Invention Grant
- Patent Title: Method of manufacturing a spin valve structure
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Application No.: US09878980Application Date: 2001-06-12
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Publication No.: US06669787B2Publication Date: 2003-12-30
- Inventor: Murray Fulton Gillies , Antonius Emilius Theodorus Kuiper
- Applicant: Murray Fulton Gillies , Antonius Emilius Theodorus Kuiper
- Priority: EP00203234 20000918
- Main IPC: C23C880
- IPC: C23C880

Abstract:
The invention relates to a method of manufacturing a spin valve structure (1) of the GMR-type. Such a structure includes a stack of a magnetic layer (11a 11b), a nonmagnetic layer (15) and a sense layer (17) of a ferromagnetic material. In order to obtain a spin valve structure having a very good GMR effect the method comprises the following specific steps: oxidation of the ferromagnetic material of the sense layer; deposition of aluminium on the oxidized ferromagnetic material; oxidation of the deposited aluminium using oxygen from the oxidized ferromagnetic material.
Public/Granted literature
- US20020034661A1 Method of manufacturing a spin valve structure Public/Granted day:2002-03-21
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