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公开(公告)号：US20120179294A1
公开(公告)日：2012-07-12
申请号：US13344115
申请日：2012-01-05
申请人： Shigenori Sasai
发明人： Shigenori Sasai
IPC分类号： B25J9/02
CPC分类号： B25J9/1694 , G01C19/56 , G05B2219/37008 , G05B2219/37507 , G05B2219/39195 , G05B2219/40549 , G05B2219/40596 , G05B2219/40597 , G05B2219/41128
摘要： A robot includes: an arm driven by a motor; an angle sensor that detects a pivoting angle of the motor; an inertia sensor that detects an inertial force acting on the arm; a noise detecting unit that detects a noise frequency of the inertia sensor from both an output of the angle sensor and an output of the inertia sensor; a filter-constant determining unit that determines a characteristic of a filter from information of the noise detecting unit; and the filter that removes noise of the inertia sensor on the basis of the filter-constant determining unit.
摘要翻译： 机器人包括：由马达驱动的手臂; 角度传感器，其检测电动机的摆动角度; 检测作用在臂上的惯性力的惯性传感器; 噪声检测单元，从角度传感器的输出和惯性传感器的输出检测惯性传感器的噪声频率; 滤波器常数确定单元，其根据噪声检测单元的信息确定滤波器的特性; 以及滤波器，其基于滤波器常数确定单元去除惯性传感器的噪声。
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公开(公告)号：US5943634A
公开(公告)日：1999-08-24
申请号：US645907
申请日：1996-05-14
IPC分类号： B23Q17/12 , G01H1/00 , G05B19/406 , G05B23/02 , G01M7/02
CPC分类号： G05B23/0221 , B23Q17/12 , G01H1/00 , G05B19/406 , G05B23/0264 , G05B2219/37435 , G05B2219/37507
摘要： An efficient vibration data collection, analysis, and storage system automates the analysis of time waveform data and optimizes use of available memory and minimizes data collection time by parameterizing the time domain vibration waveform produced by a vibration transducer attached to a machine. Various parameters are calculated from the time domain waveform and compared to predetermined thresholds or other criteria representative of possible anomalous conditions within the monitored machine. When one or more anomaly criteria are met, an alarm is generated and the system automatically collects, or stores vibration data, which may include both the time waveform and frequency spectrum. Alternatively, the system may be programmed to conduct further analysis of the vibration data during an alarm condition prior to data storage. Preferably, time waveform data is stored only for machines that are in alarm, and the calculated parameters are stored for each machine regardless of the machine's condition. Stored data may be uploaded to a base computer for further analysis and long-term storage. The waveform parameters serve to provide metrics of behaviors in the waveform that are particularly useful to both the data collection technician and the vibration analyst.
摘要翻译： 有效的振动数据收集，分析和存储系统可自动分析时间波形数据，并优化可用存储器的使用，并通过参数设置连接到机器的振动传感器产生的时域振动波形，最大限度地减少数据采集时间。 根据时域波形计算各种参数，并将其与预定阈值或表示监测机器内可能出现的异常情况的其他标准进行比较。 当满足一个或多个异常标准时，产生报警，并且系统自动收集或存储可能包括时间波形和频谱两者的振动数据。 或者，可以将系统编程为在数据存储之前的报警状态期间进一步分析振动数据。 优选地，时间波形数据仅存储在处于报警状态的机器中，并且不管机器的状况如何，为每个机器存储所计算的参数。 存储的数据可以上传到基本计算机进行进一步分析和长期存储。 波形参数用于提供对数据采集技术人员和振动分析仪特别有用的波形行为度量。
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公开(公告)号：US08538582B2
公开(公告)日：2013-09-17
申请号：US13344115
申请日：2012-01-05
申请人： Shigenori Sasai
发明人： Shigenori Sasai
IPC分类号： G05B19/404
CPC分类号： B25J9/1694 , G01C19/56 , G05B2219/37008 , G05B2219/37507 , G05B2219/39195 , G05B2219/40549 , G05B2219/40596 , G05B2219/40597 , G05B2219/41128
摘要： A robot includes: an arm driven by a motor; an angle sensor that detects a pivoting angle of the motor; an inertia sensor that detects an inertial force acting on the arm; a noise detecting unit that detects a noise frequency of the inertia sensor from both an output of the angle sensor and an output of the inertia sensor; a filter-constant determining unit that determines a characteristic of a filter from information of the noise detecting unit; and the filter that removes noise of the inertia sensor on the basis of the filter-constant determining unit.
摘要翻译： 机器人包括：由马达驱动的手臂; 角度传感器，其检测电动机的摆动角度; 检测作用在臂上的惯性力的惯性传感器; 噪声检测单元，从角度传感器的输出和惯性传感器的输出检测惯性传感器的噪声频率; 滤波器常数确定单元，其根据噪声检测单元的信息确定滤波器的特性; 以及滤波器，其基于滤波器常数确定单元去除惯性传感器的噪声。
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公开(公告)号：US20080269923A1
公开(公告)日：2008-10-30
申请号：US12166607
申请日：2008-07-02
IPC分类号： G05B9/02
CPC分类号： G05B19/4062 , G05B2219/33295 , G05B2219/37507 , G05B2219/42271 , G05B2219/45048
摘要： A system for monitoring the condition of a packaging machine during operation and diagnosing potential problems in the performance of the machine. The system comprises an input device, an output device and a processing unit that supports a user interface presented by the output device. The processing unit is arranged to permit a user, when in use, to input via the user interface a number of pre-determined parameters to measure one or more elements or assemblies in the machine, to receive information from one or more sensors measuring the element or assembly and to analyze the information with the parameter to render via the output device a signal.
摘要翻译： 一种用于在运行期间监测包装机状态并诊断机器性能潜在问题的系统。 该系统包括输入设备，输出设备和支持由输出设备呈现的用户界面的处理单元。 处理单元被布置成允许用户在使用时通过用户界面输入多个预定参数来测量机器中的一个或多个元件或组件，以从测量元件的一个或多个传感器接收信息 或组件，并分析具有参数的信息，以通过输出设备呈现信号。
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5.发明授权公开(公告)号：US12055498B2
公开(公告)日：2024-08-06
申请号：US17361026
申请日：2021-06-28
发明人： Chyuan-Ruey Lin , Feng-Min Shen , Hung-Chia Su
IPC分类号： G01N21/95 , G01N21/01 , G01N21/65 , G01N21/88 , G01N21/94 , G01N21/956 , G05B19/418 , G05B23/02 , H01L21/66
CPC分类号： G01N21/9501 , G01N21/658 , G01N21/8851 , G01N21/95607 , G01N21/01 , G01N21/65 , G01N21/8806 , G01N2021/8854 , G01N2021/8877 , G01N21/94 , G01N21/95 , G01N21/956 , G01N2021/95615 , G01N2201/126 , G05B19/41875 , G05B23/0283 , G05B2219/37507 , G05B2219/45031 , H01L22/30
摘要： A data processing method for detection of deterioration of semiconductor process kits includes the following steps: acquiring a plurality of Raman spectra data of a semiconductor process kit and performing a plurality calculating processes on the Raman spectra data to obtain a first deterioration state determining parameter indicating the aging degree of the entire semiconductor process kit and a second deterioration state determining parameter indicating the degree of variation of the internal molecular structure of the semiconductor process kit.
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公开(公告)号：US20060190102A1
公开(公告)日：2006-08-24
申请号：US11379672
申请日：2006-04-21
IPC分类号： G05B9/02
CPC分类号： G05B19/4062 , G05B2219/33295 , G05B2219/37507 , G05B2219/42271 , G05B2219/45048
摘要： A system for monitoring the condition of a packaging machine during operation and diagnosing potential problems in the performance of the machine. The system comprises an input device, an output device and a processing unit that supports a user interface presented by the output device. The processing unit is arranged to permit a user, when in use, to input via the user interface a number of pre-determined parameters to measure one or more elements or assemblies in the machine, to receive information from one or more sensors measuring the element or assembly and to analyze the information with the parameter to render via the output device a signal.
摘要翻译： 一种用于在运行期间监测包装机状态并诊断机器性能潜在问题的系统。 该系统包括输入设备，输出设备和支持由输出设备呈现的用户界面的处理单元。 处理单元被布置成允许用户在使用时通过用户界面输入多个预定参数来测量机器中的一个或多个元件或组件，以从测量元件的一个或多个传感器接收信息 或组件，并分析具有参数的信息，以通过输出设备呈现信号。
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7.发明申请ENVIRONMENTAL MONITORING SYSTEM AND METHOD FOR LIQUID CRYSTAL MANUFACTURING APPARATUS 审中-公开液体制造装置的环境监测系统及方法公开(公告)号：US20150088294A1
公开(公告)日：2015-03-26
申请号：US13637679
申请日：2012-06-07
发明人： Yunshao Jiang , Chun Hao Wu , Kun Hsien Lin , Yongqiang Wang , Zhiyou Shu , Minghu Qi , Xiande Li , Zhenhua Guo , Weibing Yang , Zenghong Chen
IPC分类号： G05B19/406
CPC分类号： G05B19/406 , G02F1/1303 , G02F1/1309 , G05B2219/32015 , G05B2219/37507
摘要： The present invention provides an environmental monitoring system and method for a liquid crystal manufacturing apparatus. The monitoring system comprises an environmental information acquiring equipment, a server, and the liquid crystal manufacturing apparatus. The environmental information acquiring equipment moves along a predetermined track inside the liquid crystal manufacturing apparatus. The environmental information acquiring equipment acquires inner environmental information of the liquid crystal manufacturing apparatus during its movement and transmits the environmental information to the server. The server generates a monitoring report and provides it to detecting personnel. The present invention can solve the problems of high cost, low efficiency, and unable to accurately measure inner environmental information of the liquid crystal manufacturing apparatus in conventional skills.
摘要翻译： 本发明提供了一种用于液晶制造装置的环境监测系统和方法。 监视系统包括环境信息获取设备，服务器和液晶制造设备。 环境信息获取设备沿着液晶制造设备内的预定轨道移动。 环境信息获取装置在其移动期间获取液晶制造装置的内部环境信息，并将环境信息发送到服务器。 服务器生成监控报告并提供给检测人员。 本发明可以解决现有技术中液晶制造装置的高成本，低效率，不能精确地测量内部环境信息的问题。
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公开(公告)号：US07039474B2
公开(公告)日：2006-05-02
申请号：US10807056
申请日：2004-03-19
IPC分类号： G05B11/01
CPC分类号： G05B19/4062 , G05B2219/33295 , G05B2219/37507 , G05B2219/42271 , G05B2219/45048
摘要： A system for monitoring the condition of a packaging machine during operation and diagnosing potential problems in the performance of the machine. The system comprises an input device, an output device and a processing unit that supports a user interface presented by the output device. The processing unit is arranged to permit a user, when in use, to input via the user interface a number of pre-determined parameters to measure one or more elements or assemblies in the machine, to receive information from one or more sensors measuring the element or assembly and to analyse the information with the parameter to render via the output device a signal.
摘要翻译： 一种用于在运行期间监测包装机状态并诊断机器性能潜在问题的系统。 该系统包括输入设备，输出设备和支持由输出设备呈现的用户界面的处理单元。 处理单元被布置成允许用户在使用时通过用户界面输入多个预定参数来测量机器中的一个或多个元件或组件，以从测量元件的一个或多个传感器接收信息 或组件，并分析具有参数的信息，以通过输出设备呈现信号。
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公开(公告)号：US20040254666A1
公开(公告)日：2004-12-16
申请号：US10807056
申请日：2004-03-19
IPC分类号： G06F019/00
CPC分类号： G05B19/4062 , G05B2219/33295 , G05B2219/37507 , G05B2219/42271 , G05B2219/45048
摘要： A system for monitoring the condition of a packaging machine during operation and diagnosing potential problems in the performance of the machine. The system comprises an input device, an output device and a processing unit that supports a user interface presented by the output device. The processing unit is arranged to permit a user, when in use, to input via the user interface a number of pre-determined parameters to measure one or more elements or assemblies in the machine, to receive information from one or more sensors measuring the element or assembly and to analyse the information with the parameter to render via the output device a signal.
摘要翻译： 一种用于在运行期间监测包装机状态并诊断机器性能潜在问题的系统。 该系统包括输入设备，输出设备和支持由输出设备呈现的用户界面的处理单元。 处理单元被布置成允许用户在使用时通过用户界面输入多个预定参数来测量机器中的一个或多个元件或组件，以从测量元件的一个或多个传感器接收信息 或组件，并分析具有参数的信息，以通过输出设备呈现信号。
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10.发明授权公开(公告)号：US06266570B1
公开(公告)日：2001-07-24
申请号：US09117132
申请日：1998-07-23
IPC分类号： G05B1302
CPC分类号： G05B19/19 , G05B2219/34048 , G05B2219/37507 , G05B2219/42337
摘要： Standard, existing position measuring systems are used to determine and optimize operating accuracy. For this, in a positional measurement, path information on any desired number of axes is sampled over a predefinable measuring interval and stored. The acquired data are converted and prepared using signal processing measures, enabling conclusions to be drawn about the actual operating accuracy and about causes of inaccuracies.
摘要翻译： 标准的现有位置测量系统用于确定和优化运行精度。 为此，在位置测量中，任何所需数量的轴的路径信息在预定义的测量间隔上进行采样并存储。 使用信号处理措施转换和准备所获得的数据，从而得出关于实际操作准确性和不准确原因的结论。
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