公开(公告)号：US06818066B2

公开(公告)日：2004-11-16

申请号：US09850841

申请日：2001-05-07

申请人： Robin Cheung

发明人： Robin Cheung

IPC分类号： C23C880

CPC分类号： H01L21/76849 ,  H01L21/288 ,  Y10S134/902

摘要： A system and method for treating a substrate by integrating the annealing of a metal-containing layer on a substrate as part of a chemical mechanical polishing process. In one embodiment, a system for treating a substrate generally includes an annealing station incorporated into a chemical mechanical polishing processing system that includes a deposition station utilized to form a metal-containing layer on the substrate.

摘要翻译： 作为化学机械抛光工艺的一部分，通过将基板上的含金属层的退火结合在一起来处理基板的系统和方法。 在一个实施例中，用于处理衬底的系统通常包括结合到化学机械抛光处理系统中的退火站，其包括用于在衬底上形成含金属层的沉积站。

公开(公告)号：US06576067B2

公开(公告)日：2003-06-10

申请号：US09944711

申请日：2001-08-31

申请人： Irene Spitsberg ,  Ramgopal Darolia

发明人： Irene Spitsberg ,  Ramgopal Darolia

IPC分类号： C23C880

CPC分类号： C23C28/321 ,  C22F1/10 ,  C23C8/02 ,  C23C8/80 ,  C23C28/325 ,  C23C28/345 ,  C23C28/3455

摘要： An article protected by a thermal barrier coating system is fabricated by providing an article substrate having a substrate surface, and thereafter producing on the substrate surface a protective coating having a polished, pre-oxidized protective coating surface. The protective coating is produced by depositing the protective coating on the substrate surface, the protective coating having a protective coating surface, thereafter polishing the protective-coating surface, and thereafter controllably oxidizing the protective-coating surface. The protective-coating surface may optionally be controllably roughened by grit blasting after polishing and before controllably oxidizing. A thermal barrier coating may be deposited overlying the polished, pre-oxidized protective-coating surface.

摘要翻译： 通过提供具有基板表面的制品基板来制造由热障涂层系统保护的制品，然后在基板表面上生产具有经抛光的预氧化保护涂层表面的保护涂层。 通过将保护涂层沉积在基板表面上，保护涂层具有保护涂层表面，然后抛光保护涂层表面，然后可控地氧化保护涂层表面，从而产生保护涂层。 保护涂层表面可以任选地在抛光后和在可控地氧化之前通过喷砂进行可控地粗糙化。 可以在抛光的预氧化保护涂层表面上沉积热障涂层。

公开(公告)号：US06669787B2

公开(公告)日：2003-12-30

申请号：US09878980

申请日：2001-06-12

申请人： Murray Fulton Gillies ,  Antonius Emilius Theodorus Kuiper

发明人： Murray Fulton Gillies ,  Antonius Emilius Theodorus Kuiper

IPC分类号： C23C880

CPC分类号： H01L27/224 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y40/00 ,  G11B5/3903 ,  G11B5/3925 ,  H01F10/3259 ,  H01F10/3268 ,  H01F41/307 ,  H01L43/12 ,  Y10S148/118 ,  Y10T428/1129

摘要： The invention relates to a method of manufacturing a spin valve structure (1) of the GMR-type. Such a structure includes a stack of a magnetic layer (11a 11b), a nonmagnetic layer (15) and a sense layer (17) of a ferromagnetic material. In order to obtain a spin valve structure having a very good GMR effect the method comprises the following specific steps: oxidation of the ferromagnetic material of the sense layer; deposition of aluminium on the oxidized ferromagnetic material; oxidation of the deposited aluminium using oxygen from the oxidized ferromagnetic material.

公开(公告)号：US06251196B1

公开(公告)日：2001-06-26

申请号：US09383274

申请日：1999-08-26

申请人： Takeshi Nishiuchi ,  Kohshi Yoshimura ,  Fumiaki Kikui

发明人： Takeshi Nishiuchi ,  Kohshi Yoshimura ,  Fumiaki Kikui

IPC分类号： C23C880

CPC分类号： H01F41/026 ,  Y10T428/12465 ,  Y10T428/12611

摘要： An Fe—B—R based permanent magnet and metal pieces are placed into a treating vessel, where they are vibrated and/or agitated, whereby a metal film is formed on the surface of the magnet. A sol solution produced by the hydrolytic reaction and the polymerizing reaction of a metal compound which is a starting material for a metal oxide film is applied to the metal film and subjected to a heat treatment to form a metal oxide film. Therefore, it is possible to form, on the surface of the magnet, a corrosion-resistant film which can be produced easily and at a low cost without carrying-out of a plating treatment or a treatment using hexa-valent chromium and which has an excellent adhesion to the surface of the magnet and can exhibit a stable high magnetic characteristic which cannot be degraded even if the magnet is left to stand for a long period of time under high-temperature and high-humidity conditions of a temperature of 80° C. and a relative humidity of 90%. Thus, it is possible to provide an Fe—B—R based permanent magnet having an excellent corrosion resistance.

摘要翻译： 将Fe-B-R基永磁体和金属片放置在处理容器中，在其中它们被振动和/或搅动，由此在磁体的表面上形成金属膜。 将作为金属氧化物膜的原料的金属化合物的水解反应和聚合反应产生的溶胶溶液施加到金属膜上，进行热处理，形成金属氧化物膜。 因此，可以在磁体的表面形成耐腐蚀性膜，其可以容易且低成本地生产，而不会进行电镀处理或使用六价铬的处理，并且具有 对磁体表面的附着力优异，能够呈现稳定的高磁特性，即使在80℃以上的高温高湿条件下长时间放置磁体也不会降低 相对湿度为90％。 因此，可以提供耐腐蚀性优异的Fe-B-R系永久磁铁。

公开(公告)号：US06635124B1

公开(公告)日：2003-10-21

申请号：US10064926

申请日：2002-08-29

申请人： William Randolph Stowell ,  Bangalore Nagaraj

发明人： William Randolph Stowell ,  Bangalore Nagaraj

IPC分类号： C23C880

CPC分类号： C23C8/02 ,  C23C8/10 ,  C23C14/0078 ,  C23C14/083

摘要： A process of forming a ceramic coating on a component. The process generally entails placing the component in a coating chamber containing oxygen and an inert gas, heating a surface of the component to a temperature of about 100 to about 150° C., and then generating a metal vapor from at least one metal target using a microwave-stimulated, oxygen-containing sputtering technique. The metal vapor is then caused to condense on the component surface to form a metal layer, after which the metal layer is treated with a microwave-stimulated plasma to oxidize the metal layer and form an oxide layer having a columnar microstructure. The generating, condensing and treating steps can be repeated any number of times to form multiple oxide layers that together constitute the ceramic coating.

摘要翻译： 在部件上形成陶瓷涂层的工艺。 该方法通常需要将组分置于含有氧气和惰性气体的涂层室中，将组分的表面加热至约100至约150℃的温度，然后使用至少一种金属靶产生金属蒸气，使用 微波刺激的含氧溅射技术。 然后使金属蒸汽冷凝在组分表面上以形成金属层，然后用微波刺激的等离子体处理金属层以氧化金属层并形成具有柱状微结构的氧化物层。 生成，冷凝和处理步骤可以重复任意次数以形成一起构成陶瓷涂层的多个氧化物层。

公开(公告)号：US06565672B2

公开(公告)日：2003-05-20

申请号：US09944706

申请日：2001-08-31

申请人： Irene Spitsberg ,  Ramgopal Darolia

发明人： Irene Spitsberg ,  Ramgopal Darolia

IPC分类号： C23C880

CPC分类号： C23C28/321 ,  C21D7/06 ,  C22F1/10 ,  C23C8/02 ,  C23C8/80 ,  C23C28/325 ,  C23C28/345 ,  C23C28/3455 ,  Y10T428/12549

摘要： An article protected by a protective coating system is fabricated by providing an article substrate having a substrate surface; and thereafter producing a protective coating having a flattened, pre-oxidized protective-coating surface on the substrate surface by depositing a protective coating on the substrate surface, the protective coating having a protective-coating surface, processing the protective coating to achieve a flattened protective-coating surface, and controllably oxidizing the protective-coating surface. A thermal barrier coating may be deposited overlying the flattened, pre-oxidized protective coating.

摘要翻译： 通过提供具有基底表面的制品基底来制造由保护涂层系统保护的物品; 然后通过在基板表面上沉积保护涂层，在基板表面上产生具有平坦的，预氧化的保护涂层表面的保护涂层，保护涂层具有保护涂层表面，加工保护涂层以实现平坦的保护 涂层表面，并可控地氧化保护涂层表面。 可以将平整的预氧化保护涂层覆盖在隔热层上。