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    Method and apparatus for machine control
    2.
    发明授权
    Method and apparatus for machine control 失效
    机器控制方法和装置

    公开(公告)号：US5610489A

    公开(公告)日：1997-03-11

    申请号：US575264

    申请日：1995-12-20

    Applicant: Roger L. Hart ,  Rickey L. Busick

    Inventor： Roger L. Hart ,  Rickey L. Busick

    IPC: G05B19/19 ,  G05B19/404

    CPC classification number: G05B19/19 ,  G05B2219/39243 ,  G05B2219/50228

    Abstract: A control for machine members propelled at plural points along their length to move linearly transverse to member length determines and eliminates skew of the driven points. Skew is determined from position indicated by position transducers associated with the driven points. Various types of position transducers are accommodated, including encoders having outputs from which member position can be determined only with reference to marker outputs of the transducer. For such encoders, the control effects velocity controlled motion to detect position. Skew is eliminated by relatively moving the driven points by the magnitude of the skew.

    Abstract translation: 沿着它们的长度在多个点处推动的机器构件的控制横向于构件长度线性地移动确定并消除了驱动点的偏斜。 由与驱动点相关联的位置传感器指示的位置确定倾斜。 容纳各种类型的位置传感器，包括具有输出的编码器，只有参考传感器的标记输出才能确定构件位置。 对于这样的编码器，控制实现速度控制运动以检测位置。 通过将驱动点相对移动倾斜的大小来消除倾斜。

    Method and system for controlling synchronous drive systems
    3.
    发明授权
    Method and system for controlling synchronous drive systems 失效
    控制同步传动系统的方法和系统

    公开(公告)号：US4761597A

    公开(公告)日：1988-08-02

    申请号：US99117

    申请日：1987-09-21

    Applicant: Yoshinari Sasaki ,  Yasuo Ozaki

    Inventor： Yoshinari Sasaki ,  Yasuo Ozaki

    IPC: G05B19/19 ,  G05B11/32

    CPC classification number: G05B19/19 ,  G05B2219/50228

    Abstract: In a system for controlling a synchronous drive system suitable for use in a machining center of the type comprising a first and second servosystems wherein it is necessary to cause the outputs of the first and second servosystems to coincide with each other, there are provided a target setter for supplying a target value to the first and second servosystems, a compensation system inputted with the difference between the outputs of the first and second servosystems, and circuit means for inputting the output of the compensation system to the second servosystem. The compensation system is constituted by one, two or three of a proportionality element, a differentiating element, and an integrating element.

    Abstract translation: 在用于控制适用于包括第一和第二伺服系统的类型的加工中心的同步驱动系统的系统中，其中需要使第一和第二伺服系统的输出彼此一致，提供目标 用于向第一和第二伺服系统提供目标值的设定器，输入第一和第二伺服系统的输出之间的差的补偿系统，以及用于将补偿系统的输出输入到第二伺服系统的电路装置。 补偿系统由比例元件，微分元件和积分元件中的一个，两个或三个构成。

    Control system for moving a large machine along a single axis
    4.
    发明授权
    Control system for moving a large machine along a single axis 失效
    用于沿着单个轴移动大型机器的控制系统

    公开(公告)号：US4087731A

    公开(公告)日：1978-05-02

    申请号：US756025

    申请日：1976-12-30

    Applicant: John M. Rhoades

    Inventor： John M. Rhoades

    IPC: G05B19/35 ,  G05D3/00 ,  G05B11/32

    CPC classification number: G05B19/353 ,  G05D3/00 ,  G05B2219/50228

    Abstract: A control system for moving a large machine along a single axis. The control system includes first and second position loop servo systems to drive at least respective first and second motors to move respective first and second sides of the machine in the direction of the single axis. The control system is comprised of means responsive to position error signals generated by each position loop servo system for generating a difference error signal that is indicative of the difference between the actual position of each respective side of the machine along the single axis, and means for coupling the difference error signal to means for driving at least one of the motors for causing a change in movement of that motor in a direction to move each side of the machine toward the same actual position while at the same time causing the difference error signal to be reduced toward zero.

    Abstract translation: 一个用于沿着单个轴移动大型机器的控制系统。 控制系统包括第一和第二位置回路伺服系统，用于驱动至少相应的第一和第二电动机以沿着单个轴线的方向移动机器的相应的第一和第二侧。 控制系统包括响应于由每个位置环伺服系统产生的位置误差信号的装置，用于产生指示机器沿着单个轴的每个相应侧的实际位置之间的差异的差分误差信号，以及用于 将差分误差信号耦合到用于驱动至少一个电动机的装置，用于使电动机沿使机器的每一侧移向同一实际位置的方向发生变化，同时使差分误差信号 减至零。

    Movable body position control device and stage device using the movable body position control device
    6.
    发明申请
    Movable body position control device and stage device using the movable body position control device 失效
    移动体位置控制装置和舞台装置采用移动体位置控制装置

    公开(公告)号：US20070035266A1

    公开(公告)日：2007-02-15

    申请号：US11581568

    申请日：2006-10-17

    Applicant: Daisuke Sako

    Inventor： Daisuke Sako

    IPC: G05B19/18 ,  G05B13/00

    CPC classification number: G05B19/19 ,  G05B2219/41368 ,  G05B2219/41369 ,  G05B2219/50228

    Abstract: A movable body position control device includes a pair of position detectors configured to detect moving positions of both ends of a movable body; a pair of driving parts, the driving parts being configured to drive the both ends of the movable body based on a detection signal from the pair of the position detectors; a translation control part configured to make the driving parts can generate a driving force whereby a difference of translational action of the movable body can be prevented in a case where a moving speed of the movable body is changed due to a disturbance, and configured to control the driving parts so that detected positions of the position detectors can be consistent with each other; and a rotation control part configured to make the driving parts can generate the driving force whereby a rotational action of the movable body can be prevented in a case where the moving speed of the movable body is changed due to the disturbance and the movable body is displaced in a rotational direction, and configured to control the driving parts so that the moving body does not lean against a moving direction.

    Abstract translation: 一种移动体位置控制装置，包括：一对位置检测器，被配置为检测可移动体的两端的移动位置; 一对驱动部，所述驱动部构造成基于来自所述一对位置检测器的检测信号驱动所述可动体的两端; 平移控制部，被构造成使得驱动部能够产生驱动力，从而可以防止移动体的移动速度由于干扰而改变的移动体的平移动作的差异， 驱动部件使得位置检测器的检测位置可以彼此一致; 以及旋转控制部，其构造成使得所述驱动部能够产生驱动力，由此由于所述可动体的移动速度由于所述扰动而变化并且所述移动体移位，所述驱动力可以防止所述可移动体的旋转动作 并且构造成控制所述驱动部，使得所述移动体不会偏离移动方向。

    Servo controller
    7.
    发明授权
    Servo controller 有权
    伺服控制器

    公开(公告)号：US06534944B2

    公开(公告)日：2003-03-18

    申请号：US09817204

    申请日：2001-03-27

    Applicant: Yukio Toyozawa ,  Naoto Sonoda

    Inventor： Yukio Toyozawa ,  Naoto Sonoda

    IPC: G05B1132

    CPC classification number: G05B19/19 ,  G05B2219/34027 ,  G05B2219/41234 ,  G05B2219/41264 ,  G05B2219/42062 ,  G05B2219/49262 ,  G05B2219/50228

    Abstract: A servo controller capable of driving a single movable member by two motors with high loop-gain setting to obtain a quick response. A servo controller includes two position controllers associated with respective motors and a damping controller. Each of the position controllers has a position control section to output a velocity command based on an identical position command from a host controller and a position feedback value from an associated position detector, a velocity control section to output a current command based on the velocity command and a velocity feedback value from an associated velocity detector, and a current control section to output a voltage command based on the current command and a current feedback value from an associated current detector. The damping controller outputs a current command correction value for compensating an interference between the two motors based on the velocity feedback values from the velocity detectors for the two motors. The current command correction value is added to or subtracted from the current command in the position controller for one of the two motors and is subtracted from or added to the current command in the other position controller for the other of the two motors.

    Abstract translation: 一种伺服控制器，能够通过具有高回路增益设置的两个电机驱动单个可移动部件，以获得快速响应。 伺服控制器包括与相应电机相关联的两个位置控制器和阻尼控制器。 每个位置控制器具有位置控制部分，用于基于来自主机控制器的相同位置命令输出速度命令和来自关联位置检测器的位置反馈值，速度控制部分，用于基于速度指令输出当前命令 以及来自相关速度检测器的速度反馈值，以及电流控制部分，用于基于电流指令输出电压指令，以及从相关联的电流检测器输出电流反馈值。 阻尼控制器基于来自两个电动机的速度检测器的速度反馈值输出用于补偿两个电动机之间的干扰的电流指令校正值。 当前指令校正值被添加到或从两个电动机之一的位置控制器中的当前指令中减去，并且在两个电动机中另一个的另一个位置控制器中减去或添加到当前命令中。

    Driving apparatus for running unit of robot
    9.
    发明授权
    Driving apparatus for running unit of robot 失效
    机器人运行单元驱动装置

    公开(公告)号：US4968924A

    公开(公告)日：1990-11-06

    申请号：US490726

    申请日：1990-03-08

    Applicant: Hiroaki Mori ,  Kazuhiko Onoue

    Inventor： Hiroaki Mori ,  Kazuhiko Onoue

    IPC: B25J5/02 ,  B25J9/02 ,  B25J9/10 ,  B66C13/22 ,  G05B19/25

    CPC classification number: G05B19/251 ,  G05B2219/45083 ,  G05B2219/49195 ,  G05B2219/50228 ,  Y10S700/90

    Abstract: A driving apparatus for smoothly driving a running unit of a robot, including a movable table movably supported by first and second gear mechanisms driven by independent first and second motors engaging with respective two parallel racks to carry a robot body. This apparatus includes a position command unit for delivering a first position command value to the first motor; a constant value generation unit for generating a constant value indicative of a difference between output values from first and second encoders provided in association with the first and second motors when the movable table is positioned perpendicular to the parallel racks; and a correction unit for determining a first deviation between the first position command value and an output value from the first encoder and determining a second deviation between a second command value obtained by adding the constant value to the first position command value and an output value from the second encoder to determine a third deviation between these first and second deviations to correct the first and second deviation signals on the basis of the third deviation to thereby output corrected position command values for the first and second motors, respectively.

    Abstract translation: 一种用于平滑地驱动机器人运行单元的驱动装置，包括由与独立的第一和第二电动机驱动的第一和第二齿轮可移动地支撑的可移动台，所述第一和第二齿轮与相应的两个平行机架接合以携带机器人主体。 该装置包括用于将第一位置指令值传递到第一电动机的位置指令单元; 恒定值产生单元，用于当可移动台垂直于平行机架定位时，生成表示与第一和第二电动机相关联地设置的第一和第二编码器的输出值之间的差值的常数值; 以及校正单元，用于确定来自第一编码器的第一位置指令值和输出值之间的第一偏差，并且确定通过将常数值与第一位置指令值相加而获得的第二指令值与来自 所述第二编码器确定所述第一和第二偏差之间的第三偏差，以基于所述第三偏差校正所述第一和第二偏差信号，从而分别输出所述第一和第二电动机的校正位置指令值。

    Multi-axis gas bearing stage assembly
    10.
    发明授权
    Multi-axis gas bearing stage assembly 失效

    公开(公告)号：US4676649A

    公开(公告)日：1987-06-30

    申请号：US802772

    申请日：1985-11-27

    Applicant: Edward H. Phillips

    Inventor： Edward H. Phillips

    IPC: B23Q1/00 ,  B23Q1/38 ,  B23Q1/48 ,  B23Q1/62 ,  G01B11/00 ,  G01B11/03 ,  G03F7/20 ,  G05B19/23 ,  G05B19/401 ,  H01L21/67 ,  H01L21/68

    CPC classification number: G03F7/70716 ,  B23Q1/385 ,  B23Q1/621 ,  B23Q17/2495 ,  G01B11/002 ,  G05B19/231 ,  G05B19/4015 ,  G05B2219/37275 ,  G05B2219/41091 ,  G05B2219/41195 ,  G05B2219/41337 ,  G05B2219/45026 ,  G05B2219/49193 ,  G05B2219/49258 ,  G05B2219/49271 ,  G05B2219/49276 ,  G05B2219/50228

    Abstract: An improved multi-axis gas bearing stage assembly is disclosed which has a base, an intermediate stage element, a stage, and a control system for controlling the movement of the intermediate stage element and the stage. The control system includes first and second Y-axes positioning sub-systems for differentially positioning first and second ends of the intermediate stage element along first and second Y-axes of motion, with respect to the base, and an X.sub.i -axis positioning sub-system for positioning the stage along an X.sub.i -axis of motion, with respect to the intermediate stage element. In one embodiment, the positioning sub-systems comprise motor-encoder driven leadscrews. In a second embodiment, the positioning sub-systems comprise linear motors, measuring scales, and read heads. In a third embodiment, the positioning sub-systems comprise linear motors and interferometer measuring systems. A method of achieving orthogonality between the Y- and X.sub.i -axes that features an orthogonality alignment standard is disclosed. In a another embodiment, the differential positioning capability of the first and second Y-axes is utilized for positioning the intermediate stage element along a .theta.-axis about a Z-direction orthogonal to both the Y- and X-axes, and a method of rotationally aligning a semiconductive wafer is disclosed. In other embodiments, two methods of kinematically positioning the improved multi-axis stage assembly within a utilization apparatus are disclosed. In another embodiment, three retroreflectors of an interferometer measuring system are mounted directly on a wafer chuck, located on the stage, and a transport system moves three interferometers rotationally, to maintain optical coupling between the interferometers and the retroreflectors. In still another embodiment, five retroreflectors are mounted directly on the wafer chuck and a five axis interferometer measuring system is utilized to eliminate all Abbe offset measurement errors in the position of a semiconductive wafer, placed upon the wafer chuck, along the X, Y, and .theta.-axes of motion.

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