/32 ,  H05H1/48 ,  H05H1/24

Abstract: A method and apparatus disclosed herein apply to processing a substrate, and more specifically to a method and apparatus for improving photolithography processes. The apparatus includes a chamber body, a substrate support disposed within the chamber body, and an electrode assembly. The substrate support has a top plate disposed above the substrate support, a bottom plate disposed below the substrate support, and a plurality of electrodes connecting the top plate to the bottom plate. A voltage is applied to the plurality of electrodes to generate an electric field. Methods for exposing a photoresist layer on a substrate to an electric field are also disclosed herein.

公开(公告)号：US20050264197A1

公开(公告)日：2005-12-01

申请号：US11130172

申请日：2005-05-17

Applicant: Masaki Yoshinari ,  Takashi Yamada ,  Yoichi Okumura ,  Tasuku Ishibashi

Inventor： Masaki Yoshinari ,  Takashi Yamada ,  Yoichi Okumura ,  Tasuku Ishibashi

IPC: H01J11/12 ,  H01J11/14 ,  H01J11/16 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/40 ,  H01J11/42 ,  H01J17/49

CPC classification number: H01J11/12 ,  H01J11/16 ,  H01J11/36 ,  H01J2211/326 ,  H01J2211/366

Abstract: A front and back glass substrates are placed on either side of a discharge spaces. A plurality of sustain electrode pairs extend in a row direction and are regularly arranged in a column direction on the front glass substrate. A dielectric layer covering the sustain electrode pairs is formed on the front glass substrate. A plurality of address electrodes initiating a discharge in conjunction with the sustain electrodes in each discharge cell formed in the discharge space extend in the column direction and are regularly arranged in the row direction. A first metallic partition wall unit defining the discharge cells is formed on the front glass substrate. A second metallic partition wall unit defining the discharge cells adjoined to the first partition wall unit is formed on the back glass substrate.

Abstract translation: 前后玻璃基板放置在放电空间的两侧。 多个维持电极对沿行方向延伸并且在前玻璃基板上沿列方向规则地排列。 覆盖维持电极对的电介质层形成在前玻璃基板上。 在放电空间中形成的各个放电单元中，与维持电极一起开始放电的多个寻址电极在列方向上延伸并且沿行方向规则地排列。 在前玻璃基板上形成限定放电单元的第一金属隔壁单元。 在后玻璃基板上形成限定与第一分隔壁单元相邻的放电单元的第二金属隔壁单元。

公开(公告)号：US20050258754A1

公开(公告)日：2005-11-24

申请号：US11128361

申请日：2005-05-13

Applicant: Jae-Ik Kwon ,  Kyoung-Doo Kang

Inventor： Jae-Ik Kwon ,  Kyoung-Doo Kang

IPC: H01J11/12 ,  H01J11/14 ,  H01J11/16 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/40 ,  H01J11/42 ,  H01J17/49

CPC classification number: H01J11/24 ,  H01J11/16 ,  H01J11/38 ,  H01J2211/245

Abstract: A plasma display panel includes a front substrate, a back substrate facing the front substrate, and a plurality of discharge cells between the front substrate and the back substrate. Pairs of discharge electrodes oppose each other in a discharge cell to make a plasma discharge occur in the discharge cell, dielectric layers cover each pair of discharge electrodes, and a thickness of the dielectric layers covering the pairs of discharge electrodes is not uniform.

Abstract translation: 等离子体显示面板包括前基板，与前基板相对的背面基板以及前基板与后基板之间的多个放电单元。 一对放电电极在放电单元中彼此相对以在放电单元中发生等离子体放电，电介质层覆盖每对放电电极，并且覆盖一对放电电极的电介质层的厚度不均匀。

公开(公告)号：US20050258748A1

公开(公告)日：2005-11-24

申请号：US11117576

申请日：2005-04-29

Applicant: Kyoung-Doo Kang ,  Won-Ju Yi

Inventor： Kyoung-Doo Kang ,  Won-Ju Yi

IPC: H01J11/12 ,  H01J11/16 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/40 ,  H01J11/42 ,  H01J17/49

CPC classification number: H01J11/24 ,  H01J11/16 ,  H01J2211/245

Abstract: A Plasma Display Panel (PDP) includes: a first substrate; a second substrate facing the first substrate; first barrier ribs, formed of a dielectric material and arranged between the first and second substrates, the first barrier ribs defining discharge cells with the first and second substrates; a phosphor layer arranged in the discharge cells; upper discharge electrodes arranged in the first barrier ribs and extending to surround the discharge cells; and lower discharge electrodes arranged in the first barrier ribs to be separated from the upper discharge electrodes, and extending to surround the discharge cells; wherein at least one of the upper and lower discharge electrodes includes discharge units that are respectively divided into plural pieces separated from each other to surround the discharge cells, and connection units electrically connecting the discharge units that respectively surround the neighboring discharge cells.

Abstract translation: 等离子体显示面板（PDP）包括：第一基板; 面对所述第一基板的第二基板; 第一阻挡肋，由电介质材料形成并且布置在第一和第二基板之间，第一阻挡肋用第一和第二基板限定放电单元; 布置在放电单元中的荧光体层; 上放电电极布置在第一阻挡肋中并且延伸以围绕放电单元; 并且布置在所述第一阻挡肋中的放电电极与所述上放电电极分离，并且延伸以围绕所述放电单元; 其特征在于，所述上下放电电极中的至少一个包括分别分离成多个分隔开的放电单元的放电单元，以及连接单元，电连接分别围绕相邻的放电单元的放电单元。

公开(公告)号：US20050253516A1

公开(公告)日：2005-11-17

申请号：US11127369

申请日：2005-05-11

Applicant: Jae-Ik Kwon ,  Kyoung-Doo Kang

Inventor： Jae-Ik Kwon ,  Kyoung-Doo Kang

IPC: H01J11/12 ,  H01J11/16 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J17/49

CPC classification number: H01J11/12 ,  H01J11/24 ,  H01J11/36 ,  H01J2211/245 ,  H01J2211/365

Abstract: A plasma display panel to prevent misdischarge in a non-discharge region. The plasma display panel includes a first substrate and a second substrate facing the first substrate. A plurality of display electrodes are formed extending on the first substrate, and a plurality of address electrodes are formed extending on the second substrate and cross the display electrodes. Barrier ribs including a plurality of barrier rib members are positioned between the first substrate and the second substrate, and form a plurality of discharge cells and non-discharge regions. A phosphor is formed inside each of the discharge cells. Each of the non-discharge regions includes one of exposure regions where a part of one of the display electrodes is exposed. The exposure regions are placed alternately in an extending direction of the display electrodes.

Abstract translation: 一种用于防止非放电区域中的放电的等离子体显示面板。 等离子体显示面板包括第一基板和面向第一基板的第二基板。 形成在第一基板上延伸的多个显示电极，并且形成在第二基板上延伸并跨越显示电极的多个寻址电极。 包括多个隔壁构件的阻挡肋位于第一基板和第二基板之间，并且形成多个放电单元和非放电区域。 在每个放电单元内形成荧光体。 每个非放电区域包括暴露一个显示电极的一部分的曝光区域中的一个。 曝光区域交替地放置在显示电极的延伸方向上。

公开(公告)号：US20050140589A1

公开(公告)日：2005-06-30

申请号：US10998469

申请日：2004-11-29

Applicant: Jeong-Doo Yi ,  Jeong-Nam Kim ,  Tae-Woo Kim ,  Joon-Yeon Kim ,  Su-Yong Chae

Inventor： Jeong-Doo Yi ,  Jeong-Nam Kim ,  Tae-Woo Kim ,  Joon-Yeon Kim ,  Su-Yong Chae

IPC: G09G3/20 ,  G09G3/288 ,  G09G3/291 ,  G09G3/292 ,  G09G3/293 ,  G09G3/294 ,  G09G3/298 ,  H01J11/12 ,  H01J11/14 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  G09G3/28

CPC classification number: G09G3/2927 ,  G09G3/293 ,  G09G3/294 ,  G09G3/2986 ,  G09G2300/04 ,  G09G2310/066 ,  G09G2320/0228

Abstract: A plasma display and driving method thereof. A median electrode is formed between X and Y electrodes for receiving sustain pulse voltages, and a reset waveform and a scan pulse voltage are applied to the median electrode. A short gap discharge is performed between the X electrode and the median electrode during the initial interval of a sustain interval, and a long gap discharge is performed between the X and Y electrodes during the normal sustain interval to thus perform a stable discharge. The X and Y electrode drivers are realized through comparable circuits since the waveforms applied to the X and Y electrodes are substantially symmetric.

Abstract translation: 等离子体显示及其驱动方法。 在X和Y电极之间形成用于接收维持脉冲电压的中间电极，并且复位波形和扫描脉冲电压施加到中值电极。 在维持间隔的初始间隔期间，在X电极和中间电极之间进行短间隙放电，并且在正常维持间隔期间在X电极和Y电极之间进行长间隙放电，从而进行稳定放电。 X和Y电极驱动器通过可比较的电路实现，因为施加到X和Y电极的波形基本上是对称的。

公开(公告)号：US06870316B2

公开(公告)日：2005-03-22

申请号：US09816328

申请日：2001-03-26

Applicant: Ko Sano ,  Kazutoshi Morikawa

Inventor： Ko Sano ,  Kazutoshi Morikawa

IPC: H01J11/12 ,  H01J11/14 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/42 ,  H01J11/02 ,  H01J11/00

CPC classification number: H01J11/36 ,  H01J11/12 ,  H01J11/24 ,  H01J2211/245 ,  H01J2211/365

Abstract: A plasma display apparatus includes a plurality of display element electrodes each constituted of a pair of electrode segments having linear edges opposing each other, with a predetermined distance provided therebetween, the width of each of the electrode segments becoming narrower in the direction away from the associated one of the linear edges. The plasma display apparatus also includes a barrier structure, the inner surfaces of which being disposed along the outer ends of the plurality of display element electrodes and thereby defining a plurality of cells each of which is to be activated by the associated one of the plurality of display element electrodes so as to emit light. In the plasma display apparatus, ultraviolet rays caused by a discharge are efficiently transmitted to phosphor members on the surfaces of cells to emit light with a reduced loss of energy.

公开(公告)号：US20050023978A1

公开(公告)日：2005-02-03

申请号：US10929541

申请日：2004-08-31

Applicant: Akifumi Okigawa ,  Toshihiro Yoshioka

Inventor： Akifumi Okigawa ,  Toshihiro Yoshioka

IPC: H01J9/02 ,  H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/28 ,  H01J11/32 ,  H01J11/34 ,  H01J17/04 ,  H01J17/49 ,  H01J1/00

CPC classification number: H01J11/12 ,  H01J9/02 ,  H01J11/24 ,  H01J11/32 ,  H01J2211/245 ,  H01J2211/323

Abstract: A plasma display panel having a plurality of surface discharge electrode pairs formed in a column direction at predetermined intervals, each surface discharge electrode pair having a pair of sustaining electrodes extending in a row direction so that a discharge gap is put between the sustaining electrodes. Each sustaining electrode is made up of a transparent conductive thin film, is provided with a main electrode portion formed in stripe shapes so as to face the discharge gap and a metal film of which a width is narrower than a width of the main electrode portion, and a sub-electrode portion formed at a side opposite to the discharge gap side of the main electrode portion which corresponds. With this configuration, a high image quality and a low power consumption can be obtained.

Abstract translation: 一种等离子体显示面板，具有以规定间隔在列方向上形成的多个表面放电电极对，每个表面放电电极对具有沿行方向延伸的一对维持电极，使得放电间隙放置在维持电极之间。 每个维持电极由透明导电薄膜构成，设有形成条状的主电极部分，以面对放电间隙，宽度比主电极部分的宽度窄的金属膜， 以及副电极部分，形成在与主电极部分的放电间隙侧相对的一侧。 利用这种配置，可以获得高图像质量和低功耗。

公开(公告)号：US06157354A

公开(公告)日：2000-12-05

申请号：US24403

申请日：1998-02-17

Applicant: Kimio Amemiya

Inventor： Kimio Amemiya

IPC: H01J11/12 ,  H01J11/14 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/28 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/42 ,  G09G3/28

CPC classification number: H01J11/12 ,  H01J11/24 ,  H01J11/32 ,  H01J2211/245 ,  H01J2211/323

Abstract: A surface-discharge type plasma display panel, comprises: a plurality of displaying lines each including a first maintaining electrode and a second maintaining electrode, forming a discharging gap therebetween; and a dielectric layer coverring the first and second maintaining electrodes. A mutual positional relationship between a first maintaining electrode and a second maintaining electrode is alternatively changed from one displaying line to another. Each first maintaining electrode and/or each second maintaining electrode are constructed in a manner such that two adjacent maintaining electrodes are electrically connected to each other through at least one connecting means.

Abstract translation: 一种表面放电型等离子体显示面板，包括：多个显示线，每条显示线包括第一维持电极和第二维持电极，在其间形成放电间隙; 以及覆盖第一和第二维持电极的电介质层。 第一维持电极和第二维持电极之间的相互位置关系交替地从一个显示线改变为另一个。 每个第一保持电极和/或每个第二保持电极以这样的方式构造，使得两个相邻的保持电极通过至少一个连接装置彼此电连接。

公开(公告)号：US6137227A

公开(公告)日：2000-10-24

申请号：US103750

申请日：1998-06-24

Applicant: Ho Jung Kim ,  Hong Kyun Sohn ,  Deuk Soo Pyun

Inventor： Ho Jung Kim ,  Hong Kyun Sohn ,  Deuk Soo Pyun

IPC: G09F9/313 ,  H01J11/12 ,  H01J11/14 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/42 ,  H01J17/49

CPC classification number: H01J11/12 ,  H01J11/32 ,  H01J2211/323 ,  H01J2211/326

Abstract: A plasma display panel for preventing a discharging operation in a non-displaying area and thus progressing the contrast ratio according to the present invention is disclosed. The plasma display panel comprises a first substrate and a second substrate which are provided with each of inner faces opposite to each other. Between the first and second substrates, barrier ribs arranged toward a first direction are separated parallel to each other with a space. On the inner face of the first substrate, first electrodes are arranged parallel with each other toward a second direction which is orthogonal with the first direction. In addition, dot type second electrodes, which are connected with a pair of first electrodes and are exposed to a space between the pair of first electrodes, are arranged on the inner face of the first substrate. Between the barrier ribs on the inner face of the second substrate, there are placed third electrodes which are arranged parallel with the first direction. Here, a unit cell is defined as an area which is limited by the barrier ribs and includes a pair of first electrode.

Abstract translation: 公开了一种等离子体显示面板，用于防止非显示区域中的放电操作，从而提高根据本发明的对比度。 等离子体显示面板包括设置有彼此相对的每个内表面的第一基板和第二基板。 在第一和第二基板之间，朝向第一方向布置的阻挡肋以空间彼此平行地分离。 在第一基板的内表面上，第一电极相对于与第一方向正交的第二方向彼此平行地布置。 此外，与第一电极对连接并暴露于该对第一电极之间的空间的点式第二电极被布置在第一基板的内表面上。 在第二基板的内表面上的阻挡肋之间设置有与第一方向平行设置的第三电极。 这里，单元电池被定义为被阻挡肋限制的区域，并且包括一对第一电极。