Method and apparatus to develop lithographically defined high aspect ratio interconnects

    公开(公告)号:US11822249B2

    公开(公告)日:2023-11-21

    申请号:US17541162

    申请日:2021-12-02

    申请人: Intel Corporation

    发明人: Pooya Tadayon

    摘要: Disclosed is a method to develop lithographically defined high aspect ratio interconnects. Also disclosed is an apparatus comprising at least one vessel having a bottom and at least one sidewall extending from the bottom, wherein the at least one sidewall encloses an interior of the at least one vessel, a shaft having a proximal end and a distal end, wherein the distal end of the shaft extends into the interior of the at least one vessel, wherein the proximal end of the shaft is coupled to a motor, at least one support structure which extends laterally from the shaft, and a substrate attachment fixture on a distal end of the at least one support structure, wherein the at least one support structure and the substrate attachment fixture are within the interior of the at least one vessel.

    Nozzle and foreign matter removing device
    3.
    发明授权
    Nozzle and foreign matter removing device 有权
    喷嘴和异物去除装置

    公开(公告)号:US09114417B2

    公开(公告)日:2015-08-25

    申请号:US12704788

    申请日:2010-02-12

    CPC分类号: B05C3/04 B05C3/10 B08B9/0933

    摘要: A nozzle for forming a jet stream in a tank filled with a liquid, including a first injection hole for obliquely generating a first jet stream with respect to a bottom of the tank and a second injection hole for generating a second jet stream at an angle shallower than an angle at which the first jet stream is generated with respect to the bottom of the tank.

    摘要翻译: 一种用于在填充有液体的罐中形成喷射流的喷嘴,包括用于相对于罐的底部倾斜产生第一喷射流的第一喷射孔和用于产生角度较浅的第二喷射流的第二喷射孔 比第一喷射流相对于罐的底部产生的角度大。

    SUBSTRATE PLATING APPARATUS AND SUBSTRATE PLATING METHOD
    4.
    发明申请
    SUBSTRATE PLATING APPARATUS AND SUBSTRATE PLATING METHOD 有权
    基板镀层设备和基板镀层方法

    公开(公告)号:US20140314957A1

    公开(公告)日:2014-10-23

    申请号:US14257929

    申请日:2014-04-21

    申请人: EBARA CORPORATION

    摘要: A substrate plating apparatus is disclosed. The apparatus includes a substrate holder; a plating bath configured to plate a surface of the substrate in a plating solution; a cleaning bath configured to clean the substrate holder and the substrate with a cleaning liquid; an inner shell disposed in the cleaning bath and configured to house the substrate holder holding the substrate therein; and a cleaning liquid supply conduit configured to supply a cleaning liquid into the inner shell to clean the substrate, together with the substrate holder, with the cleaning liquid. The inner shell has an inner surface having an uneven configuration that follows an uneven exterior configuration of the substrate holder holding the substrate.

    摘要翻译: 公开了一种基板电镀装置。 该装置包括:基板支架; 电镀液,其被配置为在电镀溶液中对所述基板的表面进行平板化; 清洗浴,其配置成用清洁液清洁所述基板保持件和所述基板; 内壳,设置在所述清洗槽中并且构造成容纳将所述基板保持在其中的所述基板保持架; 以及清洁液供给管道,其构造成将清洗液体供应到所述内壳体中,以与所述基板保持器一起清洁所述基板与所述清洁液体。 内壳具有内表面,该内表面具有跟随保持基板的基板保持器的不均匀外部构造的不均匀构造。

    COATING DEVICE
    5.
    发明申请
    COATING DEVICE 失效
    涂装装置

    公开(公告)号:US20110192346A1

    公开(公告)日:2011-08-11

    申请号:US12862725

    申请日:2010-08-24

    申请人: Shao-Kai Pei

    发明人: Shao-Kai Pei

    IPC分类号: B05C5/00

    摘要: A coating device includes an autoclave and a spray member. The autoclave includes an autoclave body and a cover sealing the autoclave body. The autoclave body defines a plurality of holding grooves in an inner surface thereof for holding substrates. The spray member is positioned on the cover and received in the autoclave body. The spray member defines openings in a side surface thereof. The spray member includes a container and an ultrasonic atomization unit. The container defines a cavity in communication with the openings. The ultrasonic atomization unit is received in the cavity.

    摘要翻译: 涂覆装置包括高压釜和喷雾构件。 高压釜包括高压釜本体和密封高压釜本体的盖子。 高压釜体在其内表面中限定多个保持槽,用于保持基板。 喷雾构件定位在盖上并容纳在高压釜本体中。 喷射构件在其侧表面中限定开口。 喷雾构件包括容器和超声波雾化单元。 容器限定与开口连通的空腔。 超声波雾化单元被容纳在空腔中。

    DEVICE FOR REMOVING FOREIGN MATERIAL FROM PROCESSING TANK
    6.
    发明申请
    DEVICE FOR REMOVING FOREIGN MATERIAL FROM PROCESSING TANK 有权
    从加工罐中取出外来材料的装置

    公开(公告)号:US20110042207A1

    公开(公告)日:2011-02-24

    申请号:US12864157

    申请日:2009-01-21

    IPC分类号: C25D17/02

    摘要: Problem to be SolvedTo provide a processing tank with a simple construction which enables fluidization and agitation of a processing liquid in order to reliably prevent settling of the processing liquid.SolutionAn electrodeposition tank 2 that pools and enables fluidization and agitation of an electrodeposition paint 1 into which a work W is to be immersed, the electrodeposition tank 2 including: a grooved part 7 having a plurality of concave and convex shapes formed along a work-conveying direction on a bottom surface 6 of the electrodeposition tank 2; an electrodeposition paint supply pipe 12 that circulates and supplies the electrodeposition paint 1 to the electrodeposition tank 2; a plurality of branch pipes 13 which are arranged on ridges 10b of the grooved part 7 and which branch off the electrodeposition paint supply pipe 12; and electrodeposition paint discharge nozzles 14 provided oriented upstream in the work-conveying direction at a section of the branch pipes 13 which opposes bottom parts 10a of the grooved part 7.

    摘要翻译: 要解决的问题为了提供具有简单结构的处理罐,其能够使处理液体流化和搅拌,以便可靠地防止处理液体的沉降。 解决方案电沉积槽2,其沉积并使能够浸入工件W的电沉积涂料1的流化和搅拌,电沉积槽2包括:具有多个沿着工件形成的凹凸形状的凹槽部分7, 在电沉积槽2的底面6上的输送方向; 将电沉积涂料1循环并供给到电沉积槽2的电沉积涂料供给管12; 多个分支管13,其布置在开槽部分7的脊10b上,并从电沉积涂料供应管12分支; 以及在分支管13的与凹槽部分7的底部10a相对的部分处在工作输送方向上游设置的电沉积涂料排出喷嘴14。

    Swirl Coating Applicator
    7.
    发明申请
    Swirl Coating Applicator 审中-公开
    旋涂机

    公开(公告)号:US20090050055A1

    公开(公告)日:2009-02-26

    申请号:US12146989

    申请日:2008-06-26

    申请人: Steve Tsai

    发明人: Steve Tsai

    IPC分类号: B05C1/00

    CPC分类号: D06B3/045 B05C3/04 B05C3/12

    摘要: An applicator for coating a suture line is disclosed. The applicator includes a coating cavity having an inlet port for entry of the suture line into the coating cavity and an outlet port for exit of the suture line out of the coating cavity. The applicator also includes one or more injection ports configured to supply a coating composition into the coating chamber in a direction substantially tangential to the coating cavity.

    摘要翻译: 公开了一种用于涂覆缝合线的涂布器。 涂抹器包括具有用于将缝合线进入涂层腔的入口端口和用于将缝合线从出口腔排出的出口的涂层腔。 施加器还包括一个或多个注射端口,其构造成在基本上与涂层腔相切的方向上将涂层组合物供应到涂覆室中。

    Apparatus for painting elongated thin shafts
    8.
    发明授权
    Apparatus for painting elongated thin shafts 失效
    用于绘制细长轴的装置

    公开(公告)号:US5820676A

    公开(公告)日:1998-10-13

    申请号:US526447

    申请日:1995-09-11

    摘要: An apparatus for applying precise, uniform, coatings to elongated shafts, such as golf club shafts. Shafts are held by a gripper in a downwardly hanging array. A paint head assembly is moved upwardly over each shaft in sequence to apply a paint coating to a selected portion of the shaft length. The paint head assembly includes a flexible container including a central hole, a vertically moveable edge frame and an expander for changing the area of the hole. Raising the frame forms the container into a bowl like configuration, so that paint will contact a shaft extending through, and in contact with, the hole. The assembly is moved up along the shaft to apply a layer of paint, with the hole area varied to accommodate shaft taper, steps, etc. When the desired shaft length has been painted, the frame is lowered, changing the container to a trough-like configuration with pint away from the hole region. The expander widens the hole out of contact with the shaft and the assembly is lowered to below the shaft end. The sequence repeats with the next shaft. Mechanisms for intermittently moving shafts into and out of the painting location and for continuously agitating paint in the container are included.

    摘要翻译: 一种用于对诸如高尔夫球杆杆之类的细长轴施加精确均匀的涂层的装置。 轴由夹持器保持在向下悬挂的阵列中。 油漆头组件依次向上移动到每个轴上以将油漆涂层施加到轴长度的选定部分。 油漆头组件包括柔性容器,其包括中心孔,可垂直移动的边缘框架和用于改变孔的面积的膨胀器。 提升框架将容器形成碗状配置,使得涂料将接触延伸通过孔并与孔接触的轴。 组件沿着轴向上移动以施加一层油漆,其中孔面积变化以适应轴锥度,台阶等。当所需的轴长度已经被涂漆时,框架被降低,将容器更换为槽形, 类似配置,远离孔区域。 膨胀机加宽了与轴接触的孔,并将组件降低到轴端的下方。 该序列与下一个轴重复。 包括用于间歇地将轴进入和离开涂装位置并连续搅拌容器中的油漆的机构。

    Apparatus for cleaning, plating and/or coating articles
    9.
    发明授权
    Apparatus for cleaning, plating and/or coating articles 失效
    用于清洁,电镀和/或涂覆物品的设备

    公开(公告)号:US4537669A

    公开(公告)日:1985-08-27

    申请号:US600795

    申请日:1984-04-06

    申请人: Robert McInnes

    发明人: Robert McInnes

    CPC分类号: C25D17/20 B05C3/04 B08B3/06

    摘要: Apparatus for cleaning, plating and/or coating articles comprising a container adapted to contain a liquid cleaning, plating or coating material. A barrel is at least partially submerged in the container and supported for rotation about its longitudinal axis. A novel support for the barrel comprises a pair of rings concentric with the barrel and suspended by a plurality of rollers. Laterally spaced stationary end walls are mounted in fixed positions covering the ends of the barrel. The barrel has end openings and the stationary end walls fit within the end openings. A novel discharge chute extends from inside the barrel to the exterior thereof.

    摘要翻译: 用于清洁,电镀和/或涂覆制品的装置,其包括适于容纳液体清洁,电镀或涂覆材料的容器。 桶至少部分地浸没在容器中并被支撑以围绕其纵向轴线旋转。 筒的新型支撑件包括与筒同心并由多个辊悬挂的一对环。 横向间隔的静止端壁安装在覆盖枪管端部的固定位置。 桶具有端部开口,并且固定端壁配合在端部开口内。 一个新颖的卸料槽从筒体内部延伸到其外部。

    Sterilizer for rubber parts
    10.
    发明授权
    Sterilizer for rubber parts 失效
    橡胶部件灭菌器

    公开(公告)号:US3853622A

    公开(公告)日:1974-12-10

    申请号:US25508972

    申请日:1972-05-19

    发明人: RUTTEN W

    CPC分类号: B08B3/06 B05C3/04

    摘要: Sterilizer for rubber parts which operates without causing fretting of the rubber parts and ensures that the parts are free of loose particles or other foreign bodies. The sterilizer comprises a sterilization drum serving for receiving the rubber parts, which is arranged in an outer container which can be closed and is mounted for rotary movement by means of a shaft which passes through a passage out of the outer container, and a drive unit connected with the shaft. The operational speed range of the drive unit provides for at least one speed of rotation which is so high that the articles contained in the sterilizing drum are held by centrifugal force against the inner wall of the drum. The outer container and the passage for the drum shaft are adapted to resist a gauge pressure.

    摘要翻译: 用于橡胶部件的灭菌器,其操作而不会导致橡胶部件的磨损,并确保部件没有松散的颗粒或其它异物。 灭菌器包括用于接收橡胶部件的消毒滚筒,该橡胶部件布置在外部容器中,所述外部容器可以被封闭并且通过穿过外部容器的通道的轴而被安装成旋转运动;以及驱动单元 与轴连接。 驱动单元的操作速度范围提供至少一个旋转速度,其至少使得通过离心力将包含在杀菌滚筒中的物品保持在鼓的内壁上。 外容器和用于鼓轴的通道适于抵抗表压。