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公开(公告)号：US11898601B2
公开(公告)日：2024-02-13
申请号：US17407778
申请日：2021-08-20
Applicant: ASML NETHERLANDS B.V.
Inventor： Siegfried Alexander Tromp , Antonie Hendrik Verweij , Abraham Alexander Soethoudt , Jan Pieter Van De Poel , Mark Constant Johannes Baggen
IPC: F16C32/06 , H01L21/683 , F16C29/02 , G03F7/00 , G03F7/20
CPC classification number: F16C32/0611 , F16C29/025 , F16C32/0607 , G03F7/20 , G03F7/707 , G03F7/708 , H01L21/6831 , H01L21/6833
Abstract: A support table for a lithographic apparatus, a method of loading a substrate, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus. In one arrangement, a support table is configured to support a substrate. The support table has a base surface. The base surface faces a surface of the substrate when the substrate is supported by the support table. One or more gas cushion members are provided above the base surface. Each of the gas cushion members includes a recess. The recess is shaped and configured such that a lowering of the substrate into a position on the support table at which the substrate is supported by the support table causes a localised build-up of pressure within the recess. The localized build-up of pressure provides a localised gas cushioning effect during the lowering of the substrate.
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公开(公告)号：US4630941A
公开(公告)日：1986-12-23
申请号：US790650
申请日：1985-10-24
Applicant: Timothy J. Chainer , Robert A. Scranton , David A. Thompson
Inventor： Timothy J. Chainer , Robert A. Scranton , David A. Thompson
IPC: F16C32/06
CPC classification number: F16C29/025 , F16C32/06 , F16C32/0611
Abstract: An improved squeeze bearing apparatus exhibits torsional stiffness or rotational restraint since its rod-like bearing member (22) and its sleeve-like bearing member (28) comprise non-circular perimeters (26,32).
Abstract translation: 改进的挤压轴承装置显示出扭转刚度或旋转限制，因为其杆状轴承构件（22）及其套筒状轴承构件（28）包括非圆形周长（26,32）。
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公开(公告)号：US3529476A
公开(公告)日：1970-09-22
申请号：US3529476D
申请日：1966-11-28
Applicant: GEN MOTORS CORP
Inventor： LAUTZENHISER ARGYLE G
CPC classification number: F16C32/06 , F16C32/0611 , G01P15/11
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公开(公告)号：US2993739A
公开(公告)日：1961-07-25
申请号：US83010459
申请日：1959-07-28
Applicant: HONEYWELL REGULATOR CO
Inventor： HALL ROSS B
CPC classification number: F16C32/0611 , F16C32/0444 , F16C32/06 , F16C39/00 , G01R1/10 , Y10T74/12
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公开(公告)号：US20100289362A1
公开(公告)日：2010-11-18
申请号：US12781618
申请日：2010-05-17
Applicant: Serhiy Petrenko , Valentin Rangelov Zhelyaskov
Inventor： Serhiy Petrenko , Valentin Rangelov Zhelyaskov
CPC classification number: H02K7/08 , F16C23/043 , F16C32/0611
Abstract: A piezoelectric ultrasonic suspension in gas for creating a contactless bearing support of a precision instrument and specifically an electromagnetic motor. A gas micro-film of elevated pressure is formed between the adjoining surfaces of a spherical saddle and a spherical trunnion. The spherical trunnion is spaced apart from the spherical surface of a saddle by a gas micro-film when the piezoresonator is excited.
Abstract translation: 一种气体中的压电超声波悬浮液，用于产生精密仪器，特别是电磁马达的非接触轴承支撑。 在球形鞍座和球形耳轴的邻接表面之间形成高压气体微膜。 当压电振荡器被激发时，球形耳轴与气体微膜与鞍座的球形表面间隔开。
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Patent Agency Ranking
公开(公告)号：US20020126922A1
公开(公告)日：2002-09-12
申请号：US10137502
申请日：2002-05-01
Inventor： Jack Cheng , Christopher Damien Carruno
IPC: F16C032/00
CPC classification number: F16C32/0611 , F16C32/0662 , F16C32/0666
Abstract: An ultrastiff precision sonic bearing assembly and method thereof for controlling an effective coefficient of friction between two elements in slidable contact configured along an interface under a force sufficient to maintain contact and having static friction therebetween, by inducing a repetitive motion in one of the elements parallel to the interface thereby altering the effective coefficient of friction therebetween. The bearing assembly also provides for additional and independent electronic control over the average thickness thereof and senses the force thereon to allow the bearing assembly stiffness to be altered.
Abstract translation: 一种超声波精密声波轴承组件及其方法，用于通过在所述元件之一中的一个元件中引起重复运动而在足够的力的作用下，沿着界面配置的滑动接触中的两个元件之间的有效摩擦系数，以保持接触并且具有静摩擦力 到界面，从而改变它们之间的有效摩擦系数。 轴承组件还提供在其平均厚度上的附加且独立的电子控制，并且感测其上的力以允许轴承组件刚度改变。
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公开(公告)号：US5322369A
公开(公告)日：1994-06-21
申请号：US050727
申请日：1993-04-21
Applicant: Tadashi Kataoka , Shunsuke Mimura , Yoichi Kanemitsu , Yoshiyuki Maruta , Tatsuo Hinata , Mamoru Suzuki , Manabu Toshimitsu , Shunichi Aiyoshizawa
Inventor： Tadashi Kataoka , Shunsuke Mimura , Yoichi Kanemitsu , Yoshiyuki Maruta , Tatsuo Hinata , Mamoru Suzuki , Manabu Toshimitsu , Shunichi Aiyoshizawa
CPC classification number: F16C17/10 , F16C32/06 , F16C32/0611 , F16C39/00
Abstract: A dynamic pressure bearing is provided with a moving side bearing member and a fixed side bearing member so as to support a rotor for rotation by generating a fluid dynamic pressure between the moving side bearing member and the fixed side bearing member. The dynamic pressure bearing includes a high-frequency exciting device for applying a high-frequency vibration to the fixed side bearing member at the time of at least one of start-up and shutdown of the rotor. In this way, both bearing members are kept almost free from contact with each other and a frictional resistance at start-up and/or shutdown is minimized.
Abstract translation: 动压轴承具有移动侧支承构件和固定侧支承构件，以便通过在移动侧支承构件和固定侧支承构件之间产生流体动压力来支撑转子来转动。 动压轴承包括在转子的起动和停止中的至少一个时对固定侧支承构件施加高频振动的高频励磁装置。 以这种方式，两个轴承构件保持几乎没有彼此接触，并且启动和/或停机时的摩擦阻力最小化。
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公开(公告)号：US3626510A
公开(公告)日：1971-12-07
申请号：US3626510D
申请日：1970-09-04
Applicant: JAMES J KAUZLARICH , RICHARD D RHEUTAN JR
Inventor： KAUZLARICH JAMES J , RHEUTAN RICHARD D JR
CPC classification number: F16C17/08 , F16C32/0611 , F16C32/0614 , F16C2370/00
Abstract: A hydraulic thrust bearing having bearing members with horizontally aligned, spaced bearing surfaces and a liquid completely filling the space between the surfaces. One member is oscillated normal to the bearing surfaces to generate a positive load supporting force in the bearing.
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公开(公告)号：US3304132A
公开(公告)日：1967-02-14
申请号：US43576464
申请日：1964-12-18
Applicant: UNITED AIRCRAFT CORP
Inventor： BROEZE JOHN E , LAUBENDORFER WILLIAM J , BOTT DAVID W
IPC: F16C32/06
CPC classification number: F16C32/06 , F16C32/0611
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公开(公告)号：US3171696A
公开(公告)日：1965-03-02
申请号：US12229861
申请日：1961-07-06
Applicant: ELECTRO SONIC SYSTEMS INC
Inventor： HOUGHTON RICHARD B
IPC: F16C32/06
CPC classification number: F16C32/06 , F16C32/0611
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