公开(公告)号：US20240401928A1

公开(公告)日：2024-12-05

申请号：US18803335

申请日：2024-08-13

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin ,  Goldie Goldstein

IPC: G01B9/02 ,  G01B9/02098 ,  G01B11/16

Abstract: Surface changes are estimated using multiple speckle interferograms acquired using beams incident at different angles. Beam irradiation conditions can be changed to increase signal to noise ratio with averaging, such as weighted averaging. Irradiation conditions can be varied with a tilt plate, a wedge, or by changing beam wavelengths.

公开(公告)号：US20240255273A1

公开(公告)日：2024-08-01

申请号：US18613522

申请日：2024-03-22

Applicant: BAE Systems Information and Electronic Systems Integration Inc.

Inventor： Andrew N. Acker

IPC: G01B9/02098 ,  G01B9/02

CPC classification number: G01B9/02098 ,  G01B9/02094

Abstract: A method of producing a pair of simultaneous artificial specklegram images. The method includes steps of: reflecting a target illumination beam off of a target surface via a transmitter optical component of a shearography system; directing a first reference beam from the transmitter optical component to a receiving optical component of the shearography system; directing a second reference beam from the transmitter optical component to the receiving optical component; receiving a reflected beam from the target surface with the receiving optical component; interfering the reflected beam with the first reference beam and the second reference beam; communicating a first data set relating to the pair of simultaneous artificial specklegram images from the receiving optical component to a processor; and processing the first data set to generate the pair of simultaneous artificial specklegram images.

公开(公告)号：US20230062821A1

公开(公告)日：2023-03-02

申请号：US17792405

申请日：2020-10-12

Applicant: SHIMADZU CORPORATION

Inventor： Koki YOSHIDA ,  Kenji TAKUBO ,  Takahide HATAHORI

IPC: G01B9/02 ,  G01N29/12 ,  G01N29/04 ,  G01B9/02098 ,  G01N29/44

Abstract: A defect inspection device (100) includes an excitation unit that excites an elastic wave, an irradiation unit (2) that applies laser lights, a measurement unit (3) that measures the interfered laser lights, and a control unit that acquires vibration state information which is information about a state of the elastic wave excited in an inspection target (P) for a plurality of frequencies by changing a frequency of excitation vibration caused by the excitation unit in order to excite the elastic wave in the inspection target (P), and extracts recommended frequencies (F) recommended for inspecting a defect of the inspection target (P) from among the plurality of frequencies based on the acquired vibration state information for the plurality of frequencies.

公开(公告)号：US20220342325A1

公开(公告)日：2022-10-27

申请号：US17723240

申请日：2022-04-18

Applicant: KLA Corporation

Inventor： Markus Mengel

IPC: G03F9/00 ,  G03F7/20 ,  G01B9/02098

Abstract: A method for in-situ wave front detection within an inspection system is disclosed. The method includes generating light with a light source and directing the light to a stage-level reflective mask grating structure disposed on a mask stage. The method includes directing light reflected from the stage-level reflective structure to a detector-level mask structure disposed in a plane of a detector and then collecting, with an optical element, light reflected from the detector-level mask structure. The method includes forming a pupil image on the detector and laterally shifting the stage-level reflective mask, with the mask stage, across a grating period of the stage-level reflective mask grating structure to provide phase reconstruction for lateral shearing interferometry. The method includes selectively impinging light reflected from the optical element on the one or more sensors of the detector.

公开(公告)号：US12188769B2

公开(公告)日：2025-01-07

申请号：US17792405

申请日：2020-10-12

Applicant: SHIMADZU CORPORATION

Inventor： Koki Yoshida ,  Kenji Takubo ,  Takahide Hatahori

IPC: G01B9/02 ,  G01B9/02098 ,  G01N29/04 ,  G01N29/12 ,  G01N29/44

Abstract: A defect inspection device (100) includes an excitation unit that excites an elastic wave, an irradiation unit (2) that applies laser lights, a measurement unit (3) that measures the interfered laser lights, and a control unit that acquires vibration state information which is information about a state of the elastic wave excited in an inspection target (P) for a plurality of frequencies by changing a frequency of excitation vibration caused by the excitation unit in order to excite the elastic wave in the inspection target (P), and extracts recommended frequencies (F) recommended for inspecting a defect of the inspection target (P) from among the plurality of frequencies based on the acquired vibration state information for the plurality of frequencies.

公开(公告)号：US12104902B2

公开(公告)日：2024-10-01

申请号：US17234982

申请日：2021-04-20

Applicant: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.

Inventor： Johann Engelhardt

IPC: G01B9/02 ,  G01B9/02098 ,  G01B11/26 ,  G02B5/04 ,  G02B21/00 ,  G06T7/33 ,  G06T7/73

CPC classification number: G01B9/02098 ,  G01B9/02041 ,  G01B11/26 ,  G02B5/04 ,  G02B21/0036 ,  G02B21/008 ,  G06T7/33 ,  G06T7/74

Abstract: In a method of detecting changes in direction of a collimated coherent light beam, the light beam is split into partial light beams which are superimposed on a camera to form an interference pattern displaying light intensity minima and maxima alternatingly following to one another in a transverse direction oriented transversely to an average propagation direction of the partial beams. The light beam is focused into at least one focus located in front of the camera. Pictures of the interference pattern including a plurality of the light intensity maxima are registered with the camera. An average shift of the plurality of light intensity maxima with regard to the camera in the at least one transverse direction is determined from the pictures. A change in angular orientation of the collimated coherent light beam in the at least one transvers direction is deduced from the average shift.

公开(公告)号：US11650042B2

公开(公告)日：2023-05-16

申请号：US16414971

申请日：2019-05-17

Applicant: BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC.

Inventor： Christopher E. Saxer ,  Mark S. Branham ,  Jacob D. Garan

IPC: G01B9/02 ,  G01B11/16 ,  G02B27/10 ,  G02B27/12 ,  G02B27/48 ,  G01B9/02098 ,  G02B27/09 ,  G01S7/481

CPC classification number: G01B9/02098 ,  G01B9/02087 ,  G01B9/02095 ,  G01B11/162 ,  G01S7/4815 ,  G02B27/0955 ,  G02B27/106 ,  G02B27/123 ,  G02B27/48

Abstract: A laser transmission apparatus utilizing multiple laser beams and beam paths with a diverger lens to provide an illumination pattern that can compensate for lateral movement of the platform during shearography is provided. Further, this optical setup requires no moving parts and does not reduce power of the laser beams as they move through the individual components thereof. From the perspective of the surface being scanned or inspected, the present disclosure may provide two laser images of a single surface that appear to be identical despite the fact that they were taken from two different spatial positions of the moving platform.

公开(公告)号：US11561082B2

公开(公告)日：2023-01-24

申请号：US17525624

申请日：2021-11-12

Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences

Inventor： Peng Li ,  Feng Tang ,  Xiangzhao Wang ,  Yunjun Lu ,  Yang Liu

IPC: G01B9/02098

Abstract: Method for simultaneously compensating pupil coordinate distortion and shear amount change in a process of wavefront reconstruction in grating transverse shear interference. Where a wavefront is diffracted by a grating, the shapes and light paths of the diffracted wavefronts of all the orders are different, so that on one hand, a coordinate system detected by a detector plane is distorted relative to a pupil coordinate system, and on the other hand, a shear amount changes along with a coordinate position.

公开(公告)号：US20230296368A1

公开(公告)日：2023-09-21

申请号：US18183855

申请日：2023-03-14

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin ,  Daniel Gene Smith

IPC: G01B9/02098 ,  G01B11/16 ,  G01B9/02015 ,  G01B9/02

CPC classification number: G01B9/02098 ,  G01B11/162 ,  G01B9/0203 ,  G01B9/02087 ,  G01B9/02089 ,  G01B9/02095 ,  G01B2290/70

Abstract: Shearography systems provide independent setting of fringe frequency and shear magnitude by situating an interferometer with a tiltable reflector proximate a pupil plane of an imaging optical system. Fringe frequency can be selected based on a modified Savart plate. In other examples, a Wollaston prism or a polarization grating is translated with respect to an image sensor to vary shear magnitude while maintaining a substantially fixed fringe frequency.

公开(公告)号：US20230251204A1

公开(公告)日：2023-08-10

申请号：US18013401

申请日：2020-07-02

Applicant: Shimadzu Corporation

Inventor： Hiroshi HORIKAWA ,  Kenji TAKUBO

IPC: G01N21/88 ,  G01N29/04 ,  G01B9/02 ,  G01B9/02098

CPC classification number: G01N21/8806 ,  G01N29/045 ,  G01B9/02095 ,  G01B9/02098 ,  G01N2201/06113 ,  G01N2021/1765

Abstract: This defect inspection apparatus (100) is provided with an excitation unit (1), a laser illumination unit (2), an interference unit (30), an imaging unit (31), a holding member (4) for holding the imaging unit at a position spaced apart from an inspection target (90) by a predetermined distance, a connecting member (5) for connecting the holding member or the imaging unit and the excitation unit, and a controller (6) for generating an image (61) related to the propagation of an elastic wave on an inspection target.