公开(公告)号：US20170336330A1

公开(公告)日：2017-11-23

申请号：US15159266

申请日：2016-05-19

Applicant: Zeta Instruments, Inc.

Inventor： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman ,  Hung P. Nguyen

IPC: G01N21/958 ,  G01N21/55 ,  G01N21/94

CPC classification number: G01N21/958 ,  G01L1/00 ,  G01N21/21 ,  G01N21/55 ,  G01N21/8806 ,  G01N21/94 ,  G01N2021/8854 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/105 ,  G01N2201/1247

Abstract: A method for detecting defects includes directing a scanning beam to a location on a surface of a transparent sample, measuring top and bottom surface specular reflection intensity, and storing coordinate values of the first location and the top and bottom surface specular reflection intensity in a memory. The method may further include comparing the top surface specular reflection intensity measured at each location with a first threshold value, comparing the bottom surface specular reflection intensity measured at each location with a second threshold value, and determining if a defect is present at each location and on which surface the defect is present. The method may further include comparing the top surface specular reflection intensity measured at each location with a first intensity range, comparing the bottom surface specular reflection intensity measured at each location with a second intensity range, and determining on which surface the defect is present.

公开(公告)号：US20170287794A1

公开(公告)日：2017-10-05

申请号：US15630385

申请日：2017-06-22

Applicant: Renesas Electronics Corporation

Inventor： Toshikazu HANAWA ,  Kazuhide FUKAYA ,  Kentaro YAMADA

IPC: H01L21/66 ,  H01L21/768 ,  H01L23/522 ,  H01L21/311

CPC classification number: H01L22/26 ,  G01N21/68 ,  G01N21/73 ,  G01N21/84 ,  G01N2021/8411 ,  G01N2021/8427 ,  G01N2201/1247 ,  H01J37/32963 ,  H01J2237/334 ,  H01L21/31116 ,  H01L21/76802 ,  H01L21/76846 ,  H01L21/76877 ,  H01L23/5226 ,  H01L23/53223 ,  H01L23/53266 ,  H01L23/5329

Abstract: A via hole is accurately formed in an interlayer insulating film over a metal wiring. Of emission spectra of plasma to be used for dry etching of the interlayer insulating film, the emission intensities of at least CO, CN, and AlF are monitored such that an end point of the dry etching of the interlayer insulating film is detected based on the emission intensities thereof.

公开(公告)号：US20150346085A1

公开(公告)日：2015-12-03

申请号：US14648855

申请日：2013-12-04

Applicant: SP3H

Inventor： Sylvain OBERTI ,  Johan FOURNEL

IPC: G01N21/27 ,  G01N21/3504

CPC classification number: G01N21/3577 ,  G01N21/274 ,  G01N21/3504 ,  G01N2021/3181 ,  G01N2201/062 ,  G01N2201/0624 ,  G01N2201/121 ,  G01N2201/1211 ,  G01N2201/124 ,  G01N2201/1242 ,  G01N2201/1247 ,  G01N2201/127 ,  G01N2201/12723

Abstract: A method for controlling a spectrometer for analyzing a product includes steps of: acquiring a measurement representative of the operation of a light source, determining, depending on the measurement, a value of supply current of the light source, and/or a value of integration time of light-sensitive cells of a sensor, disposed on a route of a light beam emitted by the light source and having interacted with a product to be analyzed, and if the integration time and/or supply current value is between threshold values, supplying the light source with a supply current corresponding to the determined supply current value, adjusting the integration time of a light-sensitive cell to the determined integration time value, and acquiring light intensity measurements supplied by the sensor, enabling a spectrum to be formed.

Abstract translation: 一种用于控制用于分析产品的光谱仪的方法包括以下步骤：获取代表光源的操作的测量，根据测量确定光源的电源电流的值和/或积分值 传感器的感光单元的时间设置在由光源发射的光束的路径上并且与待分析的产品相互作用，并且如果积分时间和/或电源电流值在阈值之间，则提供 所述光源具有与所确定的电源电流值相对应的电源电流，将感光单元的积分时间调整到所确定的积分时间值，以及获取由所述传感器提供的光强度测量值，从而能够形成光谱。

公开(公告)号：US08451460B2

公开(公告)日：2013-05-28

申请号：US12735063

申请日：2008-12-18

Applicant: Nigel Jones ,  Ron Ashby

Inventor： Nigel Jones ,  Ron Ashby

IPC: G01B11/06

CPC classification number: G01V8/12 ,  G01B11/0683 ,  G01B11/2433 ,  G01N21/94 ,  G01N2021/5957 ,  G01N2021/5961 ,  G01N2021/945 ,  G01N2201/0696 ,  G01N2201/1247

Abstract: A monitoring system is disclosed, designed to detect the depth of deposition of a substance on a′ surface (12), such as the depth of dust in a ventilation shaft. The monitoring system includes a light source (14) and a sensor (16, 30). The light source is arranged to transmit light across a detection surface and the sensor is on the other side of the detection surface. When a substance, such as dirt or grease, is deposited on the surface it obstructs the light and the amount of light reaching the sensor decreases. A processing means (26) detects the decrease in light and from this the depth of the deposition on the surface can be calculated. Preferably the sensor comprises a CCD array (32), and the substance throws a shadow on the array. The processing means can then determine the depth of the substance from the position on the array of the edge of the shadow. Preferably the monitoring system is placed in a low power ‘sleep’ mode in between intermittent operations for detecting the depth of the substance. In this, way, it can be battery operated and the battery life is preserved.

Abstract translation: 公开了一种监测系统，其设计用于检测物质在“表面（12）上的沉积深度，例如通风轴中灰尘的深度。 监测系统包括光源（14）和传感器（16,30）。 光源被布置成将光透过检测表面，并且传感器位于检测表面的另一侧。 当物质如污垢或油脂沉积在表面上时，它会阻挡光线，并且到达传感器的光量减少。 处理装置（26）检测光的减少，从而可以计算出表面上沉积的深度。 优选地，传感器包括CCD阵列（32），并且该物质在阵列上投射阴影。 处理装置然后可以从阴影边缘的阵列上的位置确定物质的深度。 优选地，监测系统在用于检测物质深度的间歇操作之间被置于低功率“睡眠”模式。 在这种方式下，可以进行电池操作，并保持电池寿命。

公开(公告)号：US20110122423A1

公开(公告)日：2011-05-26

申请号：US12735063

申请日：2008-12-18

Applicant: Nigel Jones ,  Ron Ashby

Inventor： Nigel Jones ,  Ron Ashby

IPC: G01B11/28

CPC classification number: G01V8/12 ,  G01B11/0683 ,  G01B11/2433 ,  G01N21/94 ,  G01N2021/5957 ,  G01N2021/5961 ,  G01N2021/945 ,  G01N2201/0696 ,  G01N2201/1247

Abstract: A monitoring system is disclosed, designed to detect the depth of deposition of a substance on a′ surface (12), such as the depth of dust in a ventilation shaft. The monitoring system includes a light source (14) and a sensor (16, 30). The light source is arranged to transmit light across a detection surface and the sensor is on the other side of the detection surface. When a substance, such as dirt or grease, is deposited on the surface it obstructs the light and the amount of light reaching the sensor decreases. A processing means (26) detects the decrease in light and from this the depth of the deposition on the surface can be calculated. Preferably the sensor comprises a CCD array (32), and the substance throws a shadow on the array. The processing means can then determine the depth of the substance from the position on the array of the edge of the shadow. Preferably the monitoring system is placed in a low power ‘sleep’ mode in between intermittent operations for detecting the depth of the substance. In this, way, it can be battery operated and the battery life is preserved.

Abstract translation: 公开了一种监测系统，其设计用于检测物质在“表面（12）上的沉积深度，例如通风轴中灰尘的深度。 监测系统包括光源（14）和传感器（16,30）。 光源被布置成将光透过检测表面，并且传感器位于检测表面的另一侧。 当物质如污垢或油脂沉积在表面上时，它会阻挡光线，并且到达传感器的光量减少。 处理装置（26）检测光的减少，从而可以计算出表面上沉积的深度。 优选地，传感器包括CCD阵列（32），并且该物质在阵列上投射阴影。 处理装置然后可以从阴影边缘的阵列上的位置确定物质的深度。 优选地，监测系统在用于检测物质深度的间歇操作之间被置于低功率“睡眠”模式。 在这种方式下，可以进行电池操作，并保持电池寿命。

公开(公告)号：US11754496B2

公开(公告)日：2023-09-12

申请号：US17449715

申请日：2021-10-01

Applicant: MLS ACQ, Inc.

Inventor： Martin L. Spartz ,  Anthony S. Bonanno ,  Kelly Renee McPartland

IPC: G01B9/02 ,  G01N21/3518 ,  G01N33/00 ,  G01N21/35

CPC classification number: G01N21/3518 ,  G01N33/0044 ,  G01N2021/3595 ,  G01N2201/1247

Abstract: A gas analysis system with an FTIR spectrometer preferably utilizes a long path gas cell, a narrow band detector, and an optical filter that narrows the detection region to measure hydrogen sulfide.

公开(公告)号：US20170062288A1

公开(公告)日：2017-03-02

申请号：US15205069

申请日：2016-07-08

Applicant: Renesas Electronics Corporation

Inventor： Toshikazu HANAWA ,  Kazuhide FUKAYA ,  Kentaro YAMADA

IPC: H01L21/66 ,  H01L21/768 ,  G01N21/84 ,  H01L23/532 ,  G01N21/73 ,  H01L21/311 ,  H01L23/522

CPC classification number: H01L22/26 ,  G01N21/68 ,  G01N21/73 ,  G01N21/84 ,  G01N2021/8411 ,  G01N2021/8427 ,  G01N2201/1247 ,  H01J37/32963 ,  H01J2237/334 ,  H01L21/31116 ,  H01L21/76802 ,  H01L21/76846 ,  H01L21/76877 ,  H01L23/5226 ,  H01L23/53223 ,  H01L23/53266 ,  H01L23/5329

Abstract: A via hole is accurately formed in an interlayer insulating film over a metal wiring. Of emission spectra of plasma to be used for dry etching of the interlayer insulating film, the emission intensities of at least CO, CN, and AlF are monitored such that an end point of the dry etching of the interlayer insulating film is detected based on the emission intensities thereof.

Abstract translation: 在金属布线上的层间绝缘膜中精确地形成通孔。 对于用于层间绝缘膜的干式蚀刻的等离子体的发射光谱，至少监测CO，CN和AlF的发射强度，使得基于层间绝缘膜的干蚀刻的终点被检测 发射强度。

公开(公告)号：US09562851B2

公开(公告)日：2017-02-07

申请号：US14648874

申请日：2013-12-04

Applicant: SP3H

Inventor： Sylvain Oberti ,  Johan Fournel

IPC: G01N21/3577 ,  G01N21/3504 ,  G01N21/27 ,  G01N21/31

CPC classification number: G01N21/3577 ,  G01N21/274 ,  G01N21/3504 ,  G01N2021/3181 ,  G01N2201/062 ,  G01N2201/0624 ,  G01N2201/121 ,  G01N2201/1211 ,  G01N2201/124 ,  G01N2201/1242 ,  G01N2201/1247 ,  G01N2201/127 ,  G01N2201/12723

Abstract: The present invention relates to a method for controlling a spectrometer for analyzing a product, the spectrometer including a light source including several light-emitting diodes having respective emission spectra covering in combination an analysis wavelength band, the method including steps of: supplying at least one of the light-emitting diodes with a supply current to switch it on, measuring a light intensity emitted by the light source by measuring a current at a terminal of at least another of the light-emitting diodes maintained off, determining, according to each light intensity measurement, a setpoint value of the supply current of each diode that is on, and regulating the supply current of each diode that is on so that it corresponds to the setpoint value.

Abstract translation: 本发明涉及一种用于分析产品的光谱仪的控制方法，该光谱仪包括具有多个发光二极管的光源，该发光二极管具有组合分析波长带的各发射光谱，该方法包括以下步骤：将至少一个 的发光二极管与供电电流接通，通过测量至少另一个发光二极管的端子上的电流来测量由光源发射的光强度，根据每个光 强度测量，导通的每个二极管的电源电流的设定值，以及调节导通的每个二极管的电源电流，使其对应于设定值。

公开(公告)号：US20140140607A1

公开(公告)日：2014-05-22

申请号：US14233002

申请日：2012-07-27

Applicant: Jonas Erjefält

Inventor： Jonas Erjefält

IPC: G06K9/00 ,  G06T7/00

CPC classification number: G06K9/00147 ,  G01N1/30 ,  G01N21/4795 ,  G01N21/77 ,  G01N21/78 ,  G01N33/5005 ,  G01N2021/7786 ,  G01N2201/1247 ,  G06K9/0014 ,  G06T7/0012

Abstract: A method for differentiating areas in a series of digital images, the method comprising the steps of: providing a series of images comprising undetermined marker areas; evaluating every image 1n for 1≦n≦N according to predetermined selection criteria and defining image marker areas as undetermined marker areas fulfilling the predetermined selection criteria; providing a new image 1new; and inserting new image marker areas in the new image 1new, said new image marker areas having the same shape and location as image marker areas present in image 1n but not in image 1n−1, and said new image marker areas being identifiable in 1new by a unique feature. Further, the application discloses a method for visualizing cell populations in tissue sections of a histological sample. Further, the application discloses a method for visualizing three-dimensional distribution of multiple cell populations in a histological sample.

Abstract translation: 一种用于区分一系列数字图像中的区域的方法，所述方法包括以下步骤：提供包括未确定标记区域的一系列图像; 根据预定的选择标准评估每个图像1n为1＆nlE; n＆nlE; N，并将图像标记区域定义为满足预定选择标准的未确定标记区域; 提供新的图像1新; 并在新图像1中插入新的图像标记区域，所述新图像标记区域具有与图像1n中但不在图像1n-1中存在的图像标记区域相同的形状和位置，并且所述新图像标记区域可以通过 一个独特的功能。 此外，该申请公开了一种在组织学样品的组织切片中可视化细胞群的方法。 此外，本申请公开了一种用于在组织学样本中可视化多个细胞群体的三维分布的方法。

公开(公告)号：US08248586B2

公开(公告)日：2012-08-21

申请号：US12427280

申请日：2009-04-21

Applicant: Mamoru Tomita

Inventor： Mamoru Tomita

IPC: G01N33/48 ,  G01N21/00 ,  G01B11/00 ,  G01B11/14

CPC classification number: G01N21/07 ,  G01N21/59 ,  G01N35/00584 ,  G01N35/025 ,  G01N2035/00148 ,  G01N2201/0415 ,  G01N2201/0446 ,  G01N2201/1247

Abstract: A blood analysis apparatus is provided. The blood analysis apparatus includes: a chip holding portion having an aperture which allows light to pass therethrough and holding a μ-TAS chip for holding a measurement liquid; a rotary body on which the chip holding portion is mounted; a light source; and a light-receiving unit. A measurement position of the rotary body at which the measurement liquid is to be measured with the light from the light source is set by: rotating the rotary body to obtain a light value of light which is emitted from the light source and received by the light-receiving unit through the aperture; and setting a rotational position of the rotary body where the light value is a threshold value or more, as the measurement position.

Abstract translation: 提供血液分析装置。 血液分析装置包括：芯片保持部，具有允许光通过的孔，并保持用于保持测量液体的μ-TAS芯片; 旋转体，其上安装有芯片保持部; 光源; 和光接收单元。 利用来自光源的光来测量测量液体的旋转体的测量位置是通过旋转旋转体来获得从光源发射并被光接收的光的光值 - 接收单元通过孔径; 并且将光值为阈值以上的旋转体的旋转位置设定为测量位置。