Electrostatic chuck and semiconductor manufacturing apparatus

    公开(公告)号:US11776836B2

    公开(公告)日:2023-10-03

    申请号:US17469260

    申请日:2021-09-08

    Applicant: TOTO LTD.

    Abstract: An electrostatic chuck includes a ceramic dielectric substrate; a base plate; and a heater unit which heats the ceramic dielectric substrate. The heater unit includes a first heater element. The first heater element has a plurality of sub-zones. The sub-zones include a first sub-zone. The first sub-zone includes a sub-heater line generating heat by allowing a current to flow, a first sub-power feeding portion feeding a power to the sub-heater line, and a second sub-power feeding portion feeding a power to the sub-heater line. The first sub-zone has a central region located centrally in the first sub-zone and an outer peripheral region located outside the central region when viewed along a Z-direction perpendicular to the first major surface. At least one of the first sub-power feeding portion and the second sub-power feeding portion is provided in the central region.

    CONTROL DEVICE FOR VEHICLE HEATER
    2.
    发明申请

    公开(公告)号:US20170361809A1

    公开(公告)日:2017-12-21

    申请号:US15622874

    申请日:2017-06-14

    Inventor: Hajime Nagae

    Abstract: A control device for a vehicle heater includes: a camera; a heater configured to heat a portion of the window glass located in front of the camera; a temperature sensor configured to acquire a camera temperature; an illuminance acquisition unit configured to acquire an illuminance outside the vehicle; and a control unit configured to determine that a control prohibition condition to prohibit execution of the heater energization control is satisfied when the camera temperature is equal to or larger than a prohibition threshold temperature, execute the heater energization control when execution of the heater energization control is requested, prevent execution of the heater energization control when the control prohibition condition is satisfied, and when the illuminance is lower than a threshold illuminance, set the prohibition threshold temperature to be lower than when the illuminance is equal to or larger than the threshold illuminance.

    GLAZING
    4.
    发明申请
    GLAZING 审中-公开

    公开(公告)号:US20160286609A1

    公开(公告)日:2016-09-29

    申请号:US15034802

    申请日:2014-11-13

    Abstract: The invention relates to a heatable glazing comprising an electrically conductive coating and a data transmission window. The data transmission window comprises a plurality of grids made by ablations in the electrically conductive coating and at least one break line between adjacent grids. At least one of a width “a” of the grids and a distance “b” between adjacent grids is selected to maximise transmission of a predetermined frequency of electromagnetic radiation and to reduce the formation of hot spots. Preferred embodiments conform to a standard size of an ERTICO window and a frequency range from 5 GHz to 6 GHz.

    Abstract translation: 本发明涉及一种包括导电涂层和数据传输窗的可加热玻璃。 数据传输窗口包括通过在导电涂层中的消融和相邻网格之间的至少一个断开线制成的多个网格。 选择网格的宽度“a”和相邻格栅之间的距离“b”中的至少一个以最大化电磁辐射的预定频率的传输并且减少热点的形成。 优选实施例符合ERTICO窗口的标准尺寸和5GHz至6GHz的频率范围。

    Transparent panel having heatable coating and production method therefor
    5.
    发明授权
    Transparent panel having heatable coating and production method therefor 有权
    具有可加热涂层的透明板及其制造方法

    公开(公告)号:US09302451B2

    公开(公告)日:2016-04-05

    申请号:US13695929

    申请日:2011-05-10

    Abstract: The invention relates to a transparent pane with a transparent heatable coating, which extends at least over a part of the pane surface, in particular over its visual field. The heatable coating is divided by at least one heatable coating-free zone into at least one first heatable coating zone and a second heatable coating zone, wherein the two heatable coating zones are in each case electrically connected to at least two collecting conductors such that after application of a supply voltage that is provided by a voltage source, in each case a current flows over at least one first heating field formed by the first heatable coating zone and at least one second heating field formed by the second heatable coating zone. At least one heating element is disposed in the heatable coating-free zone, which heating element has an ohmic resistance such that by means of application of the supply voltage to the heating element, the pane is heatable in a surface area containing the heatable coating-free zone. The at least one heating element is configured such that by means of application of the supply voltage to the heating element, the pane is also heatable in at least one surface area adjacent the coating-free zone which surface area contains at least one of the collecting conductors.

    Abstract translation: 本发明涉及一种具有透明可加热涂层的透明板,该透明板至少在玻璃表面的一部分上延伸,特别是在其视野上。 可加热涂层被至少一个可加热无涂层区域分成至少一个第一可加热涂层区域和第二可加热涂覆区域,其中两个可加热涂覆区域在每种情况下都电连接到至少两个集电导体, 施加由电压源提供的电源电压,在每种情况下,电流流过由第一可加热涂覆区形成的至少一个第一加热场和由第二可加热涂覆区形成的至少一个第二加热场。 至少一个加热元件设置在可加热无涂层区域中,该加热元件具有欧姆电阻,使得通过向加热元件施加电源电压,该窗格可在包含可加热涂层的表面区域中加热, 自由区。 所述至少一个加热元件构造成使得通过向所述加热元件施加电源电压,所述窗格也可在与所述无涂层区域相邻的至少一个表面区域中是可加热的,所述表面区域包含至少一个所述收集 导体

    TRANSPARENT WINDOW WITH A HEATABLE COATING AND LOW-IMPEDANCE CONDUCTING STRUCTURES
    6.
    发明申请
    TRANSPARENT WINDOW WITH A HEATABLE COATING AND LOW-IMPEDANCE CONDUCTING STRUCTURES 有权
    具有耐热涂层和低阻抗导电结构的透明窗

    公开(公告)号:US20150232067A1

    公开(公告)日:2015-08-20

    申请号:US14701386

    申请日:2015-04-30

    Inventor: Guenther SCHALL

    Abstract: The present invention relates to a vehicle windscreen with an electrically heatable coating. The vehicle windscreen may extend over a major part of the surface area of the vehicle windscreen and may be electrically connected to at least two low-impedance bus bars lying opposite one another. The vehicle windscreen may include at least one conducting structure only covering the heating area outside a central viewing area, in order to shorten electrically the distance between the bus bars. The vehicle windscreen may be configured such that that current flows in the part of the heating area that is not covered by at least one conducting structure.

    Abstract translation: 本发明涉及具有电可加热涂层的车辆挡风玻璃。 车辆挡风玻璃可以延伸在车辆挡风玻璃的表面区域的主要部分上,并且可以电连接到彼此相对放置的至少两个低阻抗母线。 车辆挡风玻璃可以包括仅覆盖中央观察区域外部的加热区域的至少一个导电结构,以便电气地缩短汇流条之间的距离。 车辆挡风玻璃可以构造成使得电流在未被至少一个导电结构覆盖的加热区域的一部分中流动。

    Coated disk having a heatable communication window
    7.
    发明授权
    Coated disk having a heatable communication window 有权
    具有可加热通信窗口的涂覆盘

    公开(公告)号:US08809742B2

    公开(公告)日:2014-08-19

    申请号:US13500862

    申请日:2010-12-03

    Abstract: A transparent disk that can be electrically heated over a large surface area, comprising: a large-surface-area, electrically conductive, transparent coating, which is applied to a transparent substrate, at least two bus ribbons, which are electrically connected to the electrically conductive transparent coating, at least one locally delimited region free from the coating, wherein at least one heating conductor having two poles is applied inside the free region, and wherein the first pole is electrically connected to the electrically conductive, transparent coating and the second pole is electrically connected to the electrically conductive, transparent coating or a bus ribbon. A method for the production of the disk is also described.

    Abstract translation: 一种可在大表面积上进行电加热的透明盘,包括:大面积导电透明涂层,其被施加到透明基底上,至少两个总线带,其电连接到电 导电透明涂层,至少一个不含涂层的局部限定区域,其中至少一个具有两个极点的加热导体被施加在自由区域内,并且其中第一极电连接到导电透明涂层和第二极点 电连接到导电的透明涂层或总线带上。 还描述了用于生产盘的方法。

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