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    Method and system for ion beam containment in an ion beam guide
    1.
    发明申请
    Method and system for ion beam containment in an ion beam guide 有权
    离子束导管中离子束收容的方法和系统

    公开(公告)号：US20030201402A1

    公开(公告)日：2003-10-30

    申请号：US10444413

    申请日：2003-05-23

    Inventor： John Zheng Ye ,  Victor M. Benveniste ,  Michael Paul Cristoforo

    IPC: H01J037/147

    CPC classification number: H01J37/05 ,  H01J37/147 ,  H01J37/3171 ,  H01J37/32623 ,  H01J37/32678 ,  H01J2237/1508

    Abstract: Ion implantation systems and beamline assemblies therefor are provided, in which multi-cusped magnetic fields are provided in a beamguide and the beamguide is energized to provide microwave electric fields in a traveling wave along the beamguide passageway. The magnetic and electric fields interact to provide an electron-cyclotron resonance condition for beam containment in the beamguide passageway.

    Abstract translation: 提供了离子注入系统和其束线组件，其中在光束导向器中设置多通道磁场，并且通过激光束导向沿着光束通道在行波中提供微波电场。 磁场和电场相互作用，为光束通道中的光束收容提供电子回旋共振条件。

    Electron beam apparatus and electron beam adjusting method
    2.
    发明申请
    Electron beam apparatus and electron beam adjusting method 失效

    公开(公告)号：US20030071230A1

    公开(公告)日：2003-04-17

    申请号：US10270068

    申请日：2002-10-15

    Applicant: Pioneer Corporation

    Inventor： Yasumitsu Wada

    IPC: H01J037/147

    CPC classification number: H01J37/26 ,  H01J2237/153 ,  H01J2237/282

    Abstract: An electron beam apparatus for irradiating a target with an electron beam includes a reference sample including at least one reference pattern which has a plurality of lattice structures arranged along the circumference of a circle in a evaluation surface of the reference sample; and an adjustment section for adjusting the electron beam by irradiating the evaluation surface with the electron beam on the basis of electrons generated from the reference sample.

    Wien filter and electron microscope using same
    4.
    发明申请
    Wien filter and electron microscope using same 失效
    维恩滤芯和电子显微镜使用相同

    公开(公告)号：US20030226975A1

    公开(公告)日：2003-12-11

    申请号：US10360605

    申请日：2003-02-07

    Applicant: JEOL Ltd.

    Inventor： G. Martinez Lopez ,  Katsushige Tsuno

    IPC: H01J037/147 ,  H01J049/44

    CPC classification number: H01J37/261 ,  H01J2237/057 ,  H01J2237/262

    Abstract: A Wien filter is provided in which a less amount of secondary aberration is produced than conventional. This filter has 12 poles. These poles have front ends facing the optical axis. These front ends have a 12-fold rotational symmetry about the optical axis within the XY-plane perpendicular to the optical axis.

    Abstract translation: 提供了一种维纳滤波器，其中比常规产生少量的二次像差。 该过滤器有12个极。 这些极具有面向光轴的前端。 这些前端在垂直于光轴的XY平面内围绕光轴具有12倍的旋转对称性。

    Ion focussing and conveying device and a method of focussing the conveying ions
    6.
    发明申请
    Ion focussing and conveying device and a method of focussing the conveying ions 有权
    离子聚焦和输送装置以及聚焦输送离子的方法

    公开(公告)号：US20040046124A1

    公开(公告)日：2004-03-11

    申请号：US10416936

    申请日：2003-09-17

    Inventor： Peter John Derrick ,  Alexander William Colburn ,  Anastassios Giannakopulos

    IPC: H01J037/147

    CPC classification number: H01J49/065

    Abstract: An ion focussing and conveying device 10 comprises a plurality of electrodes 12 in series. Means is provided to apply a first alternating voltage waveform to each electrode 12, the phase of the alternating voltage in the first waveform is applied to each electrode 12 in the series being ahead of the phase of the first alternating voltage waveform applied to the preceding electrode 12 in the series by less than 180null, preferably by 90null or less, such that ions are focussed onto an axis of travel and impelled along the series of electrodes 12.

    Abstract translation: 离子聚焦和输送装置10包括串联的多个电极12。 提供了用于向每个电极12施加第一交流电压波形的装置，将第一波形中的交流电压的相位以串联的每个电极12施加在施加到前一个电极的第一交流电压波形的相位之前 12系列小于180°，优选为90°或更小，使得离子聚焦在行进轴线上并沿着该系列电极12推动。

    Electromagnets for and method of deflecting and splitting a particle beam
    7.
    发明申请
    Electromagnets for and method of deflecting and splitting a particle beam 失效
    用于偏转和分裂粒子束的电磁铁和方法

    公开(公告)号：US20020148973A1

    公开(公告)日：2002-10-17

    申请号：US10094415

    申请日：2002-03-08

    Inventor： Izumi Sakai

    IPC: H01J037/147

    CPC classification number: H05H7/04 ,  H05H7/08 ,  H05H7/10

    Abstract: A septum electromagnet deflects and splits a particle beam. A preferred embodiment of the septum electromagnet comprises a septum conductor that divides the septum electromagnet to define first and second beam deflecting magnetic pole spaces. First and second magnetic fields are generated in, respectively, the first and second beam deflecting magnetic pole spaces by electric currents flowing through the coils associated with the septum conductor. The direction of the first magnetic field is opposite to the direction of the second magnetic field, such that a particle beam passing through the first beam deflecting magnetic pole space is angularly deflected by an amount and a particle beam passing through the second beam deflecting magnetic pole space is angularly deflected by an opposite amount.

    Abstract translation: 隔膜电磁铁偏转并分裂粒子束。 隔膜电磁体的优选实施例包括隔膜导体，隔膜导体分隔隔膜电磁体以限定第一和第二光束偏转磁极空间。 第一和第二磁场分别由流过与隔膜导体相关联的线圈的电流分别产生在第一和第二光束偏转磁极空间中。 第一磁场的方向与第二磁场的方向相反，使得通过第一光束偏转磁极空间的粒子束成角度地偏转通过第二光束偏转磁极的量和粒子束 空间角度偏转相反的量。

    Magnetic scanning system with a nonzero field
    8.
    发明申请
    Magnetic scanning system with a nonzero field 审中-公开
    具有非零场的磁扫描系统

    公开(公告)号：US20020050569A1

    公开(公告)日：2002-05-02

    申请号：US10002649

    申请日：2001-10-19

    Inventor： Donald W. Berrian

    IPC: H01J037/147

    CPC classification number: H01J37/1475

    Abstract: An apparatus and a method are disclosed for producing a magnetic deflection field in an ion implanter that drives a secondary solenoid field 90 degrees out of phase with the magnetic deflection field. The apparatus has a magnetic structure including two cores and a yoke, the two cores defining a gap therebetween. The magnetic structure being constructed of a ferrimagnetic material to reduce eddy currents. A deflection coil is positioned inside the gap for producing a time-varying magnetic field in the gap and a secondary helical coil is also positioned inside the gap and extends longitudinally for a portion of the gap. The secondary helical coil produces a solenoid magnetic field that is coupled to the magnetic field associated with the deflection coil. A capacitor is associated with the secondary helical coil and tunes the solenoid magnetic field to the fundamental frequency of the magnetic field associated with the deflection coil.

    Abstract translation: 公开了一种用于在离子注入机中产生磁偏转场的装置和方法，其驱动与磁偏转场90度异相的次级螺线管磁场。 该装置具有包括两个磁芯和一个磁轭的磁性结构，两个芯在它们之间形成间隙。 磁结构由亚铁磁材料构成，以减少涡流。 偏转线圈位于间隙内部，用于在间隙中产生时变磁场，并且次级螺旋线圈也位于间隙内部并且纵向延伸用于间隙的一部分。 次级螺旋线圈产生耦合到与偏转线圈相关联的磁场的螺线管磁场。 电容器与次级螺旋线圈相关联，并将螺线管磁场调谐到与偏转线圈相关联的磁场的基频。

    Particle-optical apparatus and method for operating the same
    9.
    发明申请
    Particle-optical apparatus and method for operating the same 失效
    粒子光学装置及其操作方法

    公开(公告)号：US20040113092A1

    公开(公告)日：2004-06-17

    申请号：US10639741

    申请日：2003-08-13

    Applicant: LEO Elektronenmikroskopie GmbH

    Inventor： Rainer Knippelmeyer

    IPC: H01J037/147

    CPC classification number: H01J37/141 ,  G21K1/08 ,  H01J37/12 ,  H01J37/14 ,  H01J37/1475 ,  H01J37/1477 ,  H01J2237/121 ,  H01J2237/1504

    Abstract: An apparatus and a method to manipulate at least one beam of charged particles are provided. The apparatus comprises two rows of field source members 13 which are disposed periodically at a distance from each other such that there exist planes of symmetry S, Snull with respect to which the field source members 13 are symmetrically disposed. The field has a component which is displaceable in the x-direction. To provide such field, a pattern of source strengths according to the formula F1(x)nullFm(x)nullFc(x) is applied to the field source members, wherein Fm is a component which is substantially independent of the displacement x0 and Fc is a correction component which is dependent on x0.

    Abstract translation: 提供了一种操纵至少一个带电粒子束的装置和方法。 该装置包括两排场源元件13，它们周期性地彼此间隔设置，使得存在对称S，S'的平面，场源元件13对称地设置对准面。 该场具有可在x方向上移位的分量。 为了提供这种场，根据公式F1（x）= Fm（x）+ Fc（x）的源强度的图案被施加到场源成分，其中Fm是基本上与位移x0无关的分量， Fc是依赖于x0的校正分量。

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