公开(公告)号：US20010052744A1

公开(公告)日：2001-12-20

申请号：US09832298

申请日：2001-04-10

Applicant: JEOL Ltd.

Inventor： Katsushige Tsuno

IPC: H01J029/00

CPC classification number: H01J37/05

Abstract: A monochrometer mounted with the electron gun of an electron microscope or the like. This monochrometer does not need movement of a slit. An electron source consisting of any one of a thermal emission-type electron source (such as an LaB6 electron source or a tungsten hairpin), a Schottky emission-type electron source, and a tunneling field emission-type electron source is used. The slit is made of a single metal plate and mounted in position fixedly. Electrons are emitted from the electron source and dispersed within a plane including the slit according to energies. The slit is so positioned that it passes only those of the dispersed electrons which have energies close to the peak energy and blocks electrons having energies higher or lower than the peak energy.

Abstract translation: 安装有电子显微镜等的电子枪的单色仪。 该单色仪不需要狭缝的移动。 使用由热发射型电子源（例如LaB 6电子源或钨发夹）中的任一种，肖特基型发射型电子源和隧道场致发射型电子源构成的电子源。 狭缝由单个金属板制成并固定在一起。 电子从电子源发射并分散在根据能量的包括狭缝的平面内。 狭缝的定位使得其仅通过具有接近峰值能量的能量的分散电子的那些，并且阻挡具有高于或低于峰值能量的能量的电子。

公开(公告)号：US20040144920A1

公开(公告)日：2004-07-29

申请号：US10738966

申请日：2003-12-17

Applicant: JEOL Ltd.

Inventor： G. Martinez Lopez ,  Katsushige Tsuno

IPC: H01J049/44

CPC classification number: H01J37/05 ,  H01J37/153

Abstract: An energy filter with reduced aberration. The energy filter has a first stage of filter for receiving an electron beam entering along the optical axis and for focusing the beam in one direction vertical to the optical axis and a second stage of filter positioned along the optical axis behind the first stage of filter. The beam once focused by the first stage of filter is made to enter the second stage of filter. In the second stage of filter, the orbit of the electron beam is inverted with respect to the focal point. The two stages of filters are identical in length taken along the optical axis. The first and second stages of filters have electric and magnetic quadrupole fields, respectively, along the optical axis. These quadrupole fields make an angle of 45 degrees to the optical axis to achieve astigmatic focusing.

Abstract translation: 具有减小像差的能量滤波器。 能量滤波器具有第一级滤波器，用于接收沿着光轴进入的电子束并且用于在垂直于光轴的一个方向上聚焦光束，以及沿着光轴位于第一级过滤器后面的第二级滤光器。 过滤器第一级聚焦的光束进入第二级过滤器。 在滤波器的第二阶段，电子束的轨道相对于焦点反转。 过滤器的两个阶段沿光轴取长度相同。 滤光器的第一和第二阶段分别具有沿着光轴的电和四极四极场。 这些四极场与光轴成45度的角度，以实现散光聚焦。

公开(公告)号：US20030226975A1

公开(公告)日：2003-12-11

申请号：US10360605

申请日：2003-02-07

Applicant: JEOL Ltd.

Inventor： G. Martinez Lopez ,  Katsushige Tsuno

IPC: H01J037/147 ,  H01J049/44

CPC classification number: H01J37/261 ,  H01J2237/057 ,  H01J2237/262

Abstract: A Wien filter is provided in which a less amount of secondary aberration is produced than conventional. This filter has 12 poles. These poles have front ends facing the optical axis. These front ends have a 12-fold rotational symmetry about the optical axis within the XY-plane perpendicular to the optical axis.

Abstract translation: 提供了一种维纳滤波器，其中比常规产生少量的二次像差。 该过滤器有12个极。 这些极具有面向光轴的前端。 这些前端在垂直于光轴的XY平面内围绕光轴具有12倍的旋转对称性。