公开(公告)号：US09576738B2

公开(公告)日：2017-02-21

申请号：US14543146

申请日：2014-11-17

申请人： NXP B.V.

发明人： Peter G. Steeneken ,  Klaus Reimann

IPC分类号： H01G7/06 ,  H01G5/16 ,  H03J5/24 ,  H01G5/013 ,  H01G5/00

CPC分类号： H01G5/16 ,  H01G5/013 ,  H01G5/0136 ,  H01G7/06 ,  H01G2005/02 ,  H03J5/248

摘要： A capacitive MEMS structure comprising first and second opposing capacitor electrode arrangements, wherein at least one of the electrode arrangements is movable, and a dielectric material located adjacent to the second electrode arrangement, wherein the second electrode arrangement is patterned such that it includes electrode areas and spaces adjacent to the electrode areas, and wherein the dielectric material extends at least partially in or over the spaces.

摘要翻译： 一种电容MEMS结构，包括第一和第二相对电容器电极布置，其中至少一个电极布置是可移动的，以及位于第二电极布置附近的介电材料，其中第二电极布置被图案化，使得其包括电极区域和 与电极区域相邻的空间，并且其中电介质材料至少部分地在空间中或上方延伸。

公开(公告)号：US20160225530A1

公开(公告)日：2016-08-04

申请号：US15012072

申请日：2016-02-01

申请人： EGALAX_EMPIA TECHNOLOGY INC.

发明人： CHIN-FU CHANG ,  SHANG-TAI YEH ,  PING SHIAUW ,  YU-HAO CHANG

IPC分类号： H01G5/14

CPC分类号： H01G5/14 ,  G06F3/03545 ,  H01G5/0136 ,  H01G5/0138 ,  H01G5/014 ,  H01G5/16 ,  H01G5/38 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49208

摘要： A method for assembling a force sensitive capacitor is provided. The method comprises: assembling an insulating member to a rear end of a rear-end moving part; inserting a front-end moving part and the rear-end moving part into a case from a front end and a rear end of the case, respectively, and assembling connecting portions of the front-end moving part and the rear-end moving part; assembling a compressible conductor to a front end of a conductor base; and inserting the conductor base into the case from the rear end of the case and assembling the conductor base to the case.

摘要翻译： 提供一种组装力敏电容器的方法。 该方法包括：将绝缘构件组装到后端移动部件的后端; 将前端移动部件和后端移动部件分别从壳体的前端和后端插入壳体中，并组装前端移动部件和后端移动部件的连接部分; 将可压缩导体组装到导体基座的前端; 并且将导体基座从壳体的后端插入壳体并将导体基座组装到壳体上。

公开(公告)号：US20160055980A1

公开(公告)日：2016-02-25

申请号：US14779542

申请日：2014-04-02

申请人： CAVENDISH KINETICS, INC

发明人： Richard L. KNIPE ,  Robertus Petrus VAN KAMPEN

IPC分类号： H01G5/18 ,  H01G5/013 ,  H01G5/011

CPC分类号： H01G5/18 ,  B81B3/0051 ,  B81B3/007 ,  B81B2201/0221 ,  H01G5/011 ,  H01G5/0136 ,  H01G5/16 ,  H01H59/0009 ,  H01H2059/0072

摘要： The present invention generally relates to a MEMS DVC and a method for fabrication thereof. The MEMS DVC comprises a plate movable from a position spaced a first distance from an RF electrode and a second position spaced a second distance from the RF electrode that is less than the first distance. When in the second position, the plate is spaced from the RF electrode by a dielectric layer that has an RF plateau over the RF electrode. One or more secondary landing contacts and one or more plate bend contacts may be present as well to ensure that the plate obtains a good contact with the RF plateau and a consistent C max value can be obtained. On the figure PB contact is the plate bend contact, SL contact is the Second Landing contact and the PD electrode is the Pull Down electrode.

摘要翻译： 本发明一般涉及一种MEMS DVC及其制造方法。 MEMS DVC包括可从距离RF电极间隔第一距离的位置移动的板和距离RF电极间隔第二距离的第二位置小于第一距离的板。 当处于第二位置时，板通过在RF电极上具有RF平台的电介质层与RF电极间隔开。 还可以存在一个或多个次级着陆触点和一个或多个板弯曲触点，以确保该板获得与RF平台的良好接触，并且可以获得一致的C max值。 在图中，PB接触是板弯接触，SL接触是第二着陆接触，PD电极是下拉电极。

公开(公告)号：US20150341031A1

公开(公告)日：2015-11-26

申请号：US14409547

申请日：2013-06-12

申请人： Behr-Hella Thermocontrol GmbH

发明人： Karsten Marquas ,  Michael Steinkamp ,  Dirk Schluter

IPC分类号： H03K17/975

CPC分类号： G01L1/142 ,  G01D5/2417 ,  G06F3/0338 ,  H01G5/013 ,  H01G5/0136 ,  H03K17/975

摘要： The capacitive sensor for detecting the movement of an object, particularly for detecting the actuation of a key of an operating unit, is furnished with a first electrode (30; 32) and a second electrode (34; 36) which is provided for connection or mechanical coupling to or arrangement on the object, the distance of which second electrode from the first electrode changes (30; 32) when the object moves. The two electrodes (30, 34; 32, 36) form a first capacitor (26; 28) with a volume (40) between the electrodes (30, 34; 32, 36), the size of which changes when the object moves. An evaluation unit (38), which is connected to the two electrodes (30, 34; 32, 36) and determines a change of capacitance between the two electrodes (30, 34; 32, 36) resulting from a change of their spacing and volume, is further provided. A deformable, non-gaseous first dielectric (42) is arranged between the two electrodes (30, 34; 32, 36). The first dielectric (42) defines at least one gas volume (44) or, together with at least one of the two electrodes (30, 34; 32, 36) defines a gas volume (44) that is filled by a gaseous second dielectric, wherein at least a part of the second dielectric escapes from the gas volume (44) and from the volume (40) between the two electrodes when the two electrodes (30, 34; 32, 36) approach one another, and, when the two electrodes (30, 34; 32, 36) approach one another, the portion of the volume (40) between the two electrodes (30, 34; 32, 36) occupied by the first dielectric (42) increases and the portion of the volume (40) between the two electrodes (30, 34; 32, 36) occupied by the second dielectric decreases.

摘要翻译： 用于检测物体的移动的电容传感器，特别是用于检测操作单元的键的致动的装置，具有第一电极（30; 32）和第二电极（34; 36） 当对象移动时，第二电极与第一电极的距离发生变化（30; 32）。 两个电极（30,34; 32,36）在电极（30,34; 32,36）之间形成具有体积（40）的第一电容器（26; 28），其尺寸在物体移动时变化。 评估单元（38），其连接到所述两个电极（30,34; 32,36）并且确定由于它们的间隔的改变而导致的两个电极（30,34; 32,36）之间的电容变化，以及 体积，进一步提供。 在两个电极（30,34; 32,36）之间布置可变形非气态第一电介质（42）。 第一电介质（42）限定至少一个气体体积（44），或者与两个电极（30,34; 32,36）中的至少一个限定气体体积（44），其被气态第二电介质 ，其中当所述两个电极（30,34; 32,36）彼此接近时，所述第二电介质的至少一部分从所述气体体积（44）和所述两个电极之间的体积（40）逸出，并且当 两个电极（30,34; 32,36）彼此接近，由第一电介质（42）占据的两个电极（30,34,32,36）之间的体积（40）的部分增加，并且部分 由第二电介质占据的两个电极（30,34,32,36）之间的体积（40）减小。

公开(公告)号：US08749946B2

公开(公告)日：2014-06-10

申请号：US13131468

申请日：2009-11-19

申请人： Eiichi Takahashi ,  Toshimasa Fukai ,  Toshinori Tatsumi ,  Yuichi Nishikiori ,  Kaoru Kitakizaki ,  Toru Tanimizu

发明人： Eiichi Takahashi ,  Toshimasa Fukai ,  Toshinori Tatsumi ,  Yuichi Nishikiori ,  Kaoru Kitakizaki ,  Toru Tanimizu

IPC分类号： H01G5/00

CPC分类号： H01G5/06 ,  H01G5/013 ,  H01G5/0136

摘要： A vacuum capacitor includes a fixed electrode, a movable electrode, a movable electrode shaft, a magnetic flux receiving unit, a magnetic flux generating unit and a capacitance control unit. A plurality of electrode members in a vacuum casing form the fixed electrode. The fixed electrode is divided into a plurality of fixed electrodes, and each fixed electrode is lead outside the vacuum casing and electrically connected to each other in series. A plurality of electrode members arranged in gaps between the electrode members of the fixed electrode form the movable electrode. Rotating the movable electrode shaft, which supports the movable electrode, varies capacitance between the movable electrode and the fixed electrode. The magnetic flux receiving unit rotates the movable electrode shaft. The magnetic flux generating unit, located outside the vacuum casing, rotates the magnetic flux receiving unit by magnetic attraction. The capacitance control unit rotates the magnetic flux generating unit.

摘要翻译： 真空电容器包括固定电极，可动电极，可动电极轴，磁通量接收单元，磁通量产生单元和电容控制单元。 真空壳体中的多个电极部件形成固定电极。 固定电极被分成多个固定电极，每个固定电极引导到真空壳体的外部并串联电连接。 布置在固定电极的电极构件之间的间隙中的多个电极构件形成可动电极。 旋转支撑可动电极的可动电极轴改变可动电极和固定电极之间的电容。 磁通量接收单元使可动电极轴旋转。 位于真空壳体外部的磁通量产生单元通过磁吸引旋转磁通量接收单元。 电容控制单元旋转磁通产生单元。

公开(公告)号：US20110235231A1

公开(公告)日：2011-09-29

申请号：US13131486

申请日：2009-11-19

申请人： Eiichi Takahashi ,  Toshimasa Fukai ,  Toshinori Tatsumi ,  Yuichi Nishikiori ,  Kaoru Kitakizaki ,  Toru Tanimizu

发明人： Eiichi Takahashi ,  Toshimasa Fukai ,  Toshinori Tatsumi ,  Yuichi Nishikiori ,  Kaoru Kitakizaki ,  Toru Tanimizu

IPC分类号： H01G5/011

CPC分类号： H01G5/0136 ,  H01G5/013 ,  H01G5/06

摘要： [Object] An object of the present invention is to provide a vacuum capacitor, a vacuum state of a vacuum chamber of which is maintained without bellows etc., and whose capacitance is easily adjustable, and a decrease of life of which is lessened.[Means to Solve] A fixed electrode 4 is formed by arranging a plurality of flat electrode members 5 in layers at a certain distance in an axial direction of a vacuum chamber 1b in the vacuum chamber 1b. A movable electrode 7 is an electrode that is formed by arranging a plurality of flat electrode members 8 in layers at a certain distance at a movable electrode shaft 9 in the vacuum casing 1, and by rotation of the movable electrode shaft 9, the each electrode member 8 of the movable electrode 7 is inserted into and extracted from a gap between the electrode members 5 of the fixed electrode 4 and alternately overlaps the electrode member 5 of the fixed electrode 4 with the each electrode member 8 of the movable electrode 7 in noncontact with the electrode members 5 of the fixed electrode 4. A magnetic flux receiving unit 12 is fixed to the movable electrode shaft 9 at a seal member 3 side in the vacuum casing 1, and a capacitance control unit 14 having a magnetic flux generating unit 13 is rotatably supported outside the seal member 3. By rotating the capacitance control unit 14 also rotating the magnetic flux receiving unit 12 by magnetic attraction, an overlap area between the movable electrode 7 and the fixed electrode 4 is changed, then capacitance adjustment is made.

摘要翻译： 本发明的目的是提供一种真空电容器，其真空室的真空状态保持无波纹管等，并且其电容容易调节，并且其使用寿命减少。 [解决方案]固定电极4通过在真空室1b中的真空室1b的轴向上以一定距离布置多个平板电极构件5而形成。 可动电极7是通过在真空壳体1中的可动电极轴9上以一定距离布置多个平面电极构件8而形成的电极，并且通过可动电极轴9的旋转， 将可动电极7的构件8插入到固定电极4的电极构件5之间的间隙中并从固定电极4的电极构件5之间的间隙中抽出，并且与可动电极7的每个电极构件8以非接触的方式交替重叠 与固定电极4的电极部件5连接。在真空壳体1的密封部件3侧将磁通量接收部12固定在可动电极轴9上，电容控制部14具有磁通发生部13 被可旋转地支撑在密封构件3的外部。通过旋转电容控制单元14，其也通过磁吸引使磁通量接收单元12旋转，movab之间的重叠区域 改变电极7和固定电极4，然后进行电容调整。

公开(公告)号：USRE41521E1

公开(公告)日：2010-08-17

申请号：US11703845

申请日：2007-02-08

申请人： Yasuyuki Fukushima ,  Hiroyuki Fujitsuka

发明人： Yasuyuki Fukushima ,  Hiroyuki Fujitsuka

IPC分类号： G09G5/00

CPC分类号： H01G5/0136 ,  G06F3/03545 ,  H01G5/014 ,  H01G5/16

摘要： The present invention provides a variable capacity condenser having fewer components. A variable capacity condenser according to the present invention comprises a dielectric substance, two electrodes, and a flexible electrode. The dielectric substance has two end faces. The two electrodes are disposed on one end face of the dielectric substance. The flexible electrode faces the other end face of the dielectric substance. The flexible electrode is pressible by a pressing member to vary a distance between at least a portion of the flexible electrode and the other end face of the dielectric substance.

摘要翻译： 本发明提供一种具有较少部件的可变容量冷凝器。 根据本发明的可变容量冷凝器包括电介质物质，两个电极和柔性电极。 介电物质具有两个端面。 两个电极设置在电介质的一个端面上。 柔性电极面向电介质的另一端面。 柔性电极可通过按压部件压迫以改变柔性电极的至少一部分与电介质的另一端面之间的距离。

公开(公告)号：US20100182731A1

公开(公告)日：2010-07-22

申请号：US12663829

申请日：2008-06-06

申请人： Peter G. Steeneken ,  Klaus Reimann

发明人： Peter G. Steeneken ,  Klaus Reimann

IPC分类号： H01G7/06

CPC分类号： H01G5/16 ,  H01G5/013 ,  H01G5/0136 ,  H01G7/06 ,  H01G2005/02 ,  H03J5/248

摘要： A MEMS tunable capacitor comprises first and second opposing capacitor electrodes (10,12), wherein the second capacitor electrode (12) is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material (14) and a non-tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode (20) faces the movable second electrode (12) for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material (14) for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.

摘要翻译： MEMS可调谐电容器包括第一和第二相对电容器电极（10,12），其中第二电容器电极（12）可通过MEMS开关移动以改变电容器介电间距，从而调谐电容。 可调电介质材料（14）和不可调电介质材料串联在第一和第二电极之间。 可调电介质材料占电极间距的尺寸gd，不可调电介质材料占电极间距的尺寸g。 第三电极（20）面向可动第二电极（12），用于电控制可调电介质材料。 控制器适于改变用于MEMS电容器的电容的第一连续调节范围的电容器电介质间隔，并且调谐电介质材料（14）用于MEMS电容器的电容的第二连续调节范围，从而 以提供包括第一和第二范围的连续模拟调节范围。 这种布置提供了对MEMS功能和介质调谐功能的独立控制，并且实现了连续可调性。

公开(公告)号：US07042698B2

公开(公告)日：2006-05-09

申请号：US11047762

申请日：2005-02-02

申请人： Seok-Jun Won ,  Kang-soo Chu ,  Weon-Hong Kim

发明人： Seok-Jun Won ,  Kang-soo Chu ,  Weon-Hong Kim

IPC分类号： H01G5/00

CPC分类号： H01G5/0136 ,  H01G5/14 ,  H01G5/145 ,  H01G5/18

摘要： A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in a shape of comb-teeth and being electrically connected to one another, a capacitor dielectric layer covering the plurality of fixed charge plates, a movable charge plate structure spaced apart from the capacitor dielectric layer, and arranged on the plurality of fixed charge plates, wherein the movable charge plate structure includes a plurality of movable charge plates arranged corresponding the plurality of fixed charge plates, and an actuator connected to the movable charge plate structure allowing the movable charge plate structure to move in a horizontal direction.

摘要翻译： MEMS可调谐电容器及其制造方法包括在基板上的多个固定的充电板，多个具有相同高度的固定充电板被布置成梳齿形并彼此电连接， 覆盖所述多个固定充电板的电容器电介质层，与所述电容器介电层间隔开并且布置在所述多个固定的充电板上的可移动的充电板结构，其中所述可移动的充电板结构包括多个相应地布置的可移动的充电板 多个固定的充电板和连接到可移动的充电板结构的致动器，其允许可移动的充电板结构在水平方向上移动。

公开(公告)号：US20060056132A1

公开(公告)日：2006-03-16

申请号：US10535861

申请日：2004-07-07

申请人： Koichi Yoshida ,  Takahiro Oguchi ,  Yoshihiro Konaka

发明人： Koichi Yoshida ,  Takahiro Oguchi ,  Yoshihiro Konaka

IPC分类号： H01G5/14

CPC分类号： H01P1/127 ,  H01G5/0136 ,  H01G5/16 ,  H01G5/18 ,  H01H59/0009 ,  H01H2059/0072

摘要： A variable capacitance element includes a movable element provided above a substrate using supporting portions and support beams so as to be displaced from the substrate. An insulating film and a movable electrode are provided on a conductor facing surface of the movable element. A driving electrode is arranged to displace the movable element, between a signal cutoff position and a signal passage position, whereby a high frequency signal transmitted through a transmission line is cut off or allowed to pass. The insulating film uses compressive stress to warp the movable element and the movable electrode in a direction of warping in a convex form toward the transmission line, and maintains this warping direction.

摘要翻译： 可变电容元件包括使用支撑部分和支撑梁设置在基板上方的可移动元件，以便从基板移位。 绝缘膜和可动电极设置在可动元件的面向导电表面上。 驱动电极被布置成在信号切断位置和信号通道位置之间移动可移动元件，由此通过传输线传输的高频信号被切断或允许通过。 绝缘膜使用压缩应力使可动元件和可动电极在朝向传输线的凸形的翘曲方向上翘曲，并且保持该翘曲方向。