公开(公告)号：US06638411B1

公开(公告)日：2003-10-28

申请号：US09492138

申请日：2000-01-27

申请人： Koji Mishima ,  Mizuki Nagai ,  Ryoichi Kimizuka ,  Tetsuo Matsuda ,  Hisashi Kaneko

发明人： Koji Mishima ,  Mizuki Nagai ,  Ryoichi Kimizuka ,  Tetsuo Matsuda ,  Hisashi Kaneko

IPC分类号： C25D534

CPC分类号： C25D17/001 ,  C25D5/18 ,  C25D5/34 ,  C25D7/123 ,  H05K3/22 ,  H05K2203/0392 ,  H05K2203/122 ,  Y10S205/917

摘要： The present invention relates to a method and apparatus for separating out metal copper according to an electroplating of copper using, for example, a solution of copper sulfate to produce copper interconnections on a surface of a substrate. The substrate is brought into contact, at least once, with a processing solution containing at least one of organic substance and sulfur compound which are contained in a plating solution. Thereafter, the substrate is brought into contact with the plating solution to plate the substrate.

摘要翻译： 本发明涉及一种使用例如硫酸铜溶液在铜的电镀上分离金属铜的方法和装置，以在基板的表面上产生铜互连。 使基板与包含在电镀液中的含有有机物质和硫化合物的至少一种的处理液接触至少一次。 此后，使基板与电镀液接触以对基板进行平板化。

公开(公告)号：US06372116B1

公开(公告)日：2002-04-16

申请号：US09396202

申请日：1999-09-15

申请人： Do-Heyoung Kim ,  Jae-Jeong Kim ,  Jae-Hee Ha

发明人： Do-Heyoung Kim ,  Jae-Jeong Kim ,  Jae-Hee Ha

IPC分类号： C25D534

CPC分类号： C25D5/20 ,  C25D5/34

摘要： The present invention relates to a method of forming a conductive layer and an electroplating device, and in particular, to a method of forming a conductive layer that provides an electrically-conductive layer having both characteristics of increased adhesiveness to an electroplated body and increased uniformity. The electroplating apparatus and method can produce supersonic waves for electroplating. Thus, the electroplating device can include a wave generator. The electroplating device can further include a plating bath filled with an electrolyte solution that can propagate super sonic waves, a power supply, a plated body connected electrically to a first terminal of the power supply, and a plating body connected electrically to a second terminal of the power supply where the plating body provides ions the same as dissolved in the electrolyte solution to maintain a desired concentration of dissolved ions.

摘要翻译： 本发明涉及一种形成导电层和电镀装置的方法，特别涉及一种形成导电层的方法，所述导电层提供具有增加的与电镀体的粘附性的特性和增加的均匀性的导电层。 电镀装置和方法可以产生用于电镀的超声波。 因此，电镀装置可以包括波发生器。 电镀装置还可以包括填充有能够传播超声波的电解质溶液的电镀液，电源，电连接到电源的第一端子的电镀体，以及电连接到第一端子 电镀体提供的离子与溶解在电解质溶液中的离子相同，以保持所需的溶解离子浓度。

公开(公告)号：US06790335B2

公开(公告)日：2004-09-14

申请号：US10334522

申请日：2002-12-31

申请人： Wente Lai

发明人： Wente Lai

IPC分类号： C25D534

CPC分类号： C23C14/0641 ,  C23C14/022 ,  C25D11/022

摘要： A method of manufacturing a decorative plate (1) includes the steps of: preparing a metal substrate and covering selected areas (11, 16) of the substrate with a protective film; anodizing the substrate; and removing the protective film to expose metallic surfaces in the selected areas of the substrate.

公开(公告)号：US06576113B1

公开(公告)日：2003-06-10

申请号：US09699117

申请日：2000-10-27

申请人： Axel Scherer ,  Joyce Wong

发明人： Axel Scherer ,  Joyce Wong

IPC分类号： C25D534

CPC分类号： H01F41/34 ,  C25D5/02 ,  C25D5/34 ,  C25D7/123 ,  H01L21/3212 ,  Y10S438/949

摘要： By using electron beam lithography, chemically assisted ion beam etching, and electroplating, high aspect ratio magnetic columns, 60 nm-170 nm in diameter, which are embedded in an aluminum-gallium-oxide/gallium-arsenide (Al0.9Ga0.1)203/GaAs heterostructured substrate, are fabricated. Storage of data in electroplated Ni columns is realized in the form of tracks 0.5 &mgr;m and 0.25 &mgr;m in the down-track direction, and 1 &mgr;m in the cross-track direction, corresponding to areal densities of 1.3 and 2.6 Gbits/in2 respectively. The fabrication of patterned media samples, using dry etching and oxidation of AlGaAs, and electrodeposition of Ni into GaAs substrate is realized.

摘要翻译： 通过使用电子束光刻，化学辅助离子束蚀刻和电镀，直径为60nm-170nm的高纵横比磁柱，其嵌入在铝 - 镓 - 氧化镓/砷化镓（Al 0.9 Ga 0.1） 203 / GaAs异质结构衬底。 在电镀Ni柱中的数据的存储以轨道方向为0.5μm和0.25μm的轨道的形式实现，并且在交叉轨道方向上实现1mm，对应于1.3和2.6Gbits / in2的面密度。 实现了使用AlGaAs的干蚀刻和氧化以及将Ni电沉积到GaAs衬底中的图案化介质样品的制造。

公开(公告)号：US06290834B1

公开(公告)日：2001-09-18

申请号：US09548095

申请日：2000-04-12

申请人： Thomas J. Pearsall

发明人： Thomas J. Pearsall

IPC分类号： C25D534

CPC分类号： C25D11/08 ,  B41C1/05 ,  B41N1/20 ,  C25D11/024 ,  C25D11/026 ,  C25D11/04

摘要： Liquid transfer rolls such as printing rolls are made by imposing a hard ceramic coating on an incipient liquid transfer roll in an electrolytic bath subjected to a modified shaped wave alternating current, which causes dielectric breakdown and the formation of a hard ceramic coating on the roll. The roll is laser engraved to form liquid carrying reservoirs or cells on the surface of the roll, either before or after the ceramic coating is built on the roll.

摘要翻译： 诸如印刷辊之类的液体转印辊通过在经受改变的成形波形交流电的电解槽中在初始液体转移辊上施加硬陶瓷涂层，这导致电介质击穿并在辊上形成硬质陶瓷涂层。 在辊上建立陶瓷涂层之前或之后，将该辊激光雕刻以在辊的表面上形成液体携带的储存器或单元。

公开(公告)号：US06699380B1

公开(公告)日：2004-03-02

申请号：US10274721

申请日：2002-10-18

申请人： Guan-Shian Chen ,  Michael X. Yang

发明人： Guan-Shian Chen ,  Michael X. Yang

IPC分类号： C25D534

CPC分类号： H01L21/67173 ,  C23C18/1632 ,  C25D7/123 ,  H01L21/6719 ,  H01L21/6723

摘要： Embodiments of the invention generally provide a substrate processing system and method. The substrate processing system generally includes two primary components. The first component is an interface section having at least one first substrate transfer robot positioned therein, and the second component is at least one processing module in communication with the interface section, the at least one processing module having a pretreatment and post treatment cell, a processing cell, at a second substrate transfer robot positioned therein. The substrate processing method generally includes transporting a dry substrate to a processing module via a dry interface. Once the substrate is positioned in the processing module, a robot transfers the substrate between a treatment cell and a processing cell contained within the processing module to complete a predetermined sequence of processing steps. Once the processing steps are completed, the treatment cell generally dries the substrate and then the substrate is transferred back to the dry interface.

摘要翻译： 本发明的实施例通常提供一种基板处理系统和方法。 基板处理系统通常包括两个主要部件。 第一部件是具有位于其中的至少一个第一基板传送机器人的接口部分，并且第二部件是与接口部分通信的至少一个处理模块，该至少一个处理模块具有预处理和后处理单元， 处理单元，位于其中的第二基板传送机器人。 基板处理方法通常包括通过干式界面将干燥基板输送到处理模块。 一旦基板被定位在处理模块中，机器人将处理单元和处理模块内包含的处理单元之间的基板传送到完成预定的处理步骤序列。 一旦处理步骤完成，处理池通常使基板干燥，然后将基板转移回干燥界面。

公开(公告)号：US06619289B1

公开(公告)日：2003-09-16

申请号：US09780262

申请日：2001-02-09

申请人： James N. Mashak

发明人： James N. Mashak

IPC分类号： C25D534

CPC分类号： A61M16/0808 ,  A61M16/22

摘要： A moisture sump integrated into a carbon dioxide absorber canister provides a collection reservoir for condensate from a patient ventilator system when the carbon dioxide absorber canister is attached to the ventilator system. The volume of the moisture sump is appropriately sized so that the time interval required to collect a maximum amount of condensate interval is not more than the life expectancy of the carbon dioxide absorbing material contained within the canister. The moisture sump allows condensate management of difficult to drain areas such as the inlet to the expiratory check valve of a ventilator system. The removal of the carbon dioxide absorber canister by a patient attendee to replace the carbon dioxide absorbing material ensures that the condensate collected by the integral moisture sump is eliminated from the patient ventilator system.

摘要翻译： 集成到二氧化碳吸收器罐中的水分池在二氧化碳吸收器罐附接到通气机系统时为来自患者通气机系统的冷凝物提供收集容器。 水分池的体积适当地设定为使得收集最大量的冷凝物间隔所需的时间间隔不超过容纳在罐内的二氧化碳吸收材料的预期寿命。 湿气池允许冷凝物管理难排水区域，例如呼吸机系统呼气止回阀的入口。 患者参加者去除二氧化碳吸收剂罐以更换二氧化碳吸收材料，确保从患者呼吸机系统中消除由整体式湿气池收集的冷凝物。

公开(公告)号：US06440291B1

公开(公告)日：2002-08-27

申请号：US09727431

申请日：2000-11-30

申请人： Jon Henri ,  John Floyd Ostrowski

发明人： Jon Henri ,  John Floyd Ostrowski

IPC分类号： C25D534

CPC分类号： C25D5/34 ,  C25D21/12

摘要： Methods and apparatus are used for triggering and controlling an initial induction period in which a substrate is immersed in an electrochemical bath prior to actual electrochemical processing. This is accomplished by sensing a change in cell potential upon immersion of the substrate or a counter electrode in an electrochemical bath. Appropriate logic then holds the cell potential or current at a fixed value for a defined delay period. After that period ends, the logic allows the cell potential or current to increase to a level where electrochemical processing begins.

摘要翻译： 方法和装置用于触发和控制初始诱导期，其中在实际电化学处理之前将基底浸入电化学浴中。 这是通过在基板或对电极浸入电化学浴中感测电池电位的变化来实现的。 适当的逻辑然后将单元电位或电流保持在定义的延迟周期的固定值。 在该期间结束之后，逻辑允许电池电位或电流增加到电化学处理开始的水平。

公开(公告)号：US06365030B1

公开(公告)日：2002-04-02

申请号：US09530452

申请日：2000-05-10

申请人： Kohshi Yoshimura ,  Fumiaki Kikui ,  Takeshi Nishiuchi

发明人： Kohshi Yoshimura ,  Fumiaki Kikui ,  Takeshi Nishiuchi

IPC分类号： C25D534

CPC分类号： B24B31/14 ,  H01F41/026

摘要： A method of manufacturing R—Fe—B bonded magnets, capable of forming various corrosion resisting films on a R—Fe—B bonded magnet uniformly with a very high bonded strength so as to attain such a very high corrosion resistance thereof that prevents the bonded magnet from being rusted even in a long-period high-temperature high-humidity test; comprising barrel-polishing a porous R—Fe—B bonded magnet by a dry method using as media an abrasive stone formed by sintering inorganic powder of Al2O3, SiC, ZrO and MgO, or a mixture of an abrasive for metal balls and vegetable media, such as vegetable skin chips, sawdust, rind of a fruit and a core of corn, or a mixture of vegetable media the surfaces of which are modified by the above-mentioned abrasive and the above-mentioned inorganic pulverized bodies, so as to enable a surface of the magnet to be smoothed and sealed.

摘要翻译： 一种制造R-Fe-B粘结磁体的方法，其能够以非常高的接合强度均匀地在R-Fe-B粘结磁体上形成各种耐腐蚀膜，以获得非常高的耐腐蚀性，从而防止粘结 即使在长时间的高温高湿试验中，磁铁生锈; 包括通过干法将多孔R-Fe-B粘结磁体机械抛光，使用作为介质的烧结Al 2 O 3，SiC，ZrO和MgO的无机粉末或金属球和植物介质的研磨剂的混合物形成的研磨石， 例如蔬菜皮屑，锯屑，果皮和玉米芯，或其表面被上述研磨剂和上述无机粉碎体改性的植物介质的混合物，以使得能够 要平滑和密封的磁体表面。

公开(公告)号：US06537572B1

公开(公告)日：2003-03-25

申请号：US09721061

申请日：2000-11-22

申请人： Dal-Hwan Oh ,  Seung Oh ,  Yong-Ju Wang ,  Do-Young Choi ,  Su-Youn Oh

发明人： Dal-Hwan Oh ,  Seung Oh ,  Yong-Ju Wang ,  Do-Young Choi ,  Su-Youn Oh

IPC分类号： C25D534

CPC分类号： A61N1/10 ,  A61K9/7023

摘要： A skin patch type aluminium alloy remedial implement, the implement of aluminium alloy (containing more than 99% of aluminium) including components in body fluid and inorganic bio elements, anodized but not processed with sealing treatment, wherein oxide coating formed thereon is microporous and functions as dielectric electrically and chemically, the coating being accumulated with negative potential to thereby possess a strong reduction potential, the strong reduction of the remedial implement leading to inorganic ion exchange and discharge of electrons accumulated on the oxide coating during contact with pain region of body, thereby controlling disorder of active potential at corresponding tissues and promoting normalization of ion pump among cell membranes for alleviation of pain.

摘要翻译： 一种皮肤贴片型铝合金矫正器具，包括体液和无机生物元件中的铝合金（含有99％以上的铝）的工具，阳极氧化但未经密封处理，其上形成的氧化物涂层是微孔的，功能 作为电介质和化学电介质，涂层被积极具有负电位，从而具有强的还原电位，导致在与身体的疼痛区域接触期间积聚在氧化物涂层上的电子的无机离子交换和放电的补救装置的强烈减少， 从而控制相应组织的活性电位紊乱，促进细胞膜中离子泵的归一化，减轻疼痛。